Lam Research SI 716-082039-245 Outer Gate Valve Assembly – Etch Chamber Isolation Component
When a gate valve assembly fails mid-process in a semiconductor etch chamber, the consequences are immediate and costly: the vacuum integrity of the process module is compromised, wafers in production are scrapped, and the entire tool is taken offline for unplanned maintenance. In high-volume fabs running 24/7, even a few hours of downtime can translate to tens of thousands of dollars in lost throughput. The Lam Research SI 716-082039-245 Outer Gate Valve Assembly is the precision-engineered component that prevents exactly this scenario — providing reliable, repeatable isolation between process chambers and transfer modules.
The SI 716-082039-245 (interchangeable with SI 716-082039-238 and SI 716-082039-262) is an OEM-specification outer gate valve assembly designed for Lam Research etch systems. As a critical motion and sealing component within the wafer transfer path, it operates under demanding vacuum conditions and must maintain ultra-low leak rates cycle after cycle. This part occupies a foundational role in Lam Research’s chamber isolation architecture and is widely deployed across global semiconductor fabs running advanced logic and memory processes.
Technical Specifications
- Part Numbers: SI 716-082039-245 / SI 716-082039-238 / SI 716-082039-262
- OEM Brand: Lam Research
- Component Type: Outer Gate Valve Assembly
- Application: Etch Chamber / Process Module Isolation
- Operating Environment: High-vacuum semiconductor process equipment
- Weight: Approx. 4,100 g
- Condition: New / Refurbished / Used — specify at inquiry
- Compatibility: Lam Research etch tool platforms (confirm compatibility with your tool configuration)
Key Features & Benefits
- OEM-Grade Precision: Manufactured to Lam Research original specifications, ensuring dimensional accuracy and process compatibility.
- Vacuum Integrity: Engineered to maintain ultra-low leak rates critical for process repeatability in etch chambers.
- Multi-SKU Interchangeability: SI 716-082039-245, SI 716-082039-238, and SI 716-082039-262 are cross-referenced variants — simplifying procurement across tool generations.
- Reduced Downtime Risk: Stocking this assembly as a spare minimizes mean time to repair (MTTR) during unplanned valve failures.
- Rigorous Inspection: Each unit sourced by Konmask.com undergoes condition verification before shipment.
Industry & Equipment Applications
- Semiconductor Manufacturing: Front-end-of-line (FEOL) etch processes for logic, DRAM, and NAND flash production.
- Plasma Etch Systems: Lam Research Versys, Kiyo, Flex, and related etch platform families.
- Wafer Transfer Modules: Isolation between process chambers and robot transfer chambers (VTM/ATM).
- Advanced Packaging: Applicable in etch steps for TSV, RDL, and advanced packaging flows.
- R&D Fabs: University and research institute tools requiring reliable OEM-equivalent spare parts.
System Integration & Compatible Parts
The SI 716-082039-245 Outer Gate Valve Assembly interfaces with the chamber body, actuator mechanism, and associated sealing hardware within Lam Research etch systems. When replacing this assembly, consider inspecting or replacing the following related components:
- Gate valve actuator and pneumatic fittings
- O-ring seal kits for the valve seat and body interfaceSlit valve door and liner assemblies
- Chamber isolation bellows (if applicable to your tool configuration)
Contact our technical team to confirm compatibility with your specific tool serial number and configuration before ordering.
Our Quality Assurance Process
At Konmask.com, every semiconductor spare part goes through a structured sourcing and verification process:
- Source Verification: Parts are sourced from authorized channels, decommissioned tools, or certified refurbishers with documented provenance.
- Visual & Dimensional Inspection: Each assembly is inspected for physical damage, wear, and dimensional conformance.
- Condition Grading: Parts are clearly graded (New, Refurbished, or Used/Tested) with full disclosure at the time of inquiry.
- Secure Packaging: Shipped in ESD-safe, anti-static packaging with appropriate cushioning to prevent transit damage.
- Documentation: Certificates of conformance and inspection reports available upon request.
How to Order
Konmask.com operates as a B2B inquiry-based platform. To request a quote for the Lam Research SI 716-082039-245 Outer Gate Valve Assembly:
- Submit an inquiry via our Contact Form or email support@konmask.com.
- Provide your tool model, serial number, and required quantity.
- Our team will respond with availability, condition details, lead time, and pricing within 1 business day.
- Upon agreement, we issue a formal quotation and proceed with order confirmation.
📞 WhatsApp / Phone: +0086 19859288691
Why Choose Konmask.com?
- Semiconductor Spare Parts Specialists: We focus exclusively on industrial automation and semiconductor equipment components — not a generalist marketplace.
- Global Sourcing Network: Access to hard-to-find and obsolete Lam Research parts through our established supplier relationships.
- Technical Expertise: Our team understands the engineering context of every part we sell — not just the part number.
- Fast Response: Inquiry-to-quote turnaround within 24 hours for most parts.
- Trusted by Fabs Worldwide: Serving procurement teams, process engineers, and equipment managers across Asia, Europe, and the Americas.
Frequently Asked Questions
- Q: Are SI 716-082039-245, SI 716-082039-238, and SI 716-082039-262 fully interchangeable?
- A: These three part numbers are cross-referenced variants of the Outer Gate Valve Assembly. However, we recommend confirming interchangeability with your tool’s BOM or contacting our technical team before substitution.
- Q: What condition are the parts available in?
- A: We stock New, Refurbished, and Used/Tested units depending on current inventory. Condition and provenance are disclosed at the time of inquiry.
- Q: Do you provide a warranty?
- A: Warranty terms vary by part condition and are specified in the quotation. Refurbished parts typically carry a 90-day functional warranty.
- Q: How long does shipping take?
- A: Lead time depends on stock availability and destination. In-stock parts typically ship within 2–3 business days. Express shipping options are available.
- Q: Can you source this part if it is not currently in stock?
- A: Yes. Submit an inquiry and our sourcing team will search our global supplier network. Most hard-to-find parts can be located within 3–7 business days.
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Original Source: https://Konmask.com
Contact: support@konmask.com | +0086 19859288691
