SEMITOOL 61589-33 (46CM) 802-5134B N-2304-1-K00AA AS 820 – Manifold Assembly | AS-820 Semiconductor Wet Process Platform
Engineering Background
The SEMITOOL AS-820 platform is a widely deployed wet process system used in front-end semiconductor fabrication for wafer cleaning, etching, and surface preparation. The manifold assembly (P/N 61589-33, 46CM configuration) is a critical fluid distribution component that routes process chemistries and DI water to individual process chambers with precision and chemical compatibility.
Product Positioning
This OEM-grade manifold assembly is sourced for engineers and procurement teams maintaining SEMITOOL AS-820 systems. It is a direct replacement for the original 61589-33 (46CM) unit and is cross-referenced under sub-assembly codes 802-5134B and N-2304-1-K00AA. Konmask.com supplies verified surplus and refurbished semiconductor process components to fabs, equipment resellers, and MRO operations globally.
Complete Technical Specifications
- Manufacturer: SEMITOOL (now Applied Materials)
- Part Number: 61589-33
- Sub-Assembly / Cross-Reference: 802-5134B / N-2304-1-K00AA
- System Compatibility: AS-820 Wet Process System
- Configuration: 46CM Manifold Length
- Component Type: Manifold Assembly (MANIFOLD ASSY)
- Weight: 800 g (approx.)
- Material: Chemical-resistant polymer / PVDF or equivalent (OEM spec)
- Application: Fluid distribution for wet process chemistry delivery
- Condition: Surplus / Refurbished (inspected prior to shipment)
Proven Application Environments
- 200mm wafer wet cleaning and surface preparation lines
- HF, SC1, SC2, and DI water process chemistry distribution
- SEMITOOL AS-820 single-wafer or batch wet process tools
- Semiconductor fab MRO and spare parts programs
- Equipment refurbishment and resale operations
Engineering Advantages
- OEM Part Number Match: Direct replacement — no modification required for AS-820 integration
- Multi-Code Cross-Reference: Verified against 802-5134B and N-2304-1-K00AA for procurement flexibility
- Chemical Compatibility: Designed for aggressive wet process chemistries used in semiconductor cleaning
- Dimensional Accuracy: 46CM configuration ensures correct fit within the AS-820 process module bay
- Reduced Downtime: Ready-to-ship inventory minimizes tool downtime for critical fab operations
System Architecture & Signal Flow
Within the SEMITOOL AS-820 system, the manifold assembly serves as the central fluid routing node. Process chemistries are delivered from bulk chemical supply lines through the manifold, which distributes flow to individual process heads or chamber inlets via dedicated ports. The 46CM length accommodates the standard AS-820 module bay geometry. Proper seating and port alignment are critical — refer to the AS-820 service manual for torque specifications and installation sequence.
Sourcing & Quality Verification
- All units are inspected for physical integrity, port condition, and dimensional conformance before listing
- Part numbers are verified against OEM documentation and cross-reference databases
- Konmask.com maintains a traceable sourcing chain for all semiconductor process components
- Photographic documentation available upon request for pre-purchase inspection
- Units are packaged in anti-static, moisture-resistant materials for safe international transit
Procurement Process
- Confirm part number (61589-33) and sub-assembly codes (802-5134B / N-2304-1-K00AA) against your BOM or service manual
- Contact Konmask.com for current stock status, lead time, and volume pricing
- Submit PO or place order directly via the product page
- Receive shipping confirmation with tracking within 1–2 business days
- Inspect upon receipt and confirm fit before installation — Konmask.com supports post-delivery technical queries
Technical FAQ
Q: Is this a genuine SEMITOOL OEM part?
A: This is a verified OEM surplus component. SEMITOOL’s product line is now managed under Applied Materials. The part number 61589-33 is original SEMITOOL nomenclature.
Q: What is the difference between 61589-33 and the sub-assembly codes 802-5134B / N-2304-1-K00AA?
A: 61589-33 is the top-level assembly part number. 802-5134B and N-2304-1-K00AA are sub-assembly or revision-level cross-references used in different AS-820 system generations or regional documentation. All refer to the same physical manifold assembly in the 46CM configuration.
Q: Can this manifold be used on other SEMITOOL platforms?
A: The 46CM configuration is specific to the AS-820 module bay. Compatibility with other SEMITOOL platforms (e.g., SRD, Equinox) should be verified against the respective service documentation before ordering.
Q: What is the lead time?
A: In-stock units ship within 1–2 business days. Contact us for availability confirmation prior to placing a time-critical order.
Q: Do you provide a warranty?
A: Konmask.com offers a 30-day inspection warranty on all surplus semiconductor components. Contact [email protected] for warranty terms.
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