Tokyo Electron 118100031717 MC-31035D DIG 32-OK01 Y2O3-TTELY2O3 KIT 030-001772 Control Panel Kit – MC-31035D Series
When a critical control panel assembly fails inside a Tokyo Electron etch chamber, the consequences extend far beyond a single tool going offline. Wafer lots stall mid-process, yield targets collapse, and every hour of unplanned downtime translates directly into six-figure revenue losses for a semiconductor fab. The Tokyo Electron 118100031717 MC-31035D DIG 32-OK01 Y2O3-TTELY2O3 KIT 030-001772 is the OEM-specified replacement kit engineered to restore full process control and eliminate that risk.
Within the MC-31035D control panel series, this kit occupies a precision-critical position: it integrates the DIG 32-OK01 digital I/O interface board with a Y₂O₃-coated (Yttria-coated) chamber-facing assembly, a combination that defines process repeatability in TEL’s plasma etch and dielectric etch platforms. As semiconductor fabs worldwide push toward sub-5nm node production, the demand for verified, traceable spare parts like this kit has made it a cornerstone component in global TEL tool maintenance programs.
Technical Specifications
- Manufacturer Part Number: 118100031717
- Assembly Reference: MC-31035D DIG 32-OK01
- Surface Treatment: Y₂O₃ (Yttria) coating – TTELY2O3 specification
- Kit Reference: KIT 030-001772
- Component Type: Control Panel Assembly Kit
- OEM Brand: Tokyo Electron Limited (TEL)
- Weight: 2,600 g (approx.)
- Condition: New / Refurbished / Used – specify on inquiry
- Compatibility: TEL etch process equipment (MC-31035D platform)
Key Features & Benefits
- OEM-Specified Y₂O₃ Coating: The Yttria surface treatment on chamber-contact components provides superior plasma erosion resistance, extending service intervals and protecting wafer contamination budgets.
- DIG 32-OK01 Digital I/O Integration: The 32-channel digital I/O board ensures deterministic signal response for process interlocks, recipe execution, and real-time fault detection.
- Drop-In Replacement: Engineered to OEM dimensional and electrical tolerances, enabling direct swap without re-qualification of the etch recipe baseline.
- Traceable Part Number: Full OEM part number 118100031717 ensures compatibility verification against TEL BOM documentation.
- Reduced Downtime Risk: Stocking this kit as a critical spare eliminates lead-time exposure during unplanned tool failures.
Industry & Equipment Applications
- Semiconductor Fabrication: Logic, memory (DRAM/NAND), and foundry fabs operating TEL etch tools at advanced nodes.
- Dielectric Etch: SiO₂, SiN, and low-k dielectric etch processes requiring stable plasma control.
- Conductor Etch: Polysilicon, metal, and hard-mask etch applications on TEL MC-series platforms.
- R&D & Pilot Lines: University and research institute TEL tool installations requiring OEM-grade spare parts.
- Equipment Refurbishment: Third-party tool refurbishers and used equipment dealers restoring TEL etch systems to production spec.
System Integration & Compatible Parts
This control panel kit is designed for integration within the TEL MC-31035D platform ecosystem. Compatible and commonly co-ordered parts include:
- TEL MC-31035D chamber liner assemblies
- TEL DIG series I/O expansion boards
- TEL Y₂O₃-coated focus ring and edge ring kits
- TEL RF match network components for MC-series tools
- TEL process kit consumables (KIT 030-series)
Contact our technical team to verify compatibility with your specific tool configuration and software revision.
Our Quality Assurance Process
- Source Verification: All parts are sourced from authorized channels, certified refurbishers, or directly from decommissioned TEL tools with documented service history.
- Visual & Dimensional Inspection: Each assembly is inspected against OEM drawings for physical integrity, coating condition, and connector completeness.
- Functional Testing: Where applicable, digital I/O boards are bench-tested for channel continuity and signal integrity prior to shipment.
- ESD-Safe Packaging: All electronic assemblies are packed in anti-static bags with foam cushioning and clearly labeled with part number and condition grade.
- Documentation: Shipment includes part number label, condition report, and packing list. OEM documentation available on request.
How to Order
- Submit your inquiry via the Contact / RFQ form on this page or email [email protected].
- Provide your tool model, serial number, and required condition (New / Refurbished / Used-Tested).
- Our technical team will confirm availability, lead time, and pricing within 24 business hours.
- Upon agreement, we issue a proforma invoice and arrange secure international shipping with full tracking.
Why Choose Konmask.com?
- Semiconductor Spare Parts Specialists: We focus exclusively on industrial automation and semiconductor equipment components, ensuring deep technical expertise on every inquiry.
- Global Sourcing Network: Access to verified inventory across Asia, North America, and Europe for hard-to-find TEL parts.
- Fast Response: Dedicated B2B inquiry handling with technical confirmation within 24 hours.
- Flexible Shipping: DHL, FedEx, and freight options with export documentation support for international buyers.
- Trusted by Fabs Worldwide: Serving procurement teams, maintenance engineers, and equipment managers at leading semiconductor manufacturers.
Frequently Asked Questions
Q: Is this part new or refurbished?
A: We stock multiple condition grades. Please specify your requirement (New OEM, Certified Refurbished, or Used-Tested) in your inquiry and we will confirm availability and pricing accordingly.
Q: Can you verify compatibility with my specific TEL tool?
A: Yes. Provide your tool model and serial number and our engineers will cross-reference against TEL BOM records to confirm fitment.
Q: What is the lead time?
A: Lead time varies by stock availability. In-stock items typically ship within 3–5 business days. Out-of-stock items are sourced within 2–6 weeks depending on market availability.
Q: Do you provide a warranty?
A: Yes. We offer a 90-day functional warranty on all tested and refurbished parts. Terms are confirmed at time of order.
Q: Can you export to my country?
A: We ship globally. Export compliance documentation is provided for all international shipments. Contact us to confirm any country-specific requirements.
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