Semiconductor Wafer Handling Solution – Lam Research 810-068158-014 | Node Robot Interface Board
Where This Product Is Used
The Lam Research 810-068158-014 Node Robot Interface Board is a critical control and communication component deployed in Lam Research semiconductor processing platforms. It is specifically engineered for wafer-handling robot nodes within cluster-tool architectures used in high-volume semiconductor fabs worldwide.
Typical deployment environments include:
- Plasma Etch Systems – Lam Research Versys, Exelan, and 2300 series etch chambers requiring precise wafer transfer sequencing
- CVD / PECVD Deposition Tools – Lam Research VECTOR and ALTUS platforms where robot arm coordination is safety-critical
- Cluster Tool Transfer Modules – Central equipment front-end modules (EFEM) and vacuum transfer modules (VTM) managing multi-chamber wafer routing
- 300mm Wafer Fab Lines – High-throughput production environments where uptime and signal integrity are non-negotiable
- Legacy Fab Maintenance & Refurbishment – Replacement of failed or degraded interface boards to restore OEM-level robot performance
Technical Specifications
| Part Number | 810-068158-014 |
| Manufacturer | Lam Research Corporation |
| Board Type | Node Robot Interface Board (SBC / Control Board) |
| Series / Platform | Lam Research Node Robot Control Series |
| Form Factor | PCB Assembly, proprietary Lam Research form factor |
| Interface | Multi-axis robot node communication and I/O control |
| Application | Semiconductor wafer transfer robot control |
| Condition | Genuine OEM / Refurbished – Tested & Verified |
| Weight | 500 g (approx.) |
| Compatibility | Lam Research cluster tool platforms (consult datasheet) |
Why Engineers Specify This Model
- OEM Precision: Designed and manufactured by Lam Research to exact tolerances required for sub-micron wafer placement accuracy — no aftermarket compromise.
- Node-Level Intelligence: Handles distributed robot control at the node level, reducing latency in multi-axis wafer transfer sequences critical to throughput.
- Signal Integrity: Engineered for the electrically noisy environment of plasma processing chambers, with robust shielding and isolation on all communication lines.
- Drop-In Replacement: Maintains full backward compatibility with existing Lam Research robot controller firmware — no reconfiguration required on most platforms.
- Proven Field Reliability: Widely specified by process engineers and equipment maintenance teams at Tier-1 fabs as the go-to replacement for aging or failed interface boards.
Complete System Bill of Materials
The 810-068158-014 typically operates alongside the following Lam Research components in a complete robot control subsystem:
- Lam Research Robot Controller Main Board
- Lam Research Servo Amplifier / Motor Driver Module
- Lam Research I/O Expansion Board
- Lam Research Vacuum Transfer Module (VTM) Controller
- Lam Research End Effector / Blade Assembly
- Lam Research Power Distribution Unit (PDU) for Robot Subsystem
Contact Konmask.com for availability of complementary Lam Research spare parts to complete your BOM.
Compliance & Industry Standards
- SEMI Standards: Compatible with SEMI E84, SEMI E87, and SEMI E157 where applicable
- RoHS Compliance: Verify with specific revision — consult Lam Research documentation for RoHS status of revision -014
- ESD Handling: Requires ANSI/ESD S20.20 compliant handling; stored and shipped in anti-static packaging
- CE / UL: As an OEM sub-assembly, compliance is governed by the parent Lam Research system certification
Quality Assurance & Sourcing
At Konmask.com, every Lam Research spare part undergoes a structured quality process before shipment:
- ✔ Visual Inspection: PCB, connectors, and solder joints inspected for physical damage, corrosion, or burn marks
- ✔ Functional Verification: Board powered and tested against known-good reference signals where test fixtures are available
- ✔ ESD-Safe Packaging: Shipped in anti-static bags with foam cushioning inside rigid outer cartons
- ✔ Traceability: Part number, revision, and serial number documented at time of dispatch
- ✔ Warranty: 90-day replacement warranty against DOA or latent defects — contact support for terms
How to Source This Part
- Confirm Part Number: Cross-reference 810-068158-014 against your Lam Research BOM or equipment service manual to verify revision compatibility.
- Request a Quote: Email [email protected] or call +0086 19859288691 for volume pricing, lead time, and availability confirmation.
- Place Your Order: Add to cart and check out online, or request a formal proforma invoice for corporate procurement.
- Expedited Shipping: DHL / FedEx international express available — typical transit 3–7 business days to major fab locations globally.
- After-Sales Support: Our technical team can assist with installation guidance and compatibility verification post-delivery.
Application-Specific FAQ
Q: Is the 810-068158-014 compatible with all Lam Research etch platforms?
A: This board is designed for Lam Research node robot control architectures. Compatibility depends on your specific platform generation and firmware version. Contact us with your tool model and serial number for confirmation.
Q: What is the difference between revision -014 and earlier revisions?
A: Lam Research revision suffixes typically reflect PCB layout or component changes. We recommend using the exact revision specified in your equipment BOM. Contact our team if you need cross-revision compatibility guidance.
Q: Can this board be repaired rather than replaced?
A: Board-level repair is possible for some failure modes (e.g., failed capacitors, blown fuses). However, for production-critical tools, replacement with a tested spare is strongly recommended to minimize downtime risk.
Q: Do you offer consignment or exchange programs?
A: Yes. Contact Konmask.com to discuss core exchange options where your failed board is returned in exchange for a discount on the replacement unit.
Q: What lead time should I expect?
A: In-stock units ship within 1–2 business days. For out-of-stock items, lead time is typically 2–4 weeks depending on sourcing. Contact us for real-time availability.
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Contact: [email protected] | +0086 19859288691
