MKS 626B01TBE Baratron® Capacitance Manometer – 133.32 Pa Full-Scale | 626B Series
Engineering Background
The MKS Baratron® 626B series represents the gold standard in capacitance manometry for high-purity semiconductor fabrication, thin-film deposition, and precision vacuum process control. Developed by MKS Instruments — a global leader in process control instrumentation — the 626B platform delivers absolute, gas-independent pressure measurement with sub-millisecond response, making it the preferred transducer for CVD, ALD, etch, and ion implant chambers worldwide.
Product Positioning
The MKS 626B01TBE (P/N 1345720-01 / 2305437-B / 713-412196-001) is a temperature-controlled, heated capacitance manometer with a 133.32 Pa (1 Torr) full-scale range. Its Inconel® sensing diaphragm and thermally stabilized sensor head eliminate zero drift caused by condensation or reactive gas adsorption, ensuring long-term measurement integrity in aggressive process environments. This unit is a direct OEM-equivalent replacement for Applied Materials, Lam Research, and Tokyo Electron process chambers.
Complete Technical Specifications
| Parameter | Specification |
|---|---|
| Manufacturer | MKS Instruments, Inc. |
| Model / Part Number | 626B01TBE / 1345720-01 |
| Cross-Reference P/N | 2305437-B | 713-412196-001 |
| Series | Baratron® 626B |
| Measurement Type | Absolute Capacitance Manometer |
| Full-Scale Range | 133.32 Pa (1 Torr) |
| Gas Independence | Yes — true absolute measurement |
| Diaphragm Material | Inconel® (corrosion-resistant alloy) |
| Wetted Materials | Inconel®, 316L SS, Al₂O₃ ceramic |
| Sensor Temperature Control | Heated (thermally stabilized) |
| Output Signal | 0–10 VDC (linear) |
| Accuracy | ±0.25% of reading (typical) |
| Zero Stability | <0.02% FS/°C |
| Response Time | <20 ms (10–90%) |
| Process Connection | NW16 / KF16 (ISO-KF) |
| Electrical Connector | 15-pin D-Sub (MKS standard) |
| Power Supply | ±15 VDC @ 250 mA |
| Operating Temperature | 45°C sensor head (controlled) |
| Weight | 360 g (approx.) |
| Condition | Refurbished / Tested OEM Pull |
Proven Application Environments
- Semiconductor Fab: CVD, PECVD, ALD, LPCVD process chambers (AMAT, Lam, TEL, ASML tool sets)
- Etch & Strip: Plasma etch reactors requiring precise sub-Torr pressure control
- Ion Implant: Beam-line and end-station vacuum pressure monitoring
- Thin-Film Deposition: PVD sputtering and evaporation systems
- Research & Metrology: University labs, national labs, and R&D vacuum systems
- Flat Panel Display (FPD): Large-area PECVD and etch tools
Engineering Advantages
- Gas-Independent Accuracy: Capacitance sensing principle measures true pressure regardless of gas species — no correction factors required.
- Thermal Stabilization: Heated sensor head maintains constant diaphragm temperature, eliminating condensation-induced zero shift in reactive or corrosive process gases (HF, Cl₂, NF₃, etc.).
- High Corrosion Resistance: Inconel® diaphragm withstands aggressive halogen-based chemistries with minimal drift over extended service life.
- Drop-In OEM Replacement: Mechanically and electrically compatible with original MKS 626B installations — no recalibration of the MFC controller required.
- Fast Dynamic Response: <20 ms response time supports closed-loop pressure control in fast-switching process recipes.
System Architecture & Signal Flow
The 626B01TBE integrates directly into standard MKS pressure control loops. The sensor outputs a 0–10 VDC analog signal proportional to absolute pressure, which is fed to an MKS 600 series pressure controller (e.g., MKS 651C, 652C) or equivalent OEM pressure control module. The controller drives a downstream throttle valve (e.g., MKS 253B, VAT Series 64) to maintain setpoint pressure. The heated sensor head is powered via the 15-pin D-Sub connector, which also carries the analog output and interlock signals.
Typical signal chain: Process Chamber → 626B01TBE (pressure sense) → MKS 651/652 Controller → Throttle Valve → Closed-Loop Pressure Control
Sourcing & Quality Verification
- Source: Decommissioned OEM tool pulls from certified semiconductor fab facilities
- Inspection: Each unit undergoes visual inspection, connector integrity check, and functional leak-up rate verification prior to listing
- Traceability: Original MKS serial number and date code retained for full OEM traceability
- Packaging: Anti-static bagged, foam-cushioned, and shipped in double-wall carton with process port caps installed
- Warranty: 90-day functional warranty against DOA; contact support for RMA procedures
Procurement Process
- Confirm Compatibility: Verify your tool’s P/N against 626B01TBE / 1345720-01 / 2305437-B / 713-412196-001
- Request Quote: Contact [email protected] for volume pricing, lead time, and export documentation
- Place Order: Purchase directly via Konmask.com — secure checkout, PayPal, T/T wire accepted
- Shipping: DHL / FedEx Express worldwide; EX-WORKS Xiamen available for freight forwarder arrangements
- Documentation: Commercial invoice, packing list, and certificate of conformance provided with every shipment
Technical FAQ
Q: Is this unit calibrated?
A: Units are sold as tested/functional OEM pulls. Factory NIST-traceable calibration certificates are not included. We recommend in-house zero/span verification against a reference standard upon installation.
Q: Can this replace my 626A series manometer?
A: The 626B is the successor to the 626A with improved thermal stability. Mechanical and electrical interfaces are compatible in most installations, but verify your controller firmware supports 626B output characteristics.
Q: What is the minimum order quantity?
A: Single units available. Volume discounts apply for orders of 3+ units.
Q: Do you accept returns?
A: Yes, within 14 days of receipt for unused/uninstalled units in original condition. Contact [email protected] to initiate.
Q: Can you provide an export license for restricted destinations?
A: MKS Baratron manometers are EAR99 / NLR classified for most destinations. Please confirm your end-use country for compliance review prior to order.
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