APPLIED MATERIALS 0050-04414 0161-31275 H21-03118 M-832HG-S 1139039 RF Coil Inner – Semiconductor Process Chamber Component
When an RF coil inner fails inside a CVD or etch process chamber, the consequences are immediate and costly: plasma uniformity collapses, wafer yield drops, and the entire production line faces unplanned downtime. In high-volume semiconductor fabs running 24/7, every hour of unscheduled maintenance translates directly into lost revenue and missed delivery commitments. The RF coil inner is not a peripheral accessory — it is the electromagnetic heart of the process chamber, and its integrity is non-negotiable.
The APPLIED MATERIALS part number 0050-04414 (cross-references: 0161-31275, H21-03118, M-832HG-S, 1139039) is an OEM-specified RF Coil Inner designed for Applied Materials process equipment. Applied Materials is the world’s leading supplier of semiconductor manufacturing equipment, and this component is engineered to the exacting tolerances required for plasma-based deposition and etch processes. Sourcing a genuine or OEM-equivalent replacement is critical to restoring process stability and maintaining chamber qualification.
Technical Specifications
- Manufacturer: APPLIED MATERIALS
- Primary Part Number: 0050-04414
- Cross-Reference Part Numbers: 0161-31275 / H21-03118 / M-832HG-S / 1139039
- Component Type: RF Coil Inner
- Application: Semiconductor process chamber (CVD / Etch)
- Weight: Approx. 800 g
- Condition Available: New OEM / Refurbished / Used Tested
Note: Electrical and dimensional specifications are equipment-specific. Please contact us with your chamber model for full compatibility confirmation.
Key Features & Benefits
- OEM-Grade Precision: Manufactured to Applied Materials’ original design specifications, ensuring drop-in compatibility and process repeatability.
- Plasma Uniformity: The RF coil inner geometry directly controls plasma distribution across the wafer surface — a critical factor for yield and film uniformity.
- Multiple Cross-References: Covers part numbers 0050-04414, 0161-31275, H21-03118, M-832HG-S, and 1139039, simplifying procurement across different BOM revisions.
- Rapid Sourcing: Konmask.com maintains global supplier networks to locate hard-to-find semiconductor spare parts with short lead times.
- Quality Inspected: All parts undergo visual inspection and documentation verification before shipment.
Industry & Equipment Applications
- Semiconductor wafer fabrication (front-end-of-line)
- Chemical Vapor Deposition (CVD) process chambers
- Plasma Etch systems
- Applied Materials Centura, Producer, and related platform equipment
- Flat panel display (FPD) manufacturing equipment
- Advanced packaging and MEMS fabrication lines
System Integration & Compatible Parts
The RF Coil Inner (0050-04414) works in conjunction with the RF coil outer assembly, matching network components, and chamber liner systems. When replacing this part, it is recommended to inspect the following related components:
- RF Coil Outer Assembly
- Chamber Liner / Shield
- RF Match Network
- Process Kit (including focus ring and edge ring)
- Electrostatic Chuck (ESC)
Contact our technical team for a full BOM review and compatible part recommendations for your specific chamber configuration.
Our Quality Assurance Process
- Step 1 – Source Verification: Parts are sourced from authorized distributors, OEM surplus channels, or certified refurbishers.
- Step 2 – Visual & Dimensional Inspection: Each unit is inspected for physical integrity, surface condition, and part number markings.
- Step 3 – Documentation: Traceability documentation (COC, test reports where available) is provided upon request.
- Step 4 – Secure Packaging: Anti-static and protective packaging to prevent damage during international shipping.
- Step 5 – Export Compliance: All shipments comply with applicable export regulations and customs requirements.
How to Order
- Submit an inquiry via the Contact Us form or email [email protected].
- Provide your part number (0050-04414 or cross-reference), required quantity, and destination country.
- Our team will respond with availability, lead time, and a formal quotation within 1 business day.
- Upon order confirmation, we arrange secure packaging and international shipping with full tracking.
Why Choose Konmask.com?
- Specialized in Industrial Automation & Semiconductor Parts: We focus exclusively on hard-to-find OEM components for industrial and semiconductor equipment.
- Global Sourcing Network: Access to surplus inventory, authorized distributors, and certified refurbishers worldwide.
- B2B Inquiry-First Model: We provide formal quotations, COC documentation, and dedicated account support — no retail guesswork.
- Fast Response: Inquiries answered within 24 hours; urgent requests prioritized.
- Trusted by Engineers Worldwide: Serving procurement teams and maintenance engineers across Asia, Europe, and the Americas.
Frequently Asked Questions
- Q: Is part number 0050-04414 the same as 0161-31275 or H21-03118?
- A: Yes. These are cross-reference part numbers for the same APPLIED MATERIALS RF Coil Inner component, used across different BOM revisions and documentation versions. All refer to the same physical part.
- Q: Do you supply new OEM or refurbished units?
- A: We can supply new OEM, certified refurbished, and used-tested units depending on availability. Please specify your preference when submitting an inquiry.
- Q: What is the lead time for this part?
- A: Lead time varies by stock availability. In-stock units typically ship within 3–5 business days. For sourced units, lead time is typically 2–4 weeks. Contact us for current availability.
- Q: Can you provide a Certificate of Conformance (COC)?
- A: Yes, COC and available traceability documentation can be provided upon request for most units.
- Q: Do you ship internationally?
- A: Yes. We ship worldwide via DHL, FedEx, UPS, and other carriers. All shipments include tracking and comply with international export regulations.
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