Applied Materials 0200-20285 – Pedestal Cover Upper | HPS3000 / HPR12K Platform
Engineering Background: The pedestal assembly is the thermal and mechanical heart of Applied Materials’ chemical vapor deposition (CVD) and etch process chambers. The upper pedestal cover (P/N 0200-20285, cross-ref: 543956 / DGSL-10-30-Y3A) provides critical thermal isolation and structural shielding between the substrate support pedestal and the chamber body, maintaining process repeatability across wafer lots.
Product Positioning: Sourced to OEM dimensional and material specifications, this replacement cover is qualified for HPS3000-9 and HPR12K-00 process modules. It is a direct drop-in for scheduled preventive maintenance (PM) cycles and unplanned chamber-down events, minimizing mean time to recovery (MTTR) in high-volume semiconductor fabs.
Complete Technical Specifications
- Manufacturer: Applied Materials (AMAT)
- Part Number: 0200-20285
- Cross-Reference / Alternate P/N: 543956 | DGSL-10-30-Y3A
- Compatible Platform: HPS3000-9 | HPR12K-00
- Component Function: Pedestal Cover – Upper
- Material: High-purity aluminum alloy / anodized surface (OEM spec)
- Weight: ~800 g
- Operating Environment: High-vacuum process chamber, elevated temperature
- Compliance: SEMI S2 / S8 equipment safety guidelines applicable
- Condition: New / Refurbished-to-spec (specify at inquiry)
Proven Application Environments
- CVD / PECVD Process Chambers – Dielectric and metal film deposition on 200 mm / 300 mm wafers
- Etch Modules – Plasma etch chambers requiring precise pedestal thermal management
- High-Volume Logic & Memory Fabs – TSMC, Samsung, SK Hynix, Micron-class production environments
- R&D / Pilot Lines – Universities and research institutes running AMAT HPS-series tools
- Refurbishment & Resale Operations – Equipment refurbishers restoring HPS3000 / HPR12K tools to production spec
Engineering Advantages
- OEM-Matched Geometry: Machined to original AMAT drawing tolerances — no shimming or field modification required
- Thermal Stability: Maintains dimensional integrity across repeated thermal cycles (ambient to process temperature)
- Surface Finish: Anodized or coated per OEM spec to minimize particle generation inside the process chamber
- Drop-In Replacement: Compatible with existing fastener patterns and O-ring grooves — reduces PM labor time
- Traceable Sourcing: Each unit accompanied by inspection records and, where applicable, OEM CoC documentation
System Architecture & Signal Flow
Within the HPS3000-9 / HPR12K-00 chamber stack, the pedestal upper cover interfaces directly with:
- Pedestal Body (Lower Assembly) – Mechanical mating surface; O-ring sealed for vacuum integrity
- Heater Element / ESC – Thermal barrier preventing heat loss to chamber walls
- Lift Pin Mechanism – Cover geometry accommodates lift-pin travel without interference
- Chamber Liner / Shield – Outer boundary defining the process gas confinement zone
- RF Ground Path – Conductive contact points maintain RF return continuity in plasma processes
Sourcing & Quality Verification
- All units inspected against AMAT OEM drawings prior to shipment
- Dimensional check: critical mating surfaces, O-ring grooves, fastener holes
- Surface inspection: no cracks, pitting, or delamination of anodized coating
- Packaging: anti-static bag + foam-lined export carton; cleanroom-compatible packaging available on request
- Documentation: packing list, inspection report, and CoC provided with each order
Procurement Process
- Submit Inquiry – Email [email protected] with your P/N, quantity, and required condition (new / refurb)
- Receive Quote – Pricing and lead time confirmed within 24 business hours
- Order Confirmation – PO accepted; payment via T/T, PayPal, or trade terms for qualified accounts
- Inspection & Dispatch – Unit re-inspected, photographed, and shipped with full documentation
- Delivery – DHL / FedEx express worldwide; EXW Xiamen or CIF available
Technical FAQ
Q: Is 0200-20285 compatible with both HPS3000-9 and HPR12K-00?
A: Yes. The part number spans both platform variants. Confirm your chamber serial number at inquiry for final verification.
Q: What is the difference between P/N 0200-20285 and cross-ref 543956?
A: 543956 is an alternate AMAT internal reference (BOM alias) for the same physical part. DGSL-10-30-Y3A is the drawing/revision designator.
Q: Can this part be used after re-anodizing?
A: Yes, provided re-anodizing is performed to AMAT-equivalent spec (Type III, controlled thickness). Konmask can supply pre-anodized units on request.
Q: What is the typical lead time?
A: In-stock units ship within 3–5 business days. Out-of-stock sourcing typically requires 2–4 weeks depending on market availability.
Q: Do you provide a warranty?
A: Yes — 90-day warranty against manufacturing defects for new units; 30-day warranty for refurbished units.
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