TOKYO ELECTRON 1805-320125-21 Cover Ring – TC600 TMU Thermal Processing Module
When a Cover Ring fails inside a Tokyo Electron TC600 TMU thermal processing unit, the consequences cascade instantly: process chamber integrity is compromised, wafer uniformity degrades, and the entire CVD or diffusion run must be aborted. Unplanned downtime in a semiconductor fab can cost tens of thousands of dollars per hour. The TOKYO ELECTRON 1805-320125-21 (ES1805-320125-21 / 27224CR-001) Cover Ring is the precision-engineered component that maintains the critical seal and thermal boundary within the process chamber — its absence or failure is simply not an option in high-volume wafer production.
Within the TC600 TMU (Thermal Management Unit) product family, the 1805-320125-21 Cover Ring occupies a foundational role in the BTS10-5/10-24-RL-721 controller architecture. TEL’s TC600 platform is one of the most widely deployed thermal processing systems in 200mm and 300mm fabs globally, trusted by leading IDMs and foundries for its process repeatability and uptime reliability. This specific cover ring — cross-referenced as ES1805-320125-21 and 27224CR-001 — is a direct OEM-specification replacement that ensures full compatibility with the CTLR TC600 TMU 071-003 assembly.
Technical Specifications
- Part Number: 1805-320125-21
- Cross Reference: ES1805-320125-21 | 27224CR-001
- Assembly Reference: BTS10-5/10-24-RL-721 CTLR TC600 TMU 071-003
- Description: Cover Ring
- OEM Brand: TOKYO ELECTRON (TEL)
- Compatible Platform: TC600 TMU (Thermal Management Unit)
- Weight: 2,600 g
- Condition: New / Refurbished (specify on inquiry)
Key Features & Benefits
- OEM-Specification Precision: Manufactured or sourced to exact TEL dimensional and material tolerances — no process drift from off-spec substitutes.
- Multi-Reference Compatibility: Covers all three part number variants (1805-320125-21, ES1805-320125-21, 27224CR-001) for simplified procurement.
- Chamber Integrity Assurance: Maintains critical thermal and atmospheric boundary conditions within the TC600 process chamber.
- Drop-In Replacement: Direct fit for BTS10-5/10-24-RL-721 CTLR TC600 TMU 071-003 assemblies — no modification required.
- Rapid Sourcing: Konmask.com maintains global supplier networks to minimize lead time for urgent fab maintenance needs.
Industry & Equipment Applications
- Semiconductor wafer fabrication (200mm / 300mm fabs)
- CVD (Chemical Vapor Deposition) process equipment
- Thermal diffusion and oxidation furnaces
- TOKYO ELECTRON TC600 TMU thermal processing systems
- IDM and foundry maintenance, repair & overhaul (MRO) programs
- Equipment refurbishment and used tool reconditioning
System Integration & Compatible Parts
The 1805-320125-21 Cover Ring is designed for use within the TOKYO ELECTRON TC600 TMU platform, specifically the BTS10-5/10-24-RL-721 CTLR TMU 071-003 assembly. When sourcing this part, procurement engineers should also verify the condition of adjacent chamber components including process tube assemblies, boat elevator mechanisms, and temperature controller modules (CTLR series) to ensure a complete and reliable maintenance cycle. Contact Konmask.com for a full BOM cross-reference service.
Our Quality Assurance Process
- Source Verification: All parts are traced to authorized distributors or certified refurbishers with documented chain of custody.
- Visual & Dimensional Inspection: Each unit is inspected against OEM drawings for surface condition, dimensional conformance, and marking accuracy.
- Packaging: Anti-static, moisture-barrier packaging with part number labeling for safe transit and storage.
- Documentation: Certificate of conformance and test reports available upon request.
How to Order
- Submit your inquiry via the Contact / RFQ form on Konmask.com with your required quantity and delivery timeline.
- Our technical team will confirm part compatibility, availability, and lead time within 24 business hours.
- Receive a formal quotation with pricing, shipping terms (EXW/FOB/CIF), and payment options.
- Upon order confirmation, parts are prepared, inspected, and dispatched with full shipping documentation.
Why Choose Konmask.com?
- Industrial Automation Specialists: Focused exclusively on PLC, DCS, and semiconductor equipment spare parts — not a generalist marketplace.
- Global Sourcing Network: Access to OEM, authorized distributor, and certified refurbisher inventory worldwide.
- B2B Expertise: Experienced in serving fab engineers, MRO buyers, and equipment resellers with accurate technical documentation.
- Fast Response: RFQ responses within 24 hours; emergency sourcing support available.
- Transparent Process: No hidden fees; clear quotation with full traceability documentation.
Frequently Asked Questions
- Q: Are part numbers 1805-320125-21, ES1805-320125-21, and 27224CR-001 the same part?
- A: Yes. These are cross-reference numbers for the same TOKYO ELECTRON Cover Ring used in the TC600 TMU platform. All three references are accepted on your RFQ.
- Q: Is this a new or refurbished part?
- A: Konmask.com can source both new OEM and certified refurbished units. Please specify your preference and budget in your inquiry for an accurate quote.
- Q: What is the lead time for this part?
- A: Lead time varies by stock availability. Standard sourcing is 3–10 business days; expedited options may be available. Contact us for current availability.
- Q: Can you provide a certificate of conformance?
- A: Yes. Documentation including CoC and inspection reports is available upon request for all orders.
- Q: Do you ship internationally?
- A: Yes. Konmask.com ships globally with EXW, FOB, and CIF terms available. We handle all export documentation.
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