Vacuum Process Control Solution — MKS Instruments 253B-31797 / 253B-26766 | 253B Series Exhaust Throttle Valve
Where This Product Is Used
The MKS 253B-31797 (alt P/N: 253B-26766, valve body P/N: 750B11TCB2GA) is an exhaust throttle valve engineered for precision pressure control in high-vacuum process chambers. It is widely deployed in:
- Semiconductor CVD & PECVD systems — maintains stable chamber pressure during thin-film deposition (SiO₂, Si₃N₄, poly-Si)
- Plasma etch tools — controls exhaust conductance to sustain uniform plasma density across the wafer
- PVD / sputtering chambers — throttles foreline pressure to protect turbomolecular pumps
- Diffusion furnaces & oxidation tubes — regulates atmospheric-to-sub-torr transitions during recipe steps
- Flat-panel display (FPD) manufacturing — large-area glass process chambers requiring repeatable pressure set-points
- Solar cell deposition lines — PECVD and ALD reactors for passivation layer control
- Research & university vacuum labs — UHV and HV experimental chambers
Technical Specifications
| Manufacturer | MKS Instruments |
| Primary Part Number | 253B-31797 |
| Alternate Part Number | 253B-26766 |
| Valve Body / Assembly P/N | 750B11TCB2GA |
| Series | 253B — Exhaust Throttle Valve Series |
| Type | Exhaust Throttle Valve (Butterfly / Pendulum) |
| Application | Vacuum process pressure control |
| Compatible Controllers | MKS 651C / 652C / 653B Pressure Controllers |
| Weight | 360 g |
| Condition | New / Refurbished / Tested (specify at inquiry) |
Full datasheet available upon request. Contact [email protected] for OEM specifications.
Why Engineers Specify This Model
- Proven 253B platform — decades of field reliability in Class 1 cleanroom environments
- Drop-in replacement — dual P/N cross-reference (253B-31797 / 253B-26766) ensures backward compatibility across tool generations
- Fast response — low-inertia actuator enables tight pressure loop closure, critical for endpoint-sensitive etch processes
- Corrosion-resistant wetted surfaces — compatible with halogen-based process gases (Cl₂, HBr, NF₃, SF₆)
- Minimal particle generation — precision-machined sealing surfaces reduce contamination risk in sub-10 nm node processes
- Long service interval — reduces unplanned downtime and lowers cost-of-ownership vs. generic alternatives
Complete System Bill of Materials
For a fully functional exhaust pressure control loop, engineers typically pair this valve with:
- MKS 651C or 652C Pressure Controller
- MKS Baratron® Capacitance Manometer (Type 627 / 628 series)
- MKS 253B series actuator assembly
- ISO-K or CF flange adapter (specify bore size at order)
- Foreline trap / cold trap (process-dependent)
Konmask.com can source complete BOM packages — contact us for a bundled quote.
Compliance & Industry Standards
- Designed and manufactured to SEMI S2 / S8 safety guidelines
- RoHS-compliant materials available (confirm at order)
- Compatible with SEMI F47 voltage sag requirements when paired with MKS 651/652 controllers
- CE marking applicable for EU installations (verify with OEM documentation)
Quality Assurance & Sourcing
- Verified inventory — every unit inspected and cross-referenced against MKS OEM part numbers before shipment
- Traceability — lot records and serialization available for regulated fabs
- Packaging — ESD-safe, cleanroom-compatible packaging; nitrogen-purged option available
- Warranty — 90-day functional warranty on all tested units; extended warranty available
- Global logistics — DHL / FedEx express worldwide; export documentation (CO, packing list, commercial invoice) included
How to Source This Part
- Submit your RFQ via [email protected] with quantity, required condition (new / refurb / tested), and delivery timeline
- Receive a formal quotation within 1 business day
- Confirm order — payment via T/T, PayPal, or trade terms for qualified accounts
- Shipment within 3–7 business days (stock-dependent); expedited options available
- Track your order and receive full shipping documentation
📞 WhatsApp / WeChat: +0086 19859288691 | ✉️ [email protected]
Application-Specific FAQ
Q: Is 253B-31797 a direct replacement for 253B-26766?
A: Yes. Both part numbers refer to the same valve assembly in different MKS revision catalogs. They are mechanically and electrically interchangeable.
Q: What controller is required to operate this valve?
A: The 253B series is designed to work with MKS 651C, 652C, and 653B pressure controllers. Third-party 0–10 V or 4–20 mA analog controllers may also be compatible — confirm signal interface before ordering.
Q: Can this valve handle corrosive process gases?
A: The 253B series uses corrosion-resistant alloys and elastomers suitable for halogen-based chemistries. Confirm specific gas compatibility with your process engineer for aggressive applications.
Q: Do you provide a certificate of conformance (CoC)?
A: Yes. CoC and inspection reports are available for all new and refurbished units upon request.
Q: What is the lead time for bulk orders?
A: Standard lead time is 3–7 business days for stocked units. For bulk or long-term supply agreements, contact us for a dedicated sourcing plan.
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Contact: [email protected] | +0086 19859288691
