Semiconductor Etch & CVD Chamber Solution — Applied Materials 0200-20331 | Cover Ring 8″ B101 Ceramic
Where This Product Is Used
The Applied Materials 0200-20331 Cover Ring is a precision ceramic consumable engineered for 8-inch wafer processing chambers. It is widely deployed in the following production environments:
- CVD (Chemical Vapor Deposition) chambers — protects chamber walls from deposition buildup during thin-film processes
- Plasma Etch chambers — shields the chamber liner from plasma erosion and cross-contamination
- PVD (Physical Vapor Deposition) systems — used as a process kit component to maintain chamber integrity
- 300mm fab retrofit lines using legacy 8″ toolsets for specialty device production
- R&D and pilot fabs running Applied Materials Producer, Centura, or DPS platforms
Typical industries: Logic IC, Memory (DRAM/NAND), Power Devices, MEMS, Compound Semiconductors (GaAs, SiC).
Technical Specifications
| Parameter | Value |
|---|---|
| Part Number (OEM) | 0200-20331 |
| Cross-Reference P/N | 386642 / 070125409 / FB15053 |
| Description | Cover Ring, 8″, B101 Grade Ceramic |
| Outer Diameter (OD) | 10.75 inches (273.05 mm) |
| Material | B101 Alumina Ceramic (Al₂O₃ ≥ 99.5%) |
| Compatible Platform | Applied Materials Centura / Producer / DPS Etch |
| Wafer Size | 8 inch (200 mm) |
| Weight | 2,600 g (approx.) |
| Condition | New / Refurbished (specify on inquiry) |
| Lead Time | Contact for availability |
Why Engineers Specify This Model
- B101 Ceramic Grade — High-purity alumina with superior plasma resistance, minimizing particle generation and extending PM intervals
- Dimensional Precision — 10.75″ OD machined to tight tolerances ensures proper seating and uniform plasma confinement
- Multi-P/N Compatibility — Cross-references 386642, 070125409, and FB15053, simplifying procurement across different BOM revisions
- Drop-in Replacement — Designed to OEM specifications; no chamber modification required
- Reduced Downtime — Stocking this consumable as a spare reduces unplanned chamber downtime during scheduled PM cycles
Complete System Bill of Materials
The 0200-20331 Cover Ring is typically used alongside the following process kit components in an Applied Materials 8″ etch or CVD chamber:
- Focus Ring / Edge Ring (200 mm)
- Chamber Liner / Quartz Liner
- Electrostatic Chuck (ESC) Assembly
- Upper Electrode / Showerhead
- Shadow Ring
- O-Ring Kit (chamber seal set)
- Lift Pin Assembly
Contact Konmask.com for complete process kit sourcing and BOM matching services.
Compliance & Industry Standards
- Manufactured to SEMI S2 / S8 equipment safety guidelines
- Material traceability compliant with ISO 9001:2015 supply chain requirements
- RoHS-compatible ceramic material composition
- Compatible with AMAT OEM chamber qualification procedures
Quality Assurance & Sourcing
At Konmask.com, every ceramic process kit component undergoes:
- Visual & dimensional inspection — OD, ID, flatness, and surface finish verified against OEM drawings
- Traceability documentation — Lot records and CoC (Certificate of Conformance) available on request
- Secure packaging — Anti-static, foam-lined packaging to prevent chipping during transit
- Sourcing transparency — Parts sourced from authorized distributors, OEM surplus, or qualified refurbishers
How to Source This Part
- Add to cart or submit an RFQ via the product page
- Provide your chamber model and current P/N for cross-reference confirmation
- Receive a formal quotation with lead time and CoC availability within 24 hours
- Secure payment via T/T, PayPal, or trade credit (qualified accounts)
- Worldwide shipping — DHL / FedEx / UPS with full tracking
For urgent requirements or volume orders, contact: [email protected] | +0086 19859288691
Application-Specific FAQ
Q: Is the 0200-20331 compatible with both CVD and Etch chambers?
A: Yes. The B101 ceramic grade is chemically inert to both deposition precursors (e.g., TEOS, WF₆) and etch plasmas (e.g., Cl₂, HBr, CF₄). Confirm your specific chamber model with our technical team.
Q: What is the typical replacement interval?
A: Replacement frequency depends on process chemistry and RF power. Most fabs replace cover rings every 200–500 RF hours or at scheduled quarterly PM cycles.
Q: Can you supply a matched set (cover ring + focus ring + liner)?
A: Yes. Konmask.com offers complete process kit sets. Contact us with your chamber configuration for a matched BOM quote.
Q: Do you offer refurbished units?
A: Refurbished units with re-machining and cleaning certification are available at reduced cost. Specify “refurbished” in your RFQ.
Q: What is the lead time for this part?
A: In-stock units ship within 1–3 business days. Out-of-stock lead time is typically 2–4 weeks. Contact us for real-time availability.
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Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691
