CYBOR 25823-18 / 25823-T4-18 – Precision Photoresist Pump | Semiconductor Fluid Delivery Platform
Engineering Background
CYBOR (Chemical & Biological Yield Optimization Research) has been a trusted OEM supplier of ultra-high-purity fluid delivery systems for the global semiconductor and flat-panel display industries for over two decades. The 25823 series pumps are purpose-engineered for photolithography process lines where sub-micron contamination control and repeatable dispense accuracy are non-negotiable.
Product Positioning
The CYBOR 25823-18 and its companion configuration 25823-T4-18 (assembly P/N 5026-00, revision B1) are bellows-type positive-displacement pumps designed for photoresist, developer, and edge-bead-removal (EBR) chemical dispense in track systems (TEL, DNS, Sokudo, SCREEN). They eliminate particle generation at the pump head and deliver consistent dispense volumes across the full wafer lot without operator intervention.
Complete Technical Specifications
| Parameter | Specification |
|---|---|
| Part Number (Primary) | 25823-18 |
| Part Number (Assembly) | 25823-T4-18 / 5026-00 / B1 |
| Manufacturer | CYBOR Inc. |
| Pump Type | Bellows positive-displacement |
| Wetted Materials | PTFE / PFA (all fluid-contact surfaces) |
| Dispense Volume | Configurable per stroke (typical 0.5–5 mL) |
| Operating Pressure | Up to 100 psi (6.9 bar) inlet; regulated outlet |
| Fluid Compatibility | Photoresist, developer, EBR solvent, HMDS, ARC |
| Particle Generation | < 1 particle ≥ 0.2 µm per dispense (typical) |
| Pulsation | Ultra-low; bellows design eliminates diaphragm bounce |
| Inlet / Outlet Port | 1/4″ FNPT or tube-stub (PFA) |
| Actuation | Pneumatic (clean dry air / N₂) |
| Control Interface | Compatible with CYBOR controller & OEM track I/O |
| Weight | ~150 g (pump head assembly) |
| Revision | B1 |
| Condition Available | New / Refurbished / Tested Used |
Proven Application Environments
- Front-End Semiconductor Fab – 200 mm & 300 mm wafer photolithography tracks (TEL Mark 8/ACT 12, DNS RF3/Lithius)
- Flat Panel Display (FPD) – G6–G10.5 array photoresist coat & develop lines
- Advanced Packaging – Fan-out WLP, 2.5D/3D IC redistribution layer (RDL) coat processes
- MEMS & Compound Semiconductor – GaAs, SiC, GaN device lithography
- R&D / Pilot Line – University cleanrooms and process development labs requiring low-volume precision dispense
Engineering Advantages
- Zero Metal Ion Contamination – Full PTFE/PFA wetted path prevents metallic leaching that degrades resist chemistry
- Consistent Stroke Repeatability – Bellows mechanism maintains ±0.5% dispense volume across 10⁶+ cycles
- Drop-In Replacement – Identical form factor to OEM-installed 25823-18; no track modification required
- Dual P/N Compatibility – 25823-18 (standalone pump) and 25823-T4-18 (T4 manifold assembly) share the same 5026-00 B1 core, simplifying spare-parts inventory
- Chemical Inertness – Rated for aggressive solvents (PGMEA, MEK, NMP) and aqueous developers (TMAH 2.38%)
- Low Downtime – Field-replaceable bellows cartridge; swap in < 15 minutes without breaking chemical lines
System Architecture & Signal Flow
The 25823-18 integrates into a standard photoresist dispense loop as follows:
- Chemical Supply → Bulk drum / day tank → N₂ pressure-push or pump-pull inlet
- Inlet Filter → 0.05 µm or 0.02 µm point-of-use filter (upstream of pump)
- CYBOR 25823-18 Pump Head → Bellows fill stroke (draw) → Dispense stroke (push)
- Dispense Nozzle → Wafer surface (coat cup or edge-bead nozzle)
- Pneumatic Control → CYBOR controller or track PLC I/O → solenoid valve → pump actuator port
- Suck-Back → Integrated or external suck-back valve prevents drip between dispenses
Sourcing & Quality Verification
- All units sourced through verified semiconductor equipment dealers and OEM surplus channels
- Each pump inspected for bellows integrity, port condition, and actuation response prior to listing
- Refurbished units include full disassembly, ultrapure-water flush, and functional test at rated pressure
- Traceability documentation (OEM label, revision marking B1) preserved and photographed
- Konmask.com maintains a no-counterfeit policy — all CYBOR parts carry original manufacturer markings
Procurement Process
- Confirm P/N & Revision – Verify your track BOM calls for 25823-18 or 25823-T4-18 / 5026-00 / B1
- Request Quote – Contact support@konmask.com with quantity, required condition (new/refurb/used), and lead-time requirement
- Order & Payment – Proforma invoice issued; T/T, PayPal, or trade-finance terms available for qualified buyers
- Shipping – ESD-safe packaging; DHL / FedEx express worldwide; export documentation provided
- Incoming Inspection – Recommend 24-hour soak test at operating pressure before installation
Technical FAQ
Q: What is the difference between 25823-18 and 25823-T4-18?
A: The 25823-18 is the standalone pump head. The 25823-T4-18 is the same pump integrated into a T4-style 4-port manifold assembly (P/N 5026-00, rev B1), used in multi-nozzle dispense configurations on certain TEL and DNS tracks.
Q: Can this pump handle i-line and ArF resists?
A: Yes. The PTFE/PFA wetted path is compatible with all common i-line (365 nm), KrF (248 nm), and ArF (193 nm) photoresist formulations, including chemically amplified resists (CAR).
Q: What is the expected service life?
A: CYBOR rates the bellows cartridge for ≥ 1,000,000 dispense cycles under normal operating conditions. High-viscosity resists or over-pressure operation will reduce service life.
Q: Do you provide a warranty?
A: Konmask.com offers a 90-day functional warranty on all tested/refurbished units. New OEM units carry the original CYBOR warranty terms.
Q: Can I get a Certificate of Conformance (CoC)?
A: Yes, CoC and inspection reports are available upon request for refurbished units. Contact support@konmask.com.
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