LAM RESEARCH 715-083930-001 / 0242-75378 MOGCTA46 Process Ring | Replacement, Equivalent & Selection Guide
The LAM RESEARCH 715-083930-001 (cross-reference: 0242-75378, series: MOGCTA46) is a precision Process Ring engineered for Lam Research semiconductor etch and deposition systems. This critical consumable maintains plasma confinement geometry and wafer-edge uniformity during processing. Konmask.com supplies genuine OEM and verified compatible equivalents with full traceability.
Technical Specifications
- Manufacturer: LAM RESEARCH
- Primary Part Number: 715-083930-001
- Cross-Reference P/N: 0242-75378
- Series / Config Code: MOGCTA46
- Component Type: Process Ring
- Material: High-purity ceramic / anodized aluminum (application-dependent)
- Weight: ~20 g
- Compatibility: Lam Research etch & CVD chamber platforms
- Condition Available: New OEM · Certified Refurbished · Compatible Equivalent
Compatible Replacement & Equivalent Models
The following parts are confirmed cross-references or functional equivalents for the 715-083930-001 Process Ring:
- LAM RESEARCH 0242-75378 – alternate P/N, same assembly
- LAM RESEARCH MOGCTA46 series process rings – same geometry family
- Third-party ceramic process rings matching chamber geometry (contact Konmask engineering for fit verification)
Always verify chamber model and process conditions before substituting. Contact [email protected] for a free compatibility check.
Why Choose the Original Model
- Plasma uniformity: OEM-spec geometry ensures consistent etch/deposition profiles across the wafer edge.
- Material purity: Certified high-purity materials minimize contamination risk in cleanroom environments.
- Dimensional accuracy: Tight tolerances maintain proper chamber sealing and gas flow dynamics.
- Validated performance: Qualified against Lam Research process recipes for predictable consumable life.
- Full traceability: Certificate of Conformance (CoC) and test reports available on request.
Typical Applications
- Plasma etch chambers – dielectric, conductor, and silicon etch processes
- CVD / PECVD deposition systems
- Wafer-edge exclusion zone management
- Preventive maintenance (PM) kit replacement cycles
- Refurbishment of Lam Research etch modules
System Compatibility
The 715-083930-001 Process Ring is designed for Lam Research chamber platforms. Typical compatible tool families include Lam Research Versys, Exelan, and related etch/CVD systems. Always confirm against your Chamber Parts List (CPL) before ordering. Konmask can cross-reference your chamber model upon request.
Selection Guide
- Step 1 – Confirm P/N: Match 715-083930-001 or cross-reference 0242-75378 against your chamber CPL or BOM.
- Step 2 – Verify series code: MOGCTA46 indicates a specific geometry/material configuration — do not substitute with a different series without engineering review.
- Step 3 – Choose condition: New OEM for critical production; certified refurbished for non-critical or R&D applications.
- Step 4 – Check lead time: Contact Konmask for real-time stock availability and expedite options.
Quality Assurance & Sourcing
- All parts sourced from authorized distributors or OEM-certified supply chains.
- Dimensional inspection and material certification available upon request.
- Refurbished units undergo cleaning, inspection, and dimensional verification before shipment.
- Full traceability documentation (CoC, test reports) available for critical orders.
How to Order
- Add to cart directly on this page, or
- Email [email protected] with your P/N, quantity, and required condition (new / refurbished / equivalent).
- For bulk or urgent orders, call +0086 19859288691 for immediate assistance.
- We accept T/T, PayPal, and major credit cards. Lead time quoted at time of order.
Replacement & Compatibility FAQ
Q: Is 0242-75378 the same as 715-083930-001?
A: Yes — 0242-75378 is an alternate Lam Research part number referencing the same process ring assembly.
Q: Can I use a third-party equivalent?
A: Compatible equivalents are available. Contact us for a fit/form/function review before substituting in a production environment.
Q: What is the typical replacement interval?
A: Replacement frequency depends on process chemistry and RF hours. Consult your chamber PM schedule or contact Konmask for guidance.
Q: Do you offer expedited shipping?
A: Yes — express air freight is available globally. Contact us for a quote.
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