Semiconductor Process Control Solution – TOKYO ELECTRON PHS120-Z03 | ATR 9100 Series
Where This Product Is Used
The TOKYO ELECTRON PHS120-Z03 Controller Assembly (P/N 9700-9960-06 / 901P-11130-0167) is a critical motion and process control module deployed within TEL’s ATR 9100 wafer handling and thermal processing platforms. It is found in:
- 300mm wafer fab environments running CVD, oxidation, or diffusion processes
- Cluster tool configurations requiring synchronized multi-chamber sequencing
- Automated wafer transfer systems (EFEM / loadlock integration)
- Semiconductor OEM maintenance depots performing board-level replacements
- University and R&D labs operating legacy TEL ATR 9100 equipment
Technical Specifications
| Manufacturer | TOKYO ELECTRON LIMITED (TEL) |
| Part Number (Primary) | 9700-9960-06 |
| Part Number (Secondary) | 901P-11130-0167 |
| Model / Designation | PHS120 Z03 |
| Compatible Platform | ATR 9100 |
| Assembly Type | Controller Assembly (CONTROLLER ASSY) |
| Weight | 2,600 g (approx.) |
| Condition | Used / Refurbished – Functionally Tested |
| Lead Time | Contact for availability |
Why Engineers Specify This Model
- Platform-native compatibility: Designed and validated exclusively for the TEL ATR 9100 architecture — no firmware adaptation required.
- Dual part-number traceability: Cross-referenced under both 9700-9960-06 and 901P-11130-0167, simplifying BOM reconciliation across TEL documentation revisions.
- Drop-in replacement: Maintains original connector pinout and mounting footprint, minimizing downtime during scheduled PM or emergency swap-out.
- Proven field reliability: The PHS120 series controller is a mature, well-documented module with extensive field history in high-volume fabs.
- Reduces OEM dependency: Sourcing through Konmask.com provides an alternative supply path when TEL direct lead times are unacceptable.
Complete System Bill of Materials
This controller assembly is typically used alongside the following TEL ATR 9100 subsystem components:
- TEL ATR 9100 Main Frame / Chassis
- Wafer Transfer Robot Arm Assembly
- EFEM (Equipment Front End Module) Interface Board
- Process Chamber Temperature Controller
- I/O Expansion Module (compatible TEL series)
- Power Distribution Unit (PDU) for ATR 9100
Contact our team to source complementary ATR 9100 spare parts as a complete kit.
Compliance & Industry Standards
- Designed for use in SEMI S2 / S8 compliant semiconductor equipment environments
- Compatible with SEMI E84 (EFEM handshake protocol) integrated systems
- Suitable for ISO Class 5 (Class 100) cleanroom deployment
- RoHS status: Verify with original TEL documentation for your specific revision
Quality Assurance & Sourcing
All TOKYO ELECTRON spare parts listed on Konmask.com undergo a structured inspection process:
- Visual inspection for physical damage, corrosion, and connector integrity
- Functional bench test where applicable
- Cross-verification of part numbers against TEL BOM documentation
- Secure anti-static packaging for international shipment
- Full traceability documentation available upon request
How to Source This Part
- Confirm your ATR 9100 system revision and verify P/N 9700-9960-06 or 901P-11130-0167 against your equipment BOM.
- Contact Konmask.com via email or WhatsApp with your quantity requirement and target delivery date.
- Receive a formal quotation with lead time, condition report, and shipping options.
- Place order — we support T/T wire transfer, PayPal, and trade assurance payment terms.
- Receive shipment with packing list, inspection report, and warranty documentation.
Application-Specific FAQ
Q: Is this controller compatible with ATR 9100 systems running older firmware revisions?
A: The PHS120-Z03 is a hardware assembly. Firmware compatibility depends on your system’s software version. Contact us with your system serial number for confirmation.
Q: Can this part be used in TEL Trias or Tactras platforms?
A: No. This assembly is validated for the ATR 9100 platform only. Cross-platform use is not recommended without TEL engineering sign-off.
Q: What is the warranty on this part?
A: We offer a 90-day functional warranty on all tested assemblies. Extended warranty options are available — contact our team for details.
Q: Do you provide installation support?
A: We provide documentation and remote technical guidance. On-site installation support can be arranged through our partner network.
Q: What is the lead time if the part is not in stock?
A: Typical sourcing lead time is 2–6 weeks depending on global availability. We maintain active sourcing networks across Asia, North America, and Europe.
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