MKS 627D11TBC1B Capacitance Manometer | Replacement, Equivalent & Selection Guide
The MKS 627D11TBC1B is a high-accuracy Baratron® Capacitance Manometer manufactured by MKS Instruments, designed for precise absolute pressure measurement in semiconductor fabrication, thin-film deposition, and high-vacuum process environments. This page provides full technical specifications, compatible replacement models, application guidance, and sourcing information.
Technical Specifications
| Parameter | Value |
|---|---|
| Manufacturer | MKS Instruments |
| Model / Part Number | 627D11TBC1B |
| Series | Baratron® 627D |
| Type | Capacitance Manometer (Absolute) |
| Full Scale Range | 1 Torr (typical for D11 range code) |
| Output Signal | 0–10 VDC (analog) |
| Accuracy | ±0.25% of reading (typical) |
| Temperature Compensation | Heated sensor head (45°C or 100°C) |
| Wetted Materials | Inconel® diaphragm, 316L SS body |
| Process Connection | NW25 / KF25 flange |
| Power Supply | ±15 VDC |
| Weight | ~1,880 g |
| Operating Temperature | 15°C – 50°C (ambient) |
| Certifications | CE, RoHS compliant |
Compatible Replacement & Equivalent Models
The following models are commonly evaluated as replacements or equivalents for the MKS 627D11TBC1B. Always verify full-scale range, output signal, and process connection before substitution.
| Model | Manufacturer | Range | Output | Notes |
|---|---|---|---|---|
| 627D11TBC1B | MKS Instruments | 1 Torr | 0–10 V | OEM original |
| 627B11TBC1B | MKS Instruments | 1 Torr | 0–10 V | Earlier 627B series; pin-compatible |
| 627D13TBC1B | MKS Instruments | 10 Torr | 0–10 V | Higher range variant |
| CDG025D-1-A-1-000 | Inficon | 1 Torr | 0–10 V | Drop-in equivalent; verify connector |
| CM-1000 | Thyracont | 1 Torr | 0–10 V | Third-party compatible; confirm flange |
| KJLC 275 Series | Kurt J. Lesker | 1 Torr | 0–10 V | Budget alternative; verify accuracy class |
⚠ Disclaimer: Replacement compatibility must be validated by the end user. Konmask.com supplies OEM and verified aftermarket parts only.
Why Choose the Original MKS 627D11TBC1B
- Proven accuracy: ±0.25% of reading across the full dynamic range, critical for process repeatability in CVD, PVD, and etch chambers.
- Heated sensor head: Eliminates condensation errors in reactive gas environments (HF, Cl₂, NF₃).
- Long service life: Inconel diaphragm resists corrosion and fatigue under continuous cycling.
- OEM compatibility: Direct drop-in for Applied Materials, Lam Research, Tokyo Electron, and AMAT platforms specifying MKS 627D series.
- Global support: MKS factory calibration certificates and NIST-traceable documentation available.
Typical Applications
- Semiconductor CVD / PVD / ALD process chambers
- Plasma etch and strip equipment
- Flat panel display (FPD) manufacturing
- Solar cell deposition systems
- R&D vacuum systems and leak detection
- Pharmaceutical freeze-drying (lyophilization)
- Industrial vacuum furnaces and coating lines
System Compatibility
The MKS 627D11TBC1B is compatible with the following MKS readout and control platforms:
- MKS PDR-C-2C – Dual-channel pressure display/controller
- MKS 670 Signal Conditioner – Legacy analog readout
- MKS PR4000B – Multi-channel power supply and readout
- MKS 651C / 653B Pressure Controllers – Closed-loop pressure control with APC valve
- Any 0–10 VDC analog input PLC or DCS (Siemens, Allen-Bradley, Yokogawa, Honeywell)
Selection Guide
Use the table below to select the correct MKS 627D variant for your application:
| Requirement | Recommended Model |
|---|---|
| 1 Torr full scale, 0–10 V, KF25 | 627D11TBC1B ✓ (this model) |
| 10 Torr full scale, 0–10 V, KF25 | 627D13TBC1B |
| 100 Torr full scale, 0–10 V, KF25 | 627D15TBC1B |
| 1 Torr, 4–20 mA output | 627D11TBC1B-S (special order) |
| Corrosive gas service (HF/Cl₂) | 627D series with Hastelloy option |
| Ultra-high purity (UHP) semiconductor | 627D series with EP finish |
Quality Assurance & Sourcing
- ✅ OEM-grade parts sourced from authorized MKS distributors and verified surplus channels
- ✅ Functional testing performed prior to shipment (zero/span verification)
- ✅ NIST-traceable calibration certificates available on request
- ✅ Anti-static packaging with humidity indicators for safe international shipping
- ✅ Warranty: 90-day replacement guarantee on all stocked units
How to Order
- Confirm your required full-scale range, output signal type, and process connection (KF/CF/VCR).
- Add MKS 627D11TBC1B to cart or contact us for bulk/project pricing.
- Provide your application details for compatibility pre-check (optional but recommended).
- Receive order confirmation with lead time and tracking within 1 business day.
- Expedited shipping available for urgent semiconductor maintenance requirements.
📧 Email: support@konmask.com
📞 Phone/WhatsApp: +0086 19859288691
🌐 Website: https://konmask.com
Replacement & Compatibility FAQ
Q: Can the MKS 627B11TBC1B replace the 627D11TBC1B directly?
A: In most cases yes — the 627B and 627D share the same electrical interface and KF25 flange. However, the 627D features an improved sensor head design. Verify with your OEM documentation before substitution.
Q: Is the Inficon CDG025D a true drop-in replacement?
A: The CDG025D is electrically compatible (0–10 V, ±15 VDC power) and mechanically similar, but connector pinout may differ. A wiring adapter is sometimes required.
Q: What is the calibration interval for the 627D11TBC1B?
A: MKS recommends annual calibration for semiconductor process applications. Konmask can supply factory-recalibrated units with fresh certificates.
Q: Do you supply new or refurbished units?
A: We supply both. New OEM units are available to order; refurbished units are fully tested and come with a 90-day warranty. Please specify your preference when ordering.
Q: Can this sensor measure differential pressure?
A: No. The 627D11TBC1B is an absolute pressure sensor. For differential measurement, refer to the MKS 223 or 226 series.
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