NOVELLUS 02-268740-01 / 16-251447-00 Process Ring – HCM PVD300 SYS68K/SIO-2 MG2-1F-3FE Series
When a critical process ring fails inside a NOVELLUS HCM PVD300 deposition chamber, the entire production line halts. Wafer batches are scrapped, chamber re-qualification takes hours, and every minute of unplanned downtime translates directly into yield loss and schedule slippage. In high-volume semiconductor fabs running 24/7, there is no acceptable substitute for the exact OEM-specified component — and that is precisely what this ring delivers.
The NOVELLUS part number 02-268740-01 (cross-reference: 16-251447-00), designed for the HCM PVD300 platform under the SYS68K/SIO-2 MG2-1F-3FE subsystem configuration, is a precision-engineered process ring integral to maintaining chamber geometry, plasma confinement, and deposition uniformity. The HCM (High-density plasma Chemical-vapor-deposition Module) PVD300 series has been a cornerstone of global semiconductor interconnect manufacturing, widely deployed in logic, memory, and advanced packaging fabs across Asia, North America, and Europe. This ring occupies a critical position in the chamber’s mechanical stack — its dimensional accuracy and material integrity directly govern film thickness uniformity and particle performance.
Technical Specifications
- Manufacturer: NOVELLUS Systems (now Lam Research)
- Part Number: 02-268740-01
- Cross-Reference P/N: 16-251447-00
- Compatible Platform: HCM PVD300
- Subsystem: SYS68K/SIO-2 MG2-1F-3FE
- Component Type: Process Ring (Chamber Component)
- Weight: 2,600 g (approx.)
- Condition Available: New OEM / Refurbished / Used-Tested
- Lead Time: Subject to stock — contact us for availability
Key Features & Benefits
- OEM-Matched Geometry: Manufactured or sourced to original NOVELLUS dimensional drawings, ensuring drop-in fit without chamber re-qualification risk.
- Plasma Confinement Integrity: Maintains precise gap tolerances critical for uniform HDP-CVD film deposition across 200 mm or 300 mm wafer surfaces.
- Material Compatibility: Engineered for the thermal and chemical environment of high-density plasma processes including SiO₂, SiN, and related dielectric films.
- Reduced Downtime: Ready-to-install condition minimizes chamber idle time versus sourcing through OEM channels with extended lead times.
- Dual P/N Traceability: Both 02-268740-01 and 16-251447-00 references documented for procurement and maintenance records compliance.
Industry & Equipment Applications
- Semiconductor Fabs: Logic, DRAM, NAND Flash, and advanced packaging production lines using NOVELLUS HCM PVD300 chambers.
- Interconnect Processes: Pre-metal dielectric (PMD) and inter-metal dielectric (IMD) deposition steps requiring tight film uniformity.
- Research & Development: University and corporate R&D labs operating legacy NOVELLUS HDP-CVD equipment.
- Refurbishment & Resale: Equipment refurbishers and secondary market tool dealers restoring HCM PVD300 systems to operational spec.
System Integration & Compatible Parts
This ring is designed for use within the NOVELLUS HCM PVD300 chamber assembly under the SYS68K/SIO-2 controller architecture. When performing preventive maintenance or chamber wet cleans, the following related components are typically replaced in the same PM cycle:
- Chamber liner / shield sets
- Edge ring and focus ring assemblies
- O-ring kits and seal sets for the HCM chamber body
- SYS68K/SIO-2 interface board assemblies (for controller-related PM)
Contact Konmask.com to source a complete PM kit and reduce multiple procurement cycles.
Our Quality Assurance Process
- Visual & Dimensional Inspection: Every unit is inspected against OEM reference drawings before shipment.
- Traceability Documentation: Part numbers, condition, and inspection records provided with each shipment.
- Secure Packaging: Anti-static, cleanroom-compatible packaging to prevent contamination and mechanical damage in transit.
- Experienced Sourcing Team: Our specialists have deep familiarity with NOVELLUS / Lam Research legacy part ecosystems and can verify cross-references before order confirmation.
How to Order
- Submit an inquiry via the Contact / RFQ form on Konmask.com with your required quantity and target delivery date.
- Our team will confirm stock availability, condition, and lead time within 1 business day.
- Receive a formal quotation with part traceability details.
- Confirm order — we handle export documentation, packaging, and international logistics.
📧 [email protected] | 📞 +0086 19859288691
Why Choose Konmask.com?
- Specialized in semiconductor and industrial automation spare parts — not a generalist distributor.
- Strong sourcing network for legacy NOVELLUS / Lam Research components with long OEM lead times.
- Transparent condition grading: New OEM, Refurbished, or Used-Tested — clearly stated, never misrepresented.
- Export experience to Asia-Pacific, Middle East, and European fabs with full customs documentation support.
- Responsive B2B service: dedicated account support, fast RFQ turnaround, and flexible MOQ.
Frequently Asked Questions
Q: Is 16-251447-00 the same part as 02-268740-01?
A: Yes. These are dual NOVELLUS part numbers referencing the same physical component — 02-268740-01 is the primary assembly P/N and 16-251447-00 is the sub-component or revision cross-reference. Both are documented in our shipment records.
Q: Which HCM PVD300 chamber configurations is this ring compatible with?
A: This ring is specified for the SYS68K/SIO-2 MG2-1F-3FE subsystem configuration. Please confirm your exact chamber build revision with our team before ordering if you are unsure of your configuration.
Q: Do you offer refurbished units?
A: Yes. We offer new OEM, professionally refurbished, and used-tested units depending on availability. Condition is always clearly disclosed prior to order confirmation.
Q: What is the typical lead time?
A: Lead time depends on current stock. In-stock units ship within 3–5 business days internationally. Out-of-stock items are sourced through our supplier network — typical lead time 2–6 weeks. Contact us for a real-time availability check.
Q: Can you supply other NOVELLUS HCM PVD300 spare parts?
A: Yes. Konmask.com maintains an extensive catalog of NOVELLUS and Lam Research spare parts. Submit your full BOM or parts list and we will provide a consolidated quotation.
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Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691
