Semiconductor Gas Delivery Solution – FUJIKIN CENTURA 401948 | Diaphragm Valve Series
Where This Product Is Used
The FUJIKIN CENTURA Diaphragm Valve Assembly (P/N 401948 / 0041-81313 / 0041-94358) is purpose-built for ultra-high purity (UHP) gas delivery systems in semiconductor wafer fabrication. It is widely deployed in:
- CVD / ALD Process Chambers — precise on/off gas switching for precursor delivery in chemical vapor deposition and atomic layer deposition tools
- Etch Gas Panels — reliable isolation and flow control of reactive gases (Cl₂, HBr, NF₃) in plasma etch equipment
- Applied Materials CENTURA Platform — OEM-compatible replacement for AMAT CENTURA mainframe gas boxes and process modules
- Diffusion Furnace Gas Manifolds — high-cycle-life valve for N₂, O₂, and H₂ switching in thermal oxidation and diffusion processes
- Gas Cabinet / VMB (Valve Manifold Box) — point-of-use gas control in bulk and specialty gas distribution systems
Technical Specifications
- Manufacturer: FUJIKIN Incorporated (Japan)
- Series: CENTURA Compatible / UHP Diaphragm Valve
- Part Numbers: 401948 | 0041-81313 | 0041-94358
- Valve Type: Diaphragm Valve Assembly (ASSY)
- Application: Ultra-High Purity (UHP) Gas Service
- Actuation: Pneumatic (Air-to-Open / Air-to-Close)
- Body Material: 316L Stainless Steel (electropolished)
- Diaphragm Material: Metal diaphragm (UHP-grade)
- Cv (Flow Coefficient): Per FUJIKIN UHP series standard
- Operating Pressure: Vacuum to 150 psig (10.3 bar)
- Temperature Range: -10°C to +150°C
- Leak Integrity: ≤ 1×10⁻¹⁰ std cc/sec He (UHP spec)
- End Connections: VCR® / W-Seal face seal fittings (AMAT CENTURA compatible)
- Weight: Approx. 700 g
- Compliance: SEMI S2, SEMI F57
Why Engineers Specify This Model
- OEM Cross-Reference Verified — directly interchangeable with Applied Materials CENTURA gas box assemblies; eliminates re-qualification risk
- Metal Diaphragm Design — eliminates elastomer outgassing, critical for sub-10nm process nodes where trace contamination causes yield loss
- Electropolished 316L Body — Ra ≤ 0.25 µm internal surface finish minimizes particle generation and moisture adsorption
- High Cycle Life — FUJIKIN UHP diaphragm valves are rated for millions of actuations, reducing unplanned downtime in 24/7 fab environments
- Dual P/N Traceability — stocked under both FUJIKIN (401948) and AMAT cross-reference numbers (0041-81313 / 0041-94358) for seamless MRO procurement
- Drop-in Replacement — same envelope dimensions and port geometry as OEM; no piping modification required
Complete System Bill of Materials
Engineers integrating this valve into a CENTURA gas panel typically source the following complementary components:
- FUJIKIN UHP Mass Flow Controller (MFC) — matched Cv for process gas flow regulation
- FUJIKIN / Swagelok VCR® Fittings & Gaskets — 1/4″ and 1/8″ face seal connections
- AMAT CENTURA Gas Box Manifold Block — mounting substrate for valve assembly
- Pneumatic Actuator Solenoid Valve (24 VDC) — pilot valve for pneumatic actuation
- UHP Stainless Steel Tubing (1/4″ OD, 0.035″ wall) — interconnect tubing
- Inline Particulate Filter (0.003 µm) — upstream protection for process gases
- Pressure Transducer / Gauge — process pressure monitoring at valve inlet
Compliance & Industry Standards
- SEMI S2 — Environmental, Health & Safety guidelines for semiconductor manufacturing equipment
- SEMI F57 — UHP fluid distribution components material and component standard
- ISO 9001:2015 — FUJIKIN quality management system certification
- RoHS Compliant — restriction of hazardous substances in manufacturing
- AMAT OEM Cross-Reference: 0041-81313 / 0041-94358
Quality Assurance & Sourcing
Konmask.com sources FUJIKIN components through verified industrial distribution channels. Each unit undergoes the following before shipment:
- Visual and dimensional inspection against FUJIKIN factory drawings
- P/N and date code verification for full traceability
- Helium leak test certificate available upon request
- Anti-static, moisture-barrier packaging for UHP components
- Certificate of Conformance (CoC) provided with every order
How to Source This Part
- In Stock: Contact us for real-time availability and lead time confirmation
- Request a Quote: Email support@konmask.com with your required quantity and delivery schedule
- Bulk / Project Orders: Volume pricing available for fab MRO programs and tool qualification builds
- Expedite Available: Air freight from Asia warehouse; typical lead time 3–7 business days
- Phone / WhatsApp: +0086 19859288691
Application-Specific FAQ
Q: Is this valve compatible with Applied Materials CENTURA Sx / DxZ / XT platforms?
A: Yes. The 401948 / 0041-81313 / 0041-94358 assembly is cross-referenced to AMAT CENTURA gas box configurations. Confirm your specific module BOM before ordering.
Q: Can this valve be used with corrosive gases such as Cl₂ or HF?
A: The 316L electropolished body and metal diaphragm are compatible with many corrosive process gases. Consult FUJIKIN’s chemical compatibility chart or contact our engineering team for your specific gas mixture.
Q: What is the shelf life of the diaphragm assembly?
A: FUJIKIN recommends storage in original sealed packaging in a clean, dry environment. Shelf life is typically 2 years from manufacture date. Date code is traceable on the valve body.
Q: Do you provide a test report or CoC?
A: Yes. A Certificate of Conformance is included with every shipment. Helium leak test reports are available upon request for critical process applications.
Q: Can Konmask supply other FUJIKIN CENTURA series components?
A: Yes. We stock a broad range of FUJIKIN UHP valves, regulators, and fittings for AMAT, Lam Research, and TEL platforms. Contact us with your full BOM for a consolidated quote.
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Contact: support@konmask.com | +0086 19859288691
