Brooks Automation 001-9093-05 – Elevator Arm for Wafer Transfer | Ultra3000i / 2098-DSD Platform
Engineering Background: The Brooks Automation Ultra3000i is a high-throughput atmospheric wafer-handling robot widely deployed in 200 mm and 300 mm semiconductor fabs. The Elevator Arm assembly (P/N 001-9093-05) is the primary vertical-motion end-effector carrier responsible for precise Z-axis positioning during wafer pick-and-place operations. Failure or wear of this component directly impacts throughput, wafer yield, and MTBF of the entire transfer module.
Product Positioning: Konmask.com supplies OEM-equivalent and genuine Brooks Automation 001-9093-05 Elevator Arm assemblies for MRO replacement, spare-parts stocking, and system refurbishment. Cross-reference part numbers 001-1957-02, 002-9010-21, 2098-DSD-005X-NV1, and 0021-32583 are verified compatible and sourced from the same supply chain.
Complete Technical Specifications
| Parameter | Value |
|---|---|
| Primary Part Number | 001-9093-05 |
| Cross-Reference P/N | 001-1957-02 / 002-9010-21 / 2098-DSD-005X-NV1 / 0021-32583 |
| Compatible Platform | Brooks Automation Ultra3000i |
| Drive Interface | Allen-Bradley 2098-DSD-005X-NV1 (Ultra3000i servo drive) |
| Function | Z-axis elevator arm assembly for wafer transfer robot |
| Wafer Compatibility | 200 mm / 300 mm (platform-dependent) |
| Operating Environment | Cleanroom Class 10 / ISO Class 4 compatible |
| Weight | Approx. 2.6 kg |
| Condition Available | New OEM / Refurbished / Tested Used |
Proven Application Environments
- 200 mm and 300 mm semiconductor wafer fabrication lines
- PECVD, CVD, PVD, and etch cluster tool front-end modules
- EFEM (Equipment Front-End Module) atmospheric transfer chambers
- Lithography track systems requiring high-repeatability Z-axis motion
- Metrology and inspection tool wafer handling stages
- Refurbished fab equipment upgrades and legacy tool life extension
Engineering Advantages
- OEM-Grade Precision: Maintains original Brooks Automation dimensional tolerances for drop-in replacement without re-teaching robot positions.
- Servo Drive Compatibility: Fully compatible with Allen-Bradley 2098-DSD-005X-NV1 Ultra3000i servo drive — no firmware or parameter changes required.
- Cleanroom Ready: Materials and surface finish meet Class 10 cleanroom outgassing and particle generation requirements.
- Reduced Downtime: Stocked and ready to ship — minimizes unplanned fab downtime versus waiting for OEM lead times of 12–26 weeks.
- Multi-P/N Coverage: One assembly resolves four cross-reference part numbers, simplifying spare-parts inventory management.
System Architecture & Signal Flow
In the Ultra3000i platform, the Elevator Arm assembly interfaces with the Z-axis servo motor driven by the 2098-DSD-005X-NV1 drive. The drive receives motion commands via the SERCOS or analog interface from the Brooks Automation motion controller. Position feedback is provided by a resolver or encoder mounted on the Z-axis motor. The Elevator Arm translates rotary servo motion into precise linear vertical displacement, carrying the end-effector (blade) to programmed wafer pick/place heights. Proper arm alignment is critical to wafer centering accuracy (typically ±0.1 mm) and must be verified after replacement using the robot’s built-in calibration routine.
Sourcing & Quality Verification
- Traceability: All units supplied with original OEM labels or Konmask inspection tags with serial/lot traceability.
- Functional Testing: Refurbished units undergo full Z-axis motion cycle testing and servo response verification prior to shipment.
- Anti-Counterfeit: Parts sourced exclusively from verified OEM channels, licensed distributors, or decommissioned fab equipment — no gray-market or counterfeit supply.
- Packaging: ESD-safe, cleanroom-compatible packaging with desiccant and nitrogen purge for long-term storage integrity.
- Warranty: 90-day replacement warranty on all tested units; 30-day on as-is used units.
Procurement Process
- Submit your part number (001-9093-05 or any cross-reference) via the order form or email support@konmask.com.
- Receive stock confirmation, condition report, and quotation within 24 business hours.
- Approve proforma invoice — payment via T/T, PayPal, or trade terms for qualified accounts.
- Unit ships within 1–3 business days; express DHL/FedEx available for urgent fab downtime situations.
- Post-delivery technical support available for installation and calibration guidance.
Technical FAQ
Q: Is 001-9093-05 a direct drop-in for 001-1957-02?
A: Yes. Both part numbers refer to the same Elevator Arm assembly generation used on the Ultra3000i platform. No mechanical or electrical modifications are required.
Q: Can this arm be used with a 2098-DSD-010X-NV1 drive (10A variant)?
A: The arm assembly itself is drive-agnostic; compatibility depends on the Z-axis motor specification. Confirm motor current rating before substituting drive variants.
Q: Do you supply the full Z-axis module including motor and drive?
A: Yes. Contact us for complete Z-axis module kits including motor, 2098-DSD-005X-NV1 drive, and arm assembly.
Q: What is the typical lead time for a new OEM unit?
A: New OEM units carry 12–26 week lead times from Brooks Automation. Konmask stocks refurbished and tested-used units for immediate shipment.
Q: How do I verify the arm is correctly installed?
A: After mechanical installation, run the Brooks Automation robot calibration sequence (Z-axis teach procedure) using the system controller. Verify wafer centering with a test wafer before resuming production.
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