ASM LVC-414-3 (54-107950A15) – Precision Vapor Controller | ASM Semiconductor Process Platform
Engineering Background: The ASM LVC-414-3, assembly part number 54-107950A15, is a purpose-built Liquid Vapor Controller (LVC) designed for integration within ASM’s advanced semiconductor deposition and diffusion equipment platforms. It governs the precise delivery and regulation of process vapors—including oxidants, dopant sources, and carrier gases—critical to achieving repeatable thin-film results in high-volume manufacturing environments.
Product Positioning: Targeted at process engineers and equipment maintenance teams operating ASM furnace and CVD systems, this module serves as a direct OEM replacement or qualified spare. Its role in vapor-phase process control makes it indispensable for fabs running oxidation, LPCVD, or diffusion processes where vapor concentration stability directly impacts device yield.
Complete Technical Specifications
| Attribute | Detail |
|---|---|
| Manufacturer | ASM (Advanced Semiconductor Materials) |
| Model / Part Number | LVC-414-3 |
| Assembly / Reference P/N | 54-107950A15 |
| SKU | LVC-414-3-54-107950A15 |
| Module Type | Liquid Vapor Controller (LVC Series) |
| Platform Compatibility | ASM Furnace / CVD / Diffusion Systems |
| Function | Vapor-phase process gas delivery and concentration control |
| Weight | 1,260 g (approx.) |
| Country of Origin | Netherlands (NL) |
| Condition | New / Refurbished / Tested (specify on inquiry) |
| Warranty | Available – contact for terms |
Proven Application Environments
- Thermal oxidation furnaces (wet/dry O₂ processes)
- Low-Pressure Chemical Vapor Deposition (LPCVD) systems
- Diffusion and annealing tube equipment
- Dopant source vapor delivery (POCl₃, BBr₃, etc.)
- High-volume 200mm and 300mm wafer fabs
- R&D and pilot-line semiconductor process tools
Engineering Advantages
- OEM-Grade Precision: Manufactured to ASM’s original design specifications, ensuring drop-in compatibility with existing tool configurations.
- Process Stability: Maintains tight vapor concentration tolerances, directly supporting gate oxide uniformity and dopant profile repeatability.
- Reduced Downtime Risk: Stocking this module as a qualified spare eliminates unplanned tool downtime caused by vapor delivery failures.
- Dual P/N Traceability: Cross-referenced under both LVC-414-3 and 54-107950A15 for seamless BOM and CMMS integration.
- Proven Field History: LVC-series controllers have accumulated extensive runtime across global ASM installed base.
System Architecture & Signal Flow
The LVC-414-3 interfaces with the ASM process controller via standardized I/O connections, receiving setpoint commands for vapor flow rate or concentration. Internal regulation circuitry modulates the vapor source valve or bubbler bypass to maintain the commanded process condition. Feedback signals are returned to the host controller for closed-loop process verification. The module is designed for rack or panel mounting within the equipment’s process gas cabinet.
- Input: Process controller setpoint signal (analog/digital per tool configuration)
- Output: Regulated vapor delivery to process tube inlet
- Feedback: Real-time concentration or flow status to host system
- Mounting: OEM-compatible bracket/panel interface
Sourcing & Quality Verification
- All units sourced through verified industrial channels with full traceability documentation available on request.
- Pre-shipment functional inspection performed on refurbished units; new units shipped in original or equivalent protective packaging.
- Dual P/N verification (LVC-414-3 / 54-107950A15) confirmed prior to dispatch.
- Export compliance screening completed for all international orders.
Procurement Process
- Inquiry: Submit your RFQ via support@konmask.com or call +0086 19859288691 with your required quantity and delivery timeline.
- Quotation: Receive a formal quotation within 1 business day including unit price, lead time, and shipping options.
- Order Confirmation: Purchase order accepted via email; proforma invoice issued for prepayment or net terms (qualified accounts).
- Shipment: Packed to IPC/JEDEC standards; tracking provided upon dispatch. Express and freight options available.
- After-Sales: Technical support available post-delivery for installation verification and compatibility questions.
Technical FAQ
Q: Is LVC-414-3 the same as 54-107950A15?
A: Yes. LVC-414-3 is the functional model designation; 54-107950A15 is the ASM assembly/reference part number. Both refer to the same physical module.
Q: Which ASM tools use this vapor controller?
A: This module is used in ASM’s furnace and CVD product lines. Please provide your tool model number for confirmed compatibility verification.
Q: Can you supply a test report or inspection certificate?
A: Yes, functional test reports are available for refurbished units. New units can be accompanied by manufacturer CoC where available.
Q: What is the lead time?
A: In-stock units ship within 3–5 business days. Out-of-stock items are subject to sourcing lead time; contact us for current availability.
Q: Do you accept returns?
A: Returns are accepted within 30 days for unused units in original condition. Tested/refurbished units carry a limited warranty—contact us for details.
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Contact: support@konmask.com | +0086 19859288691
