Semiconductor Etch Chamber Solution — LAM RESEARCH C3419 716-140139-211 | E82EV371K2C Series
The LAM RESEARCH C3419 (P/N 716-140139-211, Ref. E82EV371K2C, 543574) is a precision pneumatic ring component engineered for use in Lam Research plasma etch and deposition systems. Rated at N.C. (Normally Closed), 0.39–0.59 MPa, this part plays a critical role in process chamber sealing, gas flow control, and wafer handling sequences within semiconductor fabrication environments.
Where This Product Is Used
- Plasma Etch Systems — Chamber isolation and gas-line sealing in Lam Research Kiyo, Flex, and Versys platforms
- CVD / ALD Deposition Tools — Pneumatic actuation rings in process module assemblies
- Wafer Handling Modules — End-effector and transfer arm pneumatic circuits requiring N.C. fail-safe operation
- 300mm Fab Lines — High-volume production environments demanding zero-defect sealing performance
- Preventive Maintenance Kits — Scheduled PM replacement for chamber ring components to maintain process baseline
Technical Specifications
| Parameter | Value |
|---|---|
| Manufacturer | LAM RESEARCH |
| Part Number | C3419 |
| Cross Reference P/N | 716-140139-211 |
| Internal Ref. | E82EV371K2C |
| Catalog / Item No. | 543574 |
| Type | N.C. (Normally Closed) |
| Operating Pressure | 0.39 ~ 0.59 MPa |
| Component Category | Pneumatic Ring / Chamber Seal Component |
| Application | Semiconductor Fab — Etch & Deposition Systems |
| Condition | New / Refurbished (specify on inquiry) |
Why Engineers Specify This Model
- OEM-Matched Geometry — Dimensional tolerances matched to Lam Research chamber specs; no shimming or modification required
- N.C. Fail-Safe Design — Normally closed actuation ensures process chamber remains sealed on loss of pneumatic supply, protecting wafers and process integrity
- Pressure-Rated for Fab Conditions — 0.39–0.59 MPa operating range aligns with standard fab utility air supply specifications
- Traceable Part Numbers — Multiple cross-reference P/Ns (C3419 / 716-140139-211 / E82EV371K2C / 543574) simplify procurement and BOM reconciliation
- Drop-In Replacement — Compatible with existing Lam Research tool configurations without process re-qualification in most PM scenarios
Complete System Bill of Materials
This ring component is typically sourced alongside the following Lam Research chamber parts:
- Chamber O-Ring Kits (process-specific elastomer grades)
- Pneumatic Solenoid Valves (N.C. / N.O. matched pairs)
- Gas Line Fittings and Tubing Assemblies
- Wafer Lift Pin Assemblies
- ESC (Electrostatic Chuck) Clamp Ring Sets
- Chamber Liner and Focus Ring Kits
Contact [email protected] for complete PM kit quotations.
Compliance & Industry Standards
- Designed for use in SEMI S2 / S8 compliant semiconductor equipment environments
- Compatible with cleanroom Class 10 (ISO 4) and Class 100 (ISO 5) handling requirements
- Traceable documentation available upon request (CoC, test reports)
- RoHS-compatible materials (confirm on order for specific lot)
Quality Assurance & Sourcing
Konmask.com sources LAM RESEARCH components through verified industrial supply channels. Each unit undergoes:
- Visual and dimensional inspection against OEM drawings
- Part number verification across all cross-reference codes
- Secure anti-static packaging for semiconductor-grade components
- Optional third-party inspection reports available for critical orders
How to Source This Part
- Submit your RFQ via [email protected] with your tool model and required quantity
- Reference P/N C3419 or any cross-reference: 716-140139-211 / E82EV371K2C / 543574
- Specify condition requirement: New OEM, Refurbished, or Tested Used
- Receive quote within 1 business day; expedited sourcing available for AOG situations
- Secure payment and worldwide shipping to your fab or warehouse
Application-Specific FAQ
Q: Is C3419 compatible with all Lam Research etch platforms?
A: C3419 is documented for specific Lam Research chamber configurations. Please confirm your tool model (e.g., Kiyo, Flex, Versys) when ordering to ensure dimensional compatibility.
Q: What does N.C. mean for this ring component?
A: Normally Closed (N.C.) means the pneumatic actuator defaults to the closed/sealed position when no air pressure is applied — a critical fail-safe feature for process chamber integrity.
Q: Can this part be used in a refurbished tool?
A: Yes. C3419 is commonly specified in refurbished Lam Research tool rebuilds. We can supply new OEM or inspected refurbished units depending on your budget and lead time requirements.
Q: Do you provide a Certificate of Conformance?
A: Yes, CoC documentation is available upon request for all orders. Contact us at the time of purchase.
Q: What is the lead time?
A: Standard lead time is 3–7 business days. Expedited options available — contact [email protected] for AOG or urgent requirements.
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