Tokyo Electron 2985-429601-13 ACT 12 IRA Fork Assembly | Replacement, Equivalent & Selection Guide
The Tokyo Electron (TEL) 2985-429601-13 is an OEM IRA (Integrated Robotic Arm) Fork Assembly designed for the ACT 12 atmospheric cluster tool platform. Cross-referenced as 6715-H318A and 0040-06711, this precision wafer-handling component is critical for reliable substrate transfer in semiconductor front-end-of-line (FEOL) processes. Konmask.com supplies both genuine TEL parts and verified compatible equivalents to minimize downtime and reduce procurement costs.
Technical Specifications
- Part Number: 2985-429601-13
- Cross Reference: 6715-H318A / 0040-06711
- OEM: Tokyo Electron (TEL)
- Platform: ACT 12 Atmospheric Cluster Tool
- Assembly Type: IRA (Integrated Robotic Arm) Fork Assembly
- Application: Wafer handling / substrate transfer
- Weight: 2,600 g (approx.)
- Condition: New OEM / Refurbished / Compatible (specify on order)
- Shipping: Worldwide — ESD-safe, anti-static packaging
Compatible Replacement & Equivalent Models
The following part numbers are confirmed compatible or functionally equivalent to the TEL 2985-429601-13:
- 6715-H318A — TEL internal cross-reference (same assembly, alternate catalog)
- 0040-06711 — TEL alternate PN used in some ACT 12 BOM revisions
- Third-party compatible fork assemblies for TEL ACT 12 (contact us for validated vendor list)
Always verify fork geometry, blade material, and end-effector clearance before substituting. Contact our engineers for a free compatibility check.
Why Choose the Original Model
- Designed and validated by Tokyo Electron for ACT 12 platform tolerances
- Ensures precise wafer centering and minimal particle generation
- Maintains OEM MTBF ratings and process repeatability
- Required for warranty-compliant maintenance on TEL ACT 12 tools
- Traceable lot documentation available upon request
Typical Applications
- 300 mm / 200 mm wafer transfer in atmospheric robot modules
- FEOL lithography, CVD, and etch cluster tool integration
- Preventive maintenance (PM) and corrective maintenance (CM) on TEL ACT 12
- Fab spare-parts inventory replenishment
- Refurbishment and upgrade of legacy TEL equipment
System Compatibility
- Primary Platform: Tokyo Electron ACT 12 Atmospheric Cluster Tool
- Robot Module: IRA (Integrated Robotic Arm) — single-blade fork configuration
- Wafer Size: 200 mm / 300 mm (confirm with BOM revision)
- Interface: Standard TEL end-effector mounting pattern
- Not compatible with: TEL Trias, Lithius, or CLEAN TRACK platforms without engineering review
Selection Guide
Use the table below to select the correct part for your maintenance scenario:
- OEM Replacement (warranty / critical tool): Order 2985-429601-13 — genuine TEL part, full traceability
- Cost-Optimized PM Stock: Request compatible equivalent — validated geometry, lower lead time
- Refurbished / Exchange: Available for budget-sensitive fabs — inspected, cleaned, and certified
- Emergency / AOG: Contact us directly for expedited sourcing within 24–48 hours
Not sure which option fits your fab’s qualification requirements? Send us your tool serial number and BOM revision — our team will recommend the right solution.
Quality Assurance & Sourcing
- Parts sourced from authorized TEL distributors and certified secondary market channels
- Each unit inspected for dimensional accuracy, surface finish, and ESD compliance
- Certificate of Conformance (CoC) and material traceability available on request
- Packaged in anti-static, foam-lined enclosures to prevent transit damage
- Export compliance (ECCN / HTS) documentation provided for international shipments
How to Order
- Online: Add to cart and complete checkout — we confirm stock and lead time within 1 business day
- Email RFQ: [email protected] — include part number, quantity, and required delivery date
- Phone / WhatsApp: +0086 19859288691
- Bulk / Contract Orders: Volume pricing available for fab procurement teams — request a quote
Replacement & Compatibility FAQ
Q: Can 6715-H318A replace 2985-429601-13 directly?
A: Yes — 6715-H318A is a TEL internal cross-reference for the same assembly. No modification required.
Q: Is 0040-06711 the same part?
A: 0040-06711 is an alternate TEL part number used in specific ACT 12 BOM revisions. Verify your tool’s BOM before ordering.
Q: Do you offer refurbished units?
A: Yes. Refurbished fork assemblies are available with full inspection reports. Lead time is typically 5–10 business days.
Q: What is the lead time for a new OEM unit?
A: Stock availability varies. Contact us for real-time inventory status. AOG orders are prioritized.
Q: Can this fork be used on a TEL Trias platform?
A: Not without engineering review. The ACT 12 IRA fork geometry differs from Trias robot modules. Contact our team before substituting.
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Contact: [email protected] | +0086 19859288691
