PVD Deposition Solution – Applied Materials 0021-22064 | TAS-MAIN Series
The Applied Materials 0021-22064 Cover Ring (cross-ref: 853-200977-001) is a precision-machined consumable component engineered for Physical Vapor Deposition (PVD) chambers. Designed for the TDK PCB Load Port E4A TAS-MAIN platform, this cover ring maintains process integrity by shielding chamber walls from deposition overspray, extending preventive maintenance intervals and protecting high-value chamber hardware.
Where This Product Is Used
- Semiconductor Fab PVD Chambers – Applied Materials Endura, Centura, and compatible PVD platforms running metal deposition processes (Al, Ti, TiN, Cu, W).
- TDK PCB Load Port E4A TAS-MAIN Systems – Direct OEM-spec replacement for the TAS-MAIN 853-200977-001 assembly.
- 300mm Wafer Fabs – Logic, memory, and advanced packaging lines requiring tight process uniformity and low particle generation.
- R&D & Pilot Lines – Universities and research institutes running PVD experiments on Applied Materials platforms.
- Refurbishment & Rebuild Programs – Third-party tool refurbishers restoring Applied Materials PVD chambers to OEM specification.
Technical Specifications
- Part Number: 0021-22064
- Cross-Reference: 853-200977-001
- Assembly: TDK PCB Load Port E4A TAS-MAIN
- Component Type: Cover Ring (Chamber Shield / Deposition Ring)
- Platform Compatibility: Applied Materials PVD – Endura / Centura series
- Wafer Size: 300mm (verify with your chamber configuration)
- Weight: ~4,100 g
- Material: Aluminum alloy / anodized or coated surface (OEM specification)
- Condition: New / Refurbished (specify at inquiry)
- Lead Time: In-stock items ship within 1–3 business days
Why Engineers Specify This Model
- OEM-Matched Geometry – Precision tolerances ensure drop-in fit with no chamber re-qualification required.
- Reduced Particle Risk – Proper coverage minimizes flaking and cross-contamination between process runs.
- Extended PM Intervals – High-quality base material resists deposition buildup, reducing wet-clean frequency.
- Dual Part Number Traceability – Both 0021-22064 and 853-200977-001 are documented for procurement and MRO records.
- Sourced from Verified Supply Chain – Konmask.com sources from authorized distributors and qualified secondary-market suppliers with full traceability.
Complete System Bill of Materials
Engineers maintaining the TDK PCB Load Port E4A TAS-MAIN assembly typically source the following components together:
- Cover Ring – 0021-22064 (this item)
- TDK PCB Load Port E4A TAS-MAIN Board – 853-200977-001 assembly
- Chamber Shield / Dark Space Shield – consult Applied Materials BOM
- Clamp Ring – verify part number per chamber generation
- O-Ring Kit – chamber-specific seal set
- Lift Pin Assembly – platform-dependent
Contact Konmask.com for bundled BOM sourcing and volume pricing.
Compliance & Industry Standards
- Compatible with SEMI S2 environmental, health, and safety guidelines for semiconductor equipment.
- Suitable for use in ISO Class 3–5 cleanroom environments.
- Traceability documentation available upon request for IATF 16949 / ISO 9001 supply chain audits.
- RoHS-compliant materials available – confirm at order placement.
Quality Assurance & Sourcing
Every unit offered by Konmask.com undergoes the following before shipment:
- Visual and dimensional inspection against OEM drawings.
- Surface condition check (no cracks, delamination, or excessive pitting).
- Secure anti-static and cleanroom-compatible packaging.
- Certificate of Conformance (CoC) available on request.
- Lot traceability records maintained for 3 years.
How to Source This Part
- Add to Cart – For standard in-stock units, proceed directly to checkout.
- Request a Quote – For volume orders (>3 units), refurbished options, or expedited delivery, email [email protected].
- Provide Your PO – We accept corporate purchase orders from qualified semiconductor fabs and EMS providers.
- Shipping – DHL / FedEx international express available. Export documentation provided for cross-border shipments.
Application-Specific FAQ
Q: Is 0021-22064 the same as 853-200977-001?
A: These are cross-referenced part numbers for the same component within the Applied Materials TAS-MAIN assembly. Always confirm with your chamber BOM before ordering.
Q: Does this cover ring fit both 200mm and 300mm chambers?
A: This listing is configured for the TDK PCB Load Port E4A TAS-MAIN platform. Please confirm your chamber generation and wafer size with our team before ordering.
Q: Can I get a refurbished unit to reduce cost?
A: Yes. Konmask.com offers certified refurbished cover rings at reduced cost. Contact us for availability and pricing.
Q: What is the typical lead time?
A: In-stock units ship within 1–3 business days. Out-of-stock items have a 2–4 week lead time depending on sourcing.
Q: Do you provide export documentation for international orders?
A: Yes. We provide commercial invoices, packing lists, and ECCN/HTS classification support for all international shipments.
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