RF Power Delivery Solution – Applied Materials (AMAT) 0150-10613 | DPA Gen Series
Where This Product Is Used
The AMAT 0150-10613 (cross-reference: 20360207 / 20704A-25352) is a precision RF coaxial cable assembly engineered for Applied Materials CVD and plasma etch platforms utilizing the DPA (Digital Power Architecture) RF generator subsystem. Typical deployment environments include:
- 300mm wafer fab CVD chambers (e.g., Producer SE, Centura platforms)
- Plasma etch systems requiring high-frequency RF signal integrity at 13.56 MHz / 2 MHz
- RF match network interconnects between generator output and match unit input
- Semiconductor OEM tool refurbishment and spare-parts programs
- Cleanroom-qualified tool upgrade and preventive maintenance projects
Technical Specifications
- Part Number: 0150-10613
- Cross-Reference P/N: 20360207 / 20704A-25352
- Assembly Description: ASSY CABLE COAX RF GEN DPA
- Manufacturer: Applied Materials (AMAT)
- Series: DPA Gen — Digital Power Architecture Generator
- Cable Type: RF Coaxial (50 Ω characteristic impedance)
- Application: RF Generator Output to Match Network Signal Path
- Operating Frequency: 2 MHz / 13.56 MHz (AMAT DPA platform standard)
- Weight: 1,450 g (approx.)
- Condition: New OEM / Refurbished OEM (specify at inquiry)
- Packaging: Anti-static shielded bag, export-grade carton
Why Engineers Specify This Model
- OEM-matched impedance: Maintains 50 Ω characteristic impedance across the full RF operating frequency range of AMAT DPA generators, minimizing reflected power and protecting generator output stages.
- Double-braided shielding: Suppresses EMI emissions in dense fab environments, ensuring adjacent process tool compliance and signal fidelity.
- Cleanroom-compatible connectors: Terminations rated for Class 10 / ISO 4 environments — no outgassing concerns during chamber-adjacent routing.
- Drop-in OEM replacement: Direct form-fit-function substitute; no re-qualification required when replacing like-for-like on applicable AMAT platforms.
- Traceable documentation: Each unit ships with documentation supporting OEM traceability for tool maintenance records and audit compliance.
Complete System Bill of Materials
This cable assembly is typically ordered alongside the following components for a complete RF power delivery maintenance kit:
- AMAT RF Match Network Assembly (platform-specific P/N)
- AMAT DPA RF Generator Module
- RF Power Sensor / Directional Coupler
- Coax Bulkhead Feedthrough (chamber wall)
- Torque wrench set (N-type / SMA connector specification)
Contact [email protected] for a complete BOM quote tailored to your specific platform configuration.
Compliance & Industry Standards
- Designed in alignment with SEMI S2 environmental, health, and safety guidelines for semiconductor manufacturing equipment
- RF shielding performance consistent with FCC Part 18 industrial ISM equipment requirements
- Connector torque specifications per MIL-STD-348 RF connector interface standards
- RoHS-compliant materials (confirm at order for specific lot)
Quality Assurance & Sourcing
Konmask.com sources Applied Materials spare parts through verified industrial surplus and OEM-authorized distribution channels. Every unit undergoes:
- Visual and dimensional inspection against OEM drawings
- Connector continuity and RF shield integrity verification
- Part number label authentication and cross-reference validation (0150-10613 / 20360207 / 20704A-25352)
- Secure anti-static packaging for international shipment
Certificates of conformance and inspection reports are available upon request for MRO and procurement teams.
How to Source This Part
- Add to cart directly for in-stock units — ships within 2 business days.
- Request a quote for volume orders (>3 units) or expedited delivery via [email protected].
- Cross-reference check: Confirm your platform P/N against 0150-10613 / 20360207 / 20704A-25352 before ordering.
- Lead time: Standard 3–7 business days international; express options available.
- Payment: T/T, PayPal, and major credit cards accepted. Net-30 available for qualified accounts.
Application-Specific FAQ
Q: Is this cable compatible with both 13.56 MHz and 2 MHz RF generators on AMAT platforms?
A: Yes. The coaxial construction and connector type are consistent across AMAT DPA generator variants operating in standard semiconductor RF frequency bands. Verify your generator model against the cross-reference list before ordering.
Q: Can this replace a damaged cable on a Centura or Producer CVD system?
A: This assembly is a direct OEM replacement for the RF generator output cable on applicable AMAT platforms. Confirm P/N 0150-10613 appears on your tool BOM or maintenance manual before installation.
Q: Do you offer installation support or technical consultation?
A: Konmask.com provides pre-sales technical support to confirm compatibility. Contact our engineering team at [email protected] with your tool model and current P/N for a compatibility confirmation.
Q: What is the lead time for bulk orders?
A: For orders of 3+ units, please request a formal quote. Typical lead time is 5–10 business days depending on stock availability and destination.
Q: Is a warranty provided?
A: All parts are covered by Konmask.com’s 90-day functional warranty against defects in materials and workmanship under normal operating conditions.
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