Semiconductor & Industrial Gas Flow Control Solution – Brooks Instrument 5964C | 5964C Series Mass Flow Controller
The Brooks Instrument 5964C Mass Flow Controller (part numbers: 5964C4KALA5KA, 5964C4KAHT5KA, 5964C2MAM15KD) is a high-precision thermal mass flow controller engineered for demanding process environments where gas flow accuracy, repeatability, and long-term stability are non-negotiable. Trusted by process engineers across semiconductor fabs, pharmaceutical manufacturing, and advanced research laboratories worldwide.
Where This Product Is Used
- Semiconductor Fabrication (CVD / ALD / Etch): Precise delivery of process gases (SiH₄, NH₃, N₂O, Ar, H₂) in chemical vapor deposition and atomic layer deposition chambers. Tight flow repeatability directly impacts film thickness uniformity and device yield.
- Flat Panel Display Manufacturing: Controls reactive and inert gas flows in PECVD and sputtering systems for TFT-LCD and OLED panel production lines.
- Solar Cell & Photovoltaic Production: Manages gas ratios in PECVD silicon nitride deposition for anti-reflection coatings on crystalline silicon cells.
- Pharmaceutical & Biotech (USP/GMP Environments): Sterile gas blending for bioreactor aeration, lyophilization inert gas purging, and cleanroom environmental control.
- Industrial Gas Mixing & Calibration Labs: Reference-grade flow measurement for gas mixture preparation, analyzer calibration, and metrology applications.
- R&D & University Laboratories: Catalyst testing, combustion research, fuel cell development, and surface science experiments requiring stable, repeatable gas delivery.
- Environmental Monitoring Systems: Precise sample gas conditioning and dilution for stack emission analyzers and ambient air quality monitoring stations.
Technical Specifications
- Model Series: Brooks Instrument 5964C
- Part Numbers: 5964C4KALA5KA | 5964C4KAHT5KA | 5964C2MAM15KD
- Instrument Type: Thermal Mass Flow Controller (MFC)
- Control Valve: Normally-closed solenoid valve (integrated)
- Accuracy: ±1.0% of full scale (FS)
- Repeatability: ±0.2% FS
- Response Time: <2 seconds to within 2% of setpoint (typical)
- Signal Interface: Analog 0–5 VDC / 4–20 mA; RS-485 digital (model-dependent)
- Wetted Materials: 316L SS body, Viton / EPDM seals (model-dependent)
- Operating Pressure: Up to 500 psig (34.5 bar) inlet
- Operating Temperature: 0–50 °C ambient; up to 70 °C (high-temp variant)
- Leak Integrity: <1×10⁻⁹ std cc/sec He (internal)
- Electrical Connection: 15-pin D-sub connector (standard Brooks pinout)
- Weight: Approx. 360 g
- Certifications: CE, RoHS; semiconductor-grade models meet SEMI S2/S8
Why Engineers Specify This Model
- Proven Semiconductor Pedigree: The 5964C series is a direct successor to the industry-standard Brooks 5850/5860 platform, maintaining backward-compatible form factors while delivering improved electronics and valve performance.
- Multi-Gas / Multi-Range Flexibility: Factory-configured for specific gas and full-scale range; field-reconfigurable via Brooks Smart-DDE software for gas conversion factors.
- High-Temp Variant (5964C4KAHT5KA): Rated for elevated ambient and process temperatures — ideal for heated gas lines and high-temperature process chambers.
- Low-Range Precision (5964C2MAM15KD): Optimized for low-flow applications where sub-sccm accuracy is critical, such as dopant gas delivery in ion implant or trace gas spiking.
- Drop-In Replacement: Compatible with existing Brooks 5850E/5860E wiring harnesses and mounting configurations — minimizing retrofit downtime.
- Long MTBF: Solid-state thermal sensing element with no moving parts in the flow path ensures >100,000-hour operational life in clean gas service.
Complete System Bill of Materials
For a complete gas delivery sub-system using the Brooks 5964C MFC, engineers typically specify:
- Brooks 5964C MFC (this unit) — primary flow control element
- Brooks 0254 Series or compatible MFC readout/power supply (±15 VDC, signal conditioning)
- Upstream pressure regulator (e.g., Swagelok KPR series) — maintain stable inlet pressure
- Upstream particulate filter (2 µm sintered SS) — protect MFC sensor tube
- Downstream check valve — prevent backflow contamination
- VCR® or face-seal fittings (1/4″ or 1/8″) — ultra-high-purity gas connections
- Stainless steel tubing (electropolished, 316L) — minimize outgassing and particle generation
- Brooks Smart-DDE interface software — for calibration, diagnostics, and gas conversion
Compliance & Industry Standards
- CE Marking — EMC Directive 2014/30/EU; Low Voltage Directive 2014/35/EU
- RoHS 3 Compliant — Directive 2011/65/EU + Amendment 2015/863
- SEMI S2 — Environmental, Health & Safety Guideline for Semiconductor Manufacturing Equipment
- SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
- ISO 9001:2015 — Brooks Instrument manufacturing quality management system
- ATEX / IECEx — Consult factory for hazardous-area classified variants
Quality Assurance & Sourcing
Konmask.com specializes in industrial automation and process control components for global B2B buyers. Every Brooks Instrument 5964C unit we supply undergoes the following before shipment:
- ✔ Part number and label verification against OEM documentation
- ✔ Physical inspection: connector integrity, body condition, seal condition
- ✔ Functional power-on check where test equipment is available
- ✔ Anti-static packaging with desiccant for moisture-sensitive electronics
- ✔ Full traceability documentation provided on request
We source from authorized distributors, certified secondary market channels, and direct OEM surplus — ensuring authenticity and traceability for every unit.
How to Source This Part
- Request a Quote: Email [email protected] with your required quantity, delivery timeline, and any certification requirements.
- Bulk / OEM Orders: Volume pricing available for orders of 5+ units. Contact us for project-based pricing and lead time commitments.
- Urgent / AOG Requirements: Same-day quotation available for critical production line needs. WhatsApp/WeChat: +0086 19859288691.
- Cross-Reference & Substitution: Need a compatible alternative? Our engineers can recommend equivalent MFC models from MKS Instruments, Alicat Scientific, or Horiba if the 5964C is on extended lead time.
- Export Compliance: We handle export documentation, commercial invoices, and packing lists compliant with Chinese customs and international trade regulations.
Application-Specific FAQ
Q: Can the 5964C4KALA5KA be used with corrosive gases such as Cl₂ or HCl?
A: The standard 5964C uses Viton seals which have limited compatibility with halogen gases. For corrosive gas service, specify the EPDM or Kalrez seal option — contact us to confirm the exact configuration of this unit before ordering for corrosive applications.
Q: Is this MFC compatible with my existing Brooks 5850E wiring harness?
A: Yes. The 5964C series maintains the standard Brooks 15-pin D-sub pinout, making it a direct electrical drop-in replacement for 5850E and 5860E series controllers in most installations.
Q: What is the full-scale flow range for part number 5964C2MAM15KD?
A: The “2” in the model string indicates a low-flow body configuration. The “M15” range code typically corresponds to a 15 sccm N₂-equivalent full-scale range. Please confirm with our team for the exact calibration gas and range on this specific unit.
Q: Do you provide calibration certificates?
A: Factory calibration certificates are provided where available. For applications requiring NIST-traceable recalibration, we can arrange third-party calibration services prior to shipment.
Q: What is the lead time for this part?
A: In-stock units ship within 3–5 business days internationally. Contact us for current stock status and expedited shipping options.
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