Semiconductor & Vacuum Process Gas Control Solution – MKS Instruments 1179A00452CR1BV | 1179A Series
Where This Product Is Used
The MKS 1179A00452CR1BV Mass Flow Controller (MFC) is engineered for precision gas flow management in demanding industrial and semiconductor manufacturing environments. Typical deployment scenarios include:
- Chemical Vapor Deposition (CVD & PECVD) — Precise precursor gas metering for thin-film deposition on wafers, panels, and substrates.
- Atomic Layer Deposition (ALD) — Sub-sccm accuracy control for self-limiting surface reactions in advanced node logic and memory fabrication.
- Etch Process Chambers — Reactive gas (CF₄, Cl₂, HBr) flow control in plasma etch tools for pattern transfer.
- Diffusion Furnaces & Oxidation Tubes — Stable O₂, N₂, and H₂ delivery for thermal oxidation and annealing steps.
- Sputtering & PVD Systems — Argon and reactive gas control for magnetron sputtering targets.
- R&D Vacuum Systems & Gas Panels — Laboratory-grade flow accuracy for process development and characterization.
- Solar Cell & Flat Panel Display Manufacturing — High-throughput gas delivery in large-area deposition tools.
Technical Specifications
| Parameter | Value |
|---|---|
| Manufacturer | MKS Instruments |
| Part Number | 1179A00452CR1BV |
| Configuration Code 1 | ESA-Y2020A23-11 |
| Configuration Code 2 | ESA-Y3040A23-21 |
| Series | 1179A (Type 1179A Mass-Flo® Controller) |
| Device Type | Thermal Mass Flow Controller (MFC) |
| Control Signal | Analog (0–5 VDC / 4–20 mA, per config) |
| Valve Type | Normally Closed (NC) |
| Wetted Materials | 316L SS body, Viton / Kalrez seals (per config) |
| Fitting Type | VCR / Swagelok (per configuration suffix) |
| Operating Pressure | Up to 100 psig inlet (typical) |
| Accuracy | ±1% of Full Scale |
| Repeatability | ±0.2% of Full Scale |
| Response Time | <2 seconds to within 2% of setpoint |
| Power Supply | ±15 VDC (typical) |
| Weight | 2,600 g (approx.) |
| HS Code | 9026.80.20 |
| Country of Origin | United States |
Note: Full configuration decode (gas species, full-scale range, fittings, seal material) available upon request. Contact Konmask for datasheet.
Why Engineers Specify This Model
- Proven 1179A Platform — MKS Mass-Flo® 1179A is one of the most widely deployed MFC families in semiconductor fabs globally, with decades of field reliability data.
- Dual Configuration Codes — The ESA-Y2020A23-11 and ESA-Y3040A23-21 suffixes indicate specific gas calibration, range, and fitting combinations, enabling drop-in replacement without re-qualification in validated processes.
- Analog Compatibility — Direct interface with legacy MFC controllers, gas boxes, and process tools without protocol conversion.
- Tight Accuracy ±1% FS — Critical for stoichiometry control in CVD and ALD where gas ratio directly determines film composition and electrical properties.
- Normally Closed Valve — Fail-safe design: gas flow stops on power loss, protecting process chambers and personnel.
- 316L SS Wetted Path — Corrosion resistance for halogen-containing process gases (NF₃, WF₆, HCl).
Complete System Bill of Materials
Engineers integrating this MFC into a gas delivery system typically specify the following complementary components:
- MKS Type 247 / PR4000B Multi-Channel Readout & Control Unit
- MKS 1179A-compatible gas stick manifold (VCR fittings)
- MKS 122B / 627D Capacitance Manometer (upstream pressure reference)
- MKS 153 / 248 Exhaust Throttle Valve (downstream pressure control)
- Swagelok SS-4-VCR-1 VCR face seal fittings
- Stainless steel high-purity tubing (1/4″ OD, electropolished)
- Inline particulate filter (0.003 μm, upstream of MFC)
- MKS PDR900 / PR4000F flow controller power supply
Compliance & Industry Standards
- CE Marking — Compliant with EU Machinery and Low Voltage Directives (where applicable)
- RoHS — Manufactured in accordance with RoHS 2 (2011/65/EU) requirements
- SEMI Standards — Designed to SEMI F-series guidelines for semiconductor process gas equipment
- ISO 9001 — MKS Instruments operates under ISO 9001 certified quality management systems
- HS Code 9026.80.20 — Classified as instruments for measuring or checking flow of liquids/gases
Quality Assurance & Sourcing
Konmask.com specializes in industrial automation and process control components for semiconductor, energy, and advanced manufacturing sectors. Every unit offered through our platform undergoes the following sourcing protocol:
- ✅ Verified provenance — Sourced from authorized distributors, OEM surplus, or decommissioned fab equipment with traceable history
- ✅ Visual & functional inspection — Physical condition assessed prior to listing; any cosmetic wear is disclosed
- ✅ Original labeling intact — MKS part number, serial number, and configuration labels preserved for traceability
- ✅ Secure export packaging — ESD-safe, foam-lined packaging with moisture barrier for international shipment
- ✅ 30-day DOA warranty — Dead-on-arrival replacement guarantee for all listed units
How to Source This Part
The MKS 1179A00452CR1BV is a configured-to-order part number. Availability varies. To confirm stock, lead time, and pricing:
- Add to Cart — Proceed directly if the unit is in stock and price is listed.
- Request a Quote — Contact [email protected] for volume pricing, alternative configurations (ESA-Y2020A23-11 vs ESA-Y3040A23-21), or calibration certificates.
- Cross-Reference Check — Need a compatible substitute? Our engineers can identify equivalent MKS 1179A variants or alternative-brand MFCs (Brooks, Horiba, Alicat) that match your process spec.
- Expedited Sourcing — For urgent fab requirements, call +0086 19859288691 for same-day response.
Application-Specific FAQ
- Q: What gas species is this MFC calibrated for?
- A: The calibration gas is encoded in the configuration suffix. Please contact us with your part number and we will decode the full specification including gas type, full-scale range (sccm/slm), and seal material.
- Q: Is this unit compatible with my existing MKS 247 controller?
- A: Yes. The 1179A series uses standard 0–5 VDC analog interface, fully compatible with MKS 247, PR4000, and most third-party MFC controllers using the same signal standard.
- Q: Can I use this MFC for corrosive gases like HCl or NF₃?
- A: Compatibility depends on the seal material specified in the configuration code. 316L SS body is compatible with most corrosive gases; seal material (Viton vs Kalrez) determines the final chemical compatibility. Contact us to confirm.
- Q: Do you offer recalibration services?
- A: We can coordinate factory recalibration through MKS-authorized service centers. Lead time and cost vary by configuration. Inquire at [email protected].
- Q: What is the difference between ESA-Y2020A23-11 and ESA-Y3040A23-21?
- A: These are two distinct configuration codes representing different full-scale ranges, gas calibrations, or fitting specifications. Both are listed for cross-reference purposes. Please confirm which configuration your process tool requires before ordering.
- Q: Can you ship internationally?
- A: Yes. We ship worldwide with DHL Express, FedEx International Priority, and sea freight for bulk orders. Export documentation (commercial invoice, packing list, COO) is provided for customs clearance.
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Contact: [email protected] | +0086 19859288691
