Semiconductor Etch System Gas Control Solution – LAM RESEARCH 810-494010-001 | MT-7.2-4.4-002 Series
Where This Product Is Used
The LAM RESEARCH 810-494010-001 PCB A6 Gas Box I/O Interlock is a critical safety and control board deployed in LAM Research plasma etch and CVD systems. It is found in high-volume semiconductor fabs operating 200mm and 300mm wafer processing lines, specifically within the gas delivery subsystem of the process chamber. Typical deployment environments include:
- Logic and memory wafer fabs (DRAM, NAND, FinFET nodes)
- Advanced packaging and MEMS fabrication lines
- R&D pilot lines running etch process development
- Refurbished tool integration projects requiring OEM-equivalent PCB assemblies
Technical Specifications
- OEM Part Number: 810-494010-001
- Cross-Reference: 0020-89026
- Assembly Designation: PCB A6 Gas Box I/O Interlock
- Series / BOM Reference: MT-7.2-4.4-002
- Manufacturer Part Code: MQMA022P2B
- Function: Gas Box I/O Interlock — monitors and interlocks gas delivery I/O signals to ensure safe process gas flow control
- Form Factor: PCB Assembly (populated board)
- OEM: LAM Research Corporation
- Weight: ~800 g
- Condition: Refurbished / Used Tested (specify at inquiry)
Why Engineers Specify This Model
- Safety-critical interlock logic: The A6 board manages gas box I/O interlock signals, preventing unsafe gas delivery states that could damage process chambers or create hazardous conditions.
- Direct OEM replacement: Part number 810-494010-001 is a drop-in replacement with no firmware modification required on compatible LAM etch platforms.
- Dual cross-reference: Stocked under both 810-494010-001 and 0020-89026, simplifying procurement across different BOM revisions.
- Reduced downtime: Immediate availability from Konmask inventory eliminates lead times associated with OEM direct orders, supporting rapid tool recovery.
Complete System Bill of Materials
This PCB is typically used alongside the following components in the gas box subsystem:
- Gas Box Main Controller PCB
- MFC (Mass Flow Controller) Driver Boards
- Gas Panel Solenoid Valve Driver Assemblies
- Process Chamber I/O Interface Boards
- Interlock Relay Modules
Contact Konmask for complete gas box PCB kits or matched-set sourcing.
Compliance & Industry Standards
- Designed and manufactured to SEMI S2 safety guidelines for semiconductor equipment
- Compatible with SEMI F47 voltage sag immunity requirements (system-level)
- RoHS compliance status: confirm with OEM documentation for specific revision
- ESD-sensitive component — handled and shipped per ANSI/ESD S20.20 protocols
Quality Assurance & Sourcing
- Each unit is inspected and functionally verified prior to shipment
- Sourced from decommissioned OEM tools or certified refurbishment channels
- Shipped in anti-static packaging with foam cushioning
- 30-day warranty available on tested units (terms apply)
- Traceability documentation available upon request
How to Source This Part
To place an order or request a quote for LAM RESEARCH 810-494010-001:
- Email: [email protected]
- Phone / WhatsApp: +0086 19859288691
- Include your tool model, fab location, and required delivery timeline for fastest response
- Bulk and emergency orders welcome — same-day quotation available
Application-Specific FAQ
Q: Is 810-494010-001 compatible with all LAM Research etch systems?
A: This board is specific to platforms using the MT-7.2-4.4-002 gas box architecture. Confirm compatibility with your tool’s BOM before ordering.
Q: What is the difference between 810-494010-001 and 0020-89026?
A: These are cross-reference part numbers for the same assembly used across different BOM revisions. Both refer to the PCB A6 Gas Box I/O Interlock board.
Q: Can this board be repaired rather than replaced?
A: Board-level repair is possible for certain failure modes. Contact Konmask to discuss repair vs. replacement options based on your fault diagnosis.
Q: Do you provide installation support?
A: Konmask provides part identification and sourcing support. Installation should be performed by qualified field service engineers per LAM Research service documentation.
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Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691
