Semiconductor Gas Flow Control Solution – LINTEC MC-3000E MC-3102E-NC | MC-3000E Series
Where This Product Is Used
The LINTEC MC-3000E (interface card: MC-3102E-NC) is a thermal mass flow controller engineered for precision nitrogen (N₂) gas delivery at 500 SCCM full-scale range. It is deployed in high-purity process environments where stable, repeatable gas flow is critical to yield and process integrity.
Typical installation environments include:
- CVD / PECVD chambers — N₂ purge, carrier gas, and dilution lines in thin-film deposition tools
- ALD (Atomic Layer Deposition) — inert purge cycles between precursor pulses requiring fast-response flow control
- Diffusion furnaces — ambient atmosphere control during oxidation and annealing steps
- Etch systems — N₂ backfill and chamber conditioning prior to plasma ignition
- Wafer cleaning & drying stations — controlled N₂ blow-off and IPA vapor displacement
- Gas panel / VMB assemblies — stick-mount integration in modular gas delivery systems
Technical Specifications
| Model | MC-3000E |
| Interface / Communication Card | MC-3102E-NC |
| Gas Species | N₂ (Nitrogen) |
| Full-Scale Flow Range | 500 SCCM |
| Control Type | Thermal Mass Flow Controller (MFC) |
| Series | MC-3000E Series |
| Manufacturer | LINTEC Co., Ltd. (Japan) |
| Valve Type | Normally Closed (NC) |
| Weight | 1,230 g |
| Origin | Japan |
Why Engineers Specify This Model
- Normally Closed (NC) fail-safe valve — gas flow stops automatically on power loss, protecting process chambers and personnel
- MC-3102E-NC interface card — enables digital communication and setpoint control via standard MFC bus protocols used in OEM tool architectures
- 500 SCCM range optimized for N₂ — calibrated at factory for nitrogen; no field recalibration required for N₂ applications
- LINTEC MC-3000E platform — widely adopted in Japanese and Taiwanese semiconductor OEM equipment; proven compatibility with major tool brands
- Compact form factor — fits standard stick-mount and surface-mount gas panel configurations without bracket modification
Complete System Bill of Materials
For a fully operational N₂ flow control loop, the following components are typically required alongside this MFC:
- Upstream pressure regulator (recommended inlet: 30–50 psig)
- Inlet / outlet VCR or Swagelok face-seal fittings (1/4″ standard)
- MFC power supply and signal conditioner (±15 VDC or 24 VDC depending on card type)
- MC-3102E-NC interface card (included / integrated with this unit — confirm at order)
- Flow readout / controller (PLC, DCS, or dedicated MFC controller)
- Downstream isolation valve (manual or pneumatic)
- High-purity N₂ supply line (99.999% purity recommended for semiconductor use)
Compliance & Industry Standards
- Designed for semiconductor-grade gas handling environments
- Compatible with SEMI F-series gas panel design guidelines
- Normally Closed valve design aligns with SEMI S2 safety requirements for automated equipment
- RoHS-compliant materials (confirm with LINTEC datasheet for specific lot)
- CE marking applicability: verify with LINTEC for export documentation
Quality Assurance & Sourcing
Konmask.com sources LINTEC MFC units through established industrial automation supply channels. Each unit offered is:
- Inspected for physical integrity prior to listing
- Stored in ESD-safe, climate-controlled conditions
- Shipped with original manufacturer labeling and part markings intact
- Available with traceability documentation upon request
For new, refurbished, or surplus stock status — please confirm availability and condition at time of inquiry via support@konmask.com.
How to Source This Part
To place an order or request a quote for the LINTEC MC-3000E MC-3102E-NC N2 500 SCCM Mass Flow Controller:
- Online: Add to cart directly on this page
- Email RFQ: support@konmask.com — include your required quantity, delivery timeline, and any certification requirements
- Phone / WhatsApp: +0086 19859288691
- Lead time: Contact us for current stock status and lead time; expedited shipping available for urgent semiconductor tool maintenance
Application-Specific FAQ
Q: Is this MFC calibrated for N₂ only, or can it be used for other gases?
A: This unit is factory-calibrated for N₂ at 500 SCCM. Use with other gases requires a conversion factor or recalibration. Contact us for gas-specific conversion factor guidance.
Q: What is the MC-3102E-NC interface card, and is it included?
A: The MC-3102E-NC is LINTEC’s digital communication interface card for the MC-3000E platform. It enables setpoint and readback via standard MFC signal protocols. Confirm inclusion with your order — contact us if you need the card separately.
Q: Can this unit be used as a drop-in replacement for other 500 SCCM N₂ MFCs?
A: Mechanical and electrical compatibility depends on your existing gas panel design. Verify fitting type (VCR, Swagelok, etc.), power supply voltage, and communication protocol before installation. Our technical team can assist with compatibility checks.
Q: Do you offer calibration certificates?
A: Calibration documentation availability varies by unit. Please specify your requirement at time of order and we will confirm what documentation is available.
Q: What is the warranty on this product?
A: Warranty terms depend on unit condition (new vs. surplus). Contact us for details specific to your order.
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Contact: support@konmask.com | +0086 19859288691
