Applied Materials 907.00.74 EPS33179 DN63 ISO-K 3P PM P2 980C W/ TC100 PM C01 692A – TMH 071P Turbomolecular Pump Assembly
When a turbomolecular pump fails mid-process in a semiconductor fab, the consequences cascade instantly: vacuum integrity collapses, wafer batches are scrapped, and chamber requalification can take days. Every hour of unplanned downtime in a CVD or etch process module translates directly into yield loss and missed production targets. The Applied Materials 907.00.74 EPS33179 is the exact OEM-specified pump assembly engineered to restore your system to spec — not an approximation, but the precise component your process module demands.
Within the Applied Materials TMH 071P turbomolecular pump platform, the 907.00.74 EPS33179 represents a fully integrated vacuum solution: a DN63 ISO-K flanged pump body operating in a 3-phase (3P) configuration, matched to the PM P2 980C process module environment, and paired with the TC100 PM C01 692A controller. This combination is widely deployed across Applied Materials Centura, Producer, and related platforms, making it one of the most mission-critical spare components in global semiconductor manufacturing supply chains.
Technical Specifications
- Part Number: 907.00.74 / EPS33179
- Pump Series: TMH 071P (Pfeiffer Turbomolecular)
- Flange Connection: DN63 ISO-K
- Phase Configuration: 3P (Three-Phase)
- Process Module Compatibility: PM P2 980C
- Controller: TC100 PM C01 692A
- OEM: Applied Materials
- Weight: 4,100 g
- Condition: Refurbished / Used – Tested
Key Features & Benefits
- OEM-Matched Assembly: Exact part number cross-referenced to Applied Materials BOM — eliminates compatibility guesswork during critical maintenance windows.
- Integrated TC100 Controller: Ships as a complete pump + controller assembly, reducing installation time and ensuring matched firmware/hardware pairing.
- DN63 ISO-K Interface: Standard ISO-K flange ensures direct drop-in replacement without adapter hardware or chamber modification.
- 3-Phase Motor Drive: High-efficiency 3P configuration delivers stable rotational speed and lower thermal load during continuous process operation.
- Tested Before Shipment: Each unit undergoes functional spin-up and vacuum performance verification prior to dispatch.
- Rapid Availability: In-stock units ship within 1–3 business days, minimizing fab downtime exposure.
Industry & Equipment Applications
- Semiconductor wafer fabrication (CVD, PVD, Etch, Implant process modules)
- Applied Materials Centura platform process chambers
- Applied Materials Producer platform vacuum systems
- High-vacuum research and analytical instrumentation
- Flat panel display (FPD) deposition equipment
- Solar cell thin-film deposition systems
System Integration & Compatible Parts
This assembly is designed for direct integration into Applied Materials process modules using the PM P2 980C vacuum architecture. Compatible and commonly co-ordered components include:
- TC100 turbomolecular pump controller variants (PM C01 series)
- DN63 ISO-K bellows and flexible connectors
- Backing pump assemblies (dry scroll or diaphragm type)
- Vacuum gauges and Pirani/Bayard-Alpert sensor assemblies
- Applied Materials process module PM kits (EPS-series)
Contact our technical team to verify compatibility with your specific chamber configuration before ordering.
Our Quality Assurance Process
- Step 1 – Incoming Inspection: Visual and dimensional check against OEM drawings; serial number and part number verification.
- Step 2 – Functional Test: Pump spun to rated speed; bearing noise, vibration, and current draw measured against OEM baseline.
- Step 3 – Vacuum Performance: Ultimate pressure and pumping speed verified using calibrated test stand.
- Step 4 – Controller Pairing: TC100 controller communication and interlock functions validated with pump assembly.
- Step 5 – Packaging: Anti-static bagged, foam-cushioned, and double-boxed for international freight.
How to Order
- Submit an inquiry via the Contact / Request a Quote form on this page.
- Provide your equipment model, chamber ID, and required delivery timeline.
- Our team will confirm availability, lead time, and issue a formal quotation within 24 hours.
- Upon PO receipt, we arrange export documentation and international shipping (DHL / FedEx / freight forwarder).
Why Choose Konmask.com?
- Specialized Inventory: We stock hard-to-find semiconductor and industrial automation spare parts that OEM channels no longer support.
- Technical Expertise: Our team includes engineers with hands-on experience in Applied Materials platform maintenance.
- Global Shipping: We export to 50+ countries with full commercial invoice and packing list documentation.
- Responsive Support: Dedicated account managers respond to inquiries within 1 business day.
- Competitive Pricing: Transparent quotation process — no hidden fees, no surprise surcharges.
Frequently Asked Questions
- Q: Is this a new or refurbished unit?
- A: Units are refurbished and fully tested. New OEM units may be available on request — please inquire for lead time and pricing.
- Q: Does this include the TC100 controller?
- A: Yes. The assembly ships as a matched pump + TC100 PM C01 692A controller set as described in the part number.
- Q: Can you ship to my country?
- A: We ship internationally to most countries. Contact us with your destination for shipping options and estimated freight cost.
- Q: What is the warranty?
- A: We offer a 90-day functional warranty covering defects identified during installation and initial operation. Terms available on request.
- Q: How do I confirm this part fits my chamber?
- A: Provide your Applied Materials equipment model number and chamber ID. Our engineers will cross-reference against our compatibility database before confirming your order.
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