Semiconductor Gas Flow Control Solution – AERA FC-985C | FC-985CT-BF Series
In semiconductor fabrication and thin-film deposition processes, even a 0.5% deviation in gas flow rate can cause wafer yield loss, film non-uniformity, or process chamber contamination. When a mass flow controller fails mid-run, the entire batch is at risk — downtime costs mount by the minute and replacement lead times from OEMs can stretch to weeks. The AERA FC-985C is the precision instrument that keeps your process chamber running within spec, every cycle.
The FC-985C belongs to AERA’s FC-985CT-BF series — a product line engineered specifically for high-purity inert and reactive gas control in semiconductor capital equipment. With P/N 1155820 (SQ158 configuration), this unit is calibrated for Argon (AR) at a full-scale flow of 100 SCCM, making it a direct-fit replacement or upgrade component for CVD, PVD, ALD, and etch tool platforms where precise Ar flow is critical to process repeatability.
Where This Product Is Used
- CVD / PECVD Systems – Argon carrier gas and purge line control in silicon nitride, oxide, and low-k dielectric deposition chambers
- PVD / Sputtering Tools – Precise Ar flow regulation for plasma ignition and target erosion uniformity
- ALD (Atomic Layer Deposition) – Pulse-and-purge cycle control requiring sub-SCCM repeatability
- Dry Etch / RIE Systems – Argon dilution gas metering for etch selectivity tuning
- Ion Implant Equipment – Source gas and beam-line purge flow management
- Semiconductor R&D Labs – Process development benches requiring traceable, stable gas delivery
- Flat Panel Display (FPD) Manufacturing – Large-area deposition tools using Ar as a process or carrier gas
Technical Specifications
- Manufacturer: AERA (Japan)
- Model / SKU: FC-985C
- Series: FC-985CT-BF
- Part Number: 1155820
- Configuration Code: SQ158
- Gas Species: Argon (AR)
- Full-Scale Flow Range: 100 SCCM
- Flow Medium: Inert gas (Ar) – non-corrosive service
- Country of Origin: Japan
- HS Code: 9026.80.20
- Condition: Used / Refurbished (available; new OEM also sourceable)
Note: All specifications are based on OEM documentation and part number decoding. Konmask does not fabricate or modify specifications. Buyers are advised to verify calibration certificates upon receipt.
Why Engineers Specify This Model
- OEM-Grade Accuracy: AERA MFCs are factory-calibrated to NIST-traceable standards, delivering ±1% full-scale accuracy for repeatable process results
- SQ158 Configuration: The SQ-type fitting configuration ensures direct mechanical compatibility with standard semiconductor tool gas panels without adapter modifications
- FC-985CT-BF Series Reliability: Designed for continuous-duty operation in cleanroom environments; proven in high-volume production fabs across Asia, North America, and Europe
- 100 SCCM Sweet Spot: Ideal for low-flow Ar applications where coarser MFCs introduce unacceptable control noise — critical for ALD pulse timing and etch endpoint stability
- Drop-In Replacement: P/N 1155820 is a documented OEM part number, enabling direct procurement without re-qualification in most tool configurations
Complete System Bill of Materials
The FC-985C is typically integrated with the following components in a gas delivery system:
- MFC Driver / Controller Card (e.g., AERA or compatible multi-channel controller)
- Upstream Pressure Regulator (set point: typically 20–30 psig for 100 SCCM Ar)
- Isolation Valves (VCR or SQ-type, matching FC-985C port configuration)
- Downstream Pressure Transducer (for process chamber pressure feedback)
- Gas Panel Manifold (compatible with SQ158 mounting footprint)
- High-Purity Ar Supply Line (99.999% purity recommended for semiconductor service)
Contact Konmask for sourcing assistance on any of the above complementary components.
Compliance & Industry Standards
- Designed and manufactured in Japan under ISO 9001 quality management systems
- Compatible with SEMI F1 and SEMI F5 standards for gas distribution components in semiconductor equipment
- RoHS-compliant materials of construction (verify with OEM datasheet for specific lot)
- NIST-traceable flow calibration (calibration certificate available upon request for refurbished units)
Quality Assurance & Sourcing
At Konmask.com, every mass flow controller undergoes a structured inspection process before listing:
- Visual & Mechanical Inspection: Port condition, body integrity, label legibility, and connector pin check
- Part Number Verification: Cross-referenced against OEM documentation to confirm model, gas species, and flow range
- Functional Test (where applicable): Flow bench verification against rated full-scale output
- Traceability: Serial number and P/N recorded for full chain-of-custody documentation
We source from decommissioned semiconductor fabs, equipment brokers, and authorized surplus channels — never from unverified grey-market sources.
How to Source This Part
- Submit an Inquiry: Email support@konmask.com with your required quantity, delivery timeline, and any calibration requirements
- Receive a Quote: Our team responds within 1 business day with pricing, lead time, and available condition grades
- Confirm & Ship: Orders are packed in anti-static, ESD-safe packaging and shipped via DHL / FedEx with full tracking
- After-Sales Support: Technical documentation and calibration records provided upon request
📞 WhatsApp / Phone: +0086 19859288691
Application-Specific FAQ
- Q: Can the FC-985C be re-calibrated for a different gas species?
- A: Yes. AERA MFCs can be recalibrated by authorized service centers. However, the FC-985C P/N 1155820 is factory-set for Argon at 100 SCCM. Recalibration for other gases requires a new calibration certificate and may affect the part number designation.
- Q: Is this unit compatible with my existing AERA multi-channel controller?
- A: The FC-985CT-BF series uses standard AERA analog (0–5V or 4–20mA) or digital interface protocols. Compatibility depends on your controller model. Please share your controller P/N when inquiring and our engineers will confirm compatibility.
- Q: What is the lead time for this part?
- A: In-stock units ship within 3–5 business days. For sourcing requests, typical lead time is 2–4 weeks depending on availability in the secondary market.
- Q: Do you provide a warranty on used MFCs?
- A: Konmask offers a 30-day functional warranty on inspected and tested units. Extended warranty options are available — contact us for details.
- Q: Can you supply multiple units for a tool fleet upgrade?
- A: Yes. We regularly fulfill multi-unit orders for fab maintenance teams. Volume pricing is available for orders of 3 or more units.
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Original Source: https://Konmask.com
Contact: support@konmask.com | +0086 19859288691
