Applied Materials 0021-10665 C3390 Kammer Deckel Chamber Lid – CVD/PVD Process Chamber Assembly
When a process chamber lid fails mid-production, the consequences are immediate and severe: wafer batches are scrapped, contamination risks spike, and unplanned downtime can cost semiconductor fabs tens of thousands of dollars per hour. The chamber lid is not a peripheral component — it is the structural and sealing backbone of the entire deposition process. Without a reliable, spec-accurate replacement, production lines cannot resume safely.
The Applied Materials part number 0021-10665 C3390 (cross-referenced as 0240-71178 TTL-T0060, 2108-020166-11, and 2180-020798-11) is a precision-engineered Kammer Deckel (Chamber Lid) designed for Applied Materials CVD and PVD process equipment. Within the Applied Materials spare parts ecosystem, this component occupies a critical position: it provides the hermetic seal and structural integrity required for controlled-atmosphere deposition processes. Applied Materials remains the world’s leading supplier of semiconductor manufacturing equipment, and their chamber components are trusted in fabs across Asia, North America, and Europe.
Technical Specifications
- Manufacturer: Applied Materials (AMAT)
- Primary Part Number: 0021-10665
- Revision / Config: C3390
- Cross-Reference Part Numbers: 0240-71178 TTL-T0060 / 2108-020166-11 / 2180-020798-11
- Component Type: Kammer Deckel (Chamber Lid / Chamber Cover)
- Application: CVD / PVD Process Chamber Assembly
- Weight: 2,600 g (approx.)
- Condition: New / Refurbished (specify on inquiry)
- Compatibility: Applied Materials CVD/PVD platforms (confirm compatibility with your equipment model on inquiry)
Key Features & Benefits
- OEM-Grade Precision: Manufactured or sourced to Applied Materials original specifications, ensuring dimensional accuracy and material compliance.
- Hermetic Sealing Performance: Engineered to maintain process atmosphere integrity under high-vacuum and high-temperature deposition conditions.
- Multi-Part-Number Coverage: One component resolves four cross-reference part numbers, simplifying procurement and reducing sourcing complexity.
- Rapid Downtime Recovery: Ready-to-ship inventory supports urgent fab maintenance windows and scheduled PM cycles.
- Traceable Sourcing: Full documentation available upon request, including inspection records and material certifications.
Industry & Equipment Applications
- Semiconductor Fabrication (Fabs): Front-end-of-line (FEOL) and back-end-of-line (BEOL) deposition processes.
- Flat Panel Display Manufacturing: Large-area CVD deposition systems.
- Solar Cell Production: Thin-film deposition equipment maintenance.
- Research & Development Labs: University and industrial R&D facilities operating Applied Materials platforms.
- Equipment Refurbishers: Third-party refurbishment and resale of Applied Materials CVD/PVD tools.
System Integration & Compatible Parts
The 0021-10665 C3390 Kammer Deckel is typically used in conjunction with the following chamber sub-assemblies and consumables. Contact us to source a complete maintenance kit:
- Chamber body / liner assemblies
- O-ring and seal kits for CVD chamber lids
- Showerhead / gas distribution assemblies
- Lift pin assemblies and susceptor components
- RF match and electrode assemblies
Please provide your equipment model and serial number when inquiring to confirm full compatibility.
Our Quality Assurance Process
- Source Verification: All parts are sourced from authorized distributors, OEM surplus, or certified refurbishers.
- Incoming Inspection: Visual and dimensional inspection against OEM drawings upon receipt.
- Functional Testing: Where applicable, components undergo functional verification prior to dispatch.
- Secure Packaging: Anti-static, foam-lined packaging with moisture barriers for international shipment.
- Documentation: Certificate of Conformance (CoC) and inspection reports available on request.
How to Order
- Submit an Inquiry: Contact us via email at [email protected] or call +0086 19859288691.
- Provide Details: Share your part number, required quantity, equipment model, and delivery timeline.
- Receive a Quote: We will respond with pricing, lead time, and availability within 24 business hours.
- Confirm & Ship: Upon order confirmation, we arrange secure international shipping with full tracking.
Why Choose Konmask.com?
- Specialized Expertise: Focused exclusively on industrial automation and semiconductor equipment spare parts — not a generalist marketplace.
- Global Sourcing Network: Access to OEM surplus, authorized distributors, and certified refurbishers worldwide.
- Fast Response: Dedicated B2B inquiry team with <24-hour response commitment.
- Competitive Pricing: Direct sourcing relationships enable cost-effective pricing without compromising quality.
- Trusted by Engineers: Serving procurement teams and maintenance engineers at leading fabs and industrial facilities globally.
Frequently Asked Questions
- Q: Is this part new or refurbished?
- A: We stock both new OEM and certified refurbished units. Please specify your preference when submitting an inquiry, and we will confirm availability and pricing for each condition.
- Q: Can you cross-reference 0240-71178 TTL-T0060 or 2108-020166-11 to confirm it is the same part?
- A: Yes. Part numbers 0021-10665 C3390, 0240-71178 TTL-T0060, 2108-020166-11, and 2180-020798-11 are confirmed cross-references for this Kammer Deckel assembly. Please share your equipment documentation for final verification.
- Q: What is the lead time for this part?
- A: Lead time varies by stock availability. In-stock units typically ship within 3–5 business days internationally. For out-of-stock items, sourcing lead time is typically 2–4 weeks. Contact us for current availability.
- Q: Do you provide a warranty?
- A: Yes. New parts carry the original manufacturer warranty where applicable. Refurbished parts are covered by our 90-day functional warranty. Terms are confirmed at the time of order.
- Q: Can you supply other Applied Materials spare parts?
- A: Absolutely. Konmask.com maintains an extensive catalog of Applied Materials components. Submit your full BOM or part list and we will provide a consolidated quote.
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Contact: [email protected] | +0086 19859288691
