Tokyo Electron TTLA07-13 F-MFC_16 PCB – Mass Flow Controller Board | TEL Semiconductor Equipment
When a Mass Flow Controller board fails mid-process in a semiconductor fab, the consequences are immediate and severe: gas flow regulation collapses, wafer batches are scrapped, and the entire CVD or etch chamber must be taken offline for emergency maintenance. Unplanned downtime in a 24/7 fab environment can cost tens of thousands of dollars per hour. The Tokyo Electron TTLA07-13 F-MFC_16 PCB is the precision control interface that prevents exactly this scenario — governing gas flow signals between the MFC units and the process controller with the accuracy that advanced node fabrication demands.
The TTLA07-13 board, carrying cross-reference part numbers 3880-200121-14, 3895-120916-14, WCSH-0240-0000, 0195-00218, and 773100, is a purpose-engineered PCB within Tokyo Electron’s F-MFC_16 multi-channel mass flow controller architecture. TEL is one of the world’s top three semiconductor equipment manufacturers, and this board is a critical sub-assembly found in TEL’s CVD, ALD, and etch platforms deployed in leading fabs across Asia, North America, and Europe. Its multi-channel design (16-channel MFC interface) positions it as a high-density solution for advanced process nodes where precise gas chemistry control is non-negotiable.
Technical Specifications
- Manufacturer: Tokyo Electron Limited (TEL)
- Part Number (Primary): TTLA07-13
- Series / Assembly: F-MFC_16 (16-Channel Mass Flow Controller Board)
- Cross-Reference Part Numbers: 3880-200121-14 / 3895-120916-14 / WCSH-0240-0000 / 0195-00218 / 773100
- Board Type: PCB – Process Control / MFC Interface
- Weight: 1,450 g
- Application Platform: TEL CVD, ALD, Etch Equipment
- Condition: Available in Genuine OEM / Refurbished Tested
Key Features & Benefits
- 16-Channel MFC Interface: Simultaneously manages up to 16 mass flow controller channels, enabling complex multi-gas process recipes without signal crosstalk.
- High Signal Integrity: Precision analog and digital signal routing ensures accurate flow setpoint delivery and real-time feedback to the process controller.
- Direct OEM Replacement: Drop-in compatible with TEL equipment — no firmware modification or re-calibration of the host system required.
- Robust Industrial Design: Engineered for continuous operation in cleanroom environments with strict EMI shielding and thermal management.
- Multiple Cross-Reference Numbers: Sourcing flexibility — identifiable by any of five part numbers across TEL’s internal BOM revisions.
- Reduced Downtime Risk: Stocking this board as a critical spare eliminates multi-week OEM lead times during emergency breakdowns.
Industry & Equipment Applications
- Semiconductor Fabrication: CVD (Chemical Vapor Deposition), ALD (Atomic Layer Deposition), Dry Etch chambers requiring precise gas flow control.
- Flat Panel Display (FPD) Manufacturing: TEL equipment used in TFT-LCD and OLED deposition processes.
- Solar Cell Production: Thin-film deposition equipment with multi-gas process requirements.
- Advanced Packaging: TSV and wafer-level packaging processes using TEL platforms.
- Research & Development Labs: University and corporate R&D fabs running TEL process equipment.
System Integration & Compatible Parts
The TTLA07-13 F-MFC_16 PCB integrates within TEL’s modular process equipment architecture. When sourcing this board, consider also verifying the condition of related sub-assemblies to ensure full system restoration:
- TEL MFC Units (individual gas line flow controllers)
- TEL Process Controller / Recipe Management Boards
- TEL Gas Box Assembly and manifold components
- TEL Power Supply Boards for MFC subsystems
- Interconnect cables and harnesses for F-MFC_16 assembly
Contact our technical team at [email protected] for system-level compatibility verification before ordering.
Our Quality Assurance Process
- Visual Inspection: Full board inspection for physical damage, burnt components, corrosion, and BGA solder joint integrity.
- Functional Testing: Where applicable, boards are bench-tested using TEL-compatible test fixtures to verify signal output and channel response.
- Cleaning & Reconditioning: Ultrasonic or IPA cleaning to remove contamination accumulated during fab operation.
- ESD-Safe Packaging: All PCBs are shipped in anti-static bags with foam cushioning inside double-wall cartons.
- Documentation: Test reports and inspection records available upon request for critical spare applications.
How to Order
- Submit an inquiry via the Contact / RFQ form on this page or email [email protected].
- Provide your equipment model, current fault symptoms, and required quantity.
- Our technical team will confirm part compatibility and stock availability within 24 hours.
- Receive a formal quotation with lead time, shipping options, and payment terms.
- Upon order confirmation, parts are prepared, tested, and dispatched with full tracking.
Phone / WhatsApp: +0086 19859288691 | Email: [email protected]
Why Choose Konmask.com?
- Specialized in Semiconductor & Industrial Automation Parts: We focus exclusively on hard-to-find OEM spare parts for process equipment — not a general electronics distributor.
- Global Sourcing Network: Access to genuine TEL parts through verified supply channels across Asia, North America, and Europe.
- Technical Expertise: Our team includes engineers with hands-on experience in semiconductor fab maintenance and process equipment troubleshooting.
- Fast Response: RFQ responses within 24 hours; emergency sourcing support available.
- Secure Export Compliance: All international shipments handled in accordance with applicable export regulations.
- Trusted by Fabs Worldwide: Serving maintenance engineers and procurement teams at leading semiconductor manufacturers globally.
Frequently Asked Questions
- Q: Is the TTLA07-13 the same as part number 3880-200121-14?
- A: Yes. TTLA07-13 is the primary TEL part number. 3880-200121-14, 3895-120916-14, WCSH-0240-0000, 0195-00218, and 773100 are all cross-reference numbers for the same F-MFC_16 PCB assembly used across different TEL equipment revisions.
- Q: What equipment models use this PCB?
- A: This board is used in Tokyo Electron CVD, ALD, and etch platforms that incorporate the F-MFC_16 multi-channel MFC subsystem. Please contact us with your specific equipment model for confirmation.
- Q: Do you offer a warranty on this part?
- A: Yes. We offer a standard 90-day functional warranty on tested and refurbished units. Warranty terms for genuine OEM new-surplus parts are discussed at the time of quotation.
- Q: Can you ship internationally?
- A: Yes. We ship worldwide via DHL, FedEx, and UPS with full export documentation. Lead times and shipping costs are confirmed at the quotation stage.
- Q: What if the part does not resolve my equipment fault?
- A: Our technical team can assist with fault diagnosis before and after the purchase. We recommend sharing your equipment error codes and maintenance history so we can help identify the root cause.
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Contact: [email protected] | +0086 19859288691
