Semiconductor Process Pressure Measurement Solution – MKS 852B-13384 | Baratron® Series
The MKS 852B-13384 Baratron® Capacitance Manometer is the precision pressure transducer of choice for engineers designing and maintaining semiconductor fabrication, thin-film deposition, and high-vacuum process systems. When process repeatability and measurement accuracy are non-negotiable, this instrument delivers.
Where This Product Is Used
- Semiconductor Wafer Fabrication (CVD / PVD / Etch): Precise chamber pressure control during deposition and etch steps directly impacts yield. The 852B-13384 provides the stable, drift-free readings required for process repeatability at sub-Torr pressures.
- Vacuum Furnace & Annealing Systems: Thermal processing chambers demand accurate pressure monitoring across wide temperature ranges. The Baratron® capacitance sensing technology is temperature-compensated for consistent performance.
- Flat Panel Display (FPD) Manufacturing: Large-area glass substrate coating lines use this transducer to maintain uniform process pressure across the chamber, ensuring coating homogeneity.
- Solar Cell & Photovoltaic Production: PECVD and sputtering tools for thin-film solar cells rely on Baratron® sensors for real-time pressure feedback in reactive gas environments.
- Research & Development Vacuum Systems: University labs and R&D facilities specify the 852B series for its wide dynamic range and compatibility with corrosive process gases.
- Leak Detection & Vacuum Qualification: System integrators use this transducer as a reference standard during chamber qualification and leak-up rate testing.
Technical Specifications
| Part Number | MKS-852B-13384 |
| Series | Baratron® 852B |
| Manufacturer | MKS Instruments |
| Sensor Type | Capacitance Manometer (Temperature-Compensated) |
| Measurement Principle | Differential capacitance, gas-independent |
| Output Signal | Analog voltage (0–10 VDC full scale) |
| Process Connection | Conflat® / VCR® (confirm with datasheet) |
| Wetted Materials | 316L SS, Inconel diaphragm |
| Operating Temperature | 45°C heated body (standard) |
| Weight | 2,300 g |
| Condition | Genuine OEM — New / Refurbished / Surplus (specify on inquiry) |
Full datasheet available upon request. Contact us for range, accuracy, and connector specifications specific to this serial configuration.
Why Engineers Specify This Model
- Gas-Independent Measurement: Capacitance manometer technology measures true pressure regardless of gas species — critical when switching process gases or running mixed chemistries.
- High Accuracy & Repeatability: Sub-0.5% full-scale accuracy ensures process-to-process consistency, reducing scrap and rework costs.
- Corrosion-Resistant Wetted Path: Inconel diaphragm and 316L stainless steel body withstand aggressive halogen-based process gases (Cl₂, HF, NF₃).
- Heated Body Option: Prevents condensation of reactive by-products on the sensing element, extending service life in harsh CVD environments.
- Drop-In Replacement: Compatible with existing MKS 852 series wiring and signal conditioning — minimizes downtime during maintenance replacement.
- Proven Field Reliability: The Baratron® platform has over 50 years of deployment in semiconductor fabs worldwide.
Complete System Bill of Materials
The 852B-13384 integrates with the following MKS Instruments ecosystem components:
- Signal Conditioner / Readout: MKS PDR900 / PR4000B Series
- Mass Flow Controllers (upstream): MKS Alta® Series (e.g., MC20A) for process gas delivery
- Throttle Valve / Pressure Controller: MKS 653B / 248A Series
- Vacuum Gauges (roughing range): MKS 910 DualTrans™ Transducer
- System Controller: MKS Cirrus™ or third-party PLC/DCS integration via analog I/O
- Cables & Connectors: MKS 2-meter signal cable (specify connector type on order)
Compliance & Industry Standards
- CE Marked — EMC Directive 2014/30/EU compliant
- RoHS 3 Compliant (Directive 2015/863/EU)
- SEMI S2 / S8 Safety Guidelines compatible
- ISO 9001:2015 manufactured (MKS Instruments certified facility)
- REACH Regulation (EC) No 1907/2006 — no SVHC above threshold
Quality Assurance & Sourcing
At Konmask.com, every MKS Instruments component passes our 4-step verification before shipment:
- OEM Traceability Check: Serial number verified against MKS production records where available.
- Physical Inspection: Housing, connectors, diaphragm port, and label integrity inspected against OEM specifications.
- Functional Bench Test: Zero-point and span verification performed on calibrated test bench (certificate available on request).
- Secure Packaging: ESD-safe, nitrogen-purged packaging with desiccant for international transit.
We source directly from authorized MKS distributors, certified surplus dealers, and decommissioned fab equipment — all with full chain-of-custody documentation.
How to Source This Part
- Submit an RFQ: Email support@konmask.com with your required quantity, delivery timeline, and any calibration requirements.
- Receive Quote within 24 Hours: Our team will confirm availability, condition grade, and pricing in HKD, USD, or CNY.
- Order Confirmation & Payment: Secure payment via T/T bank transfer, PayPal, or trade assurance.
- Inspection & Dispatch: Units are tested, documented, and dispatched via DHL / FedEx with full tracking.
- Post-Sale Support: 90-day warranty on verified units. Technical support available via WhatsApp / WeChat.
Application-Specific FAQ
Q: Can the 852B-13384 be used with corrosive gases like Cl₂ or HF?
A: Yes. The Inconel diaphragm and 316L SS wetted path are rated for halogen-based chemistries. Confirm the specific range and heated body option for your application.
Q: What is the full-scale pressure range of this specific part number?
A: The range is encoded in the part number suffix. Contact us and we will confirm the exact range from the unit’s calibration label or datasheet.
Q: Is this a new or refurbished unit?
A: We carry both. Condition is confirmed at time of quotation. All units — new or refurbished — pass our 4-step QA process before shipment.
Q: Can you provide a calibration certificate?
A: Yes, a functional test report is available. NIST-traceable recalibration can be arranged at additional cost.
Q: What is the lead time for international orders?
A: In-stock units ship within 3–5 business days. Express DHL delivery to most destinations in 3–7 days after dispatch.
Q: Is this compatible with my existing MKS PDR900 readout?
A: Yes, the 852B series uses the standard MKS analog output protocol compatible with all PDR900 and PR4000 series readouts.
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