Semiconductor Vacuum Process Control Solution – MKS 727A31TGA2FB | 727A Baratron Series
The MKS 727A31TGA2FB is a high-accuracy Baratron® capacitance manometer pressure transducer engineered for demanding semiconductor fabrication, thin-film deposition, and precision vacuum process environments. With full part number 727A31TGA2FB-EX125D-INGEN2PU0-RTNGEN2PU0, this unit delivers repeatable, contamination-resistant pressure measurement across critical process chambers where process yield depends on measurement integrity.
Where This Product Is Used
- Semiconductor Wafer Fabrication (CVD / PVD / ALD / Etch) — Process chamber pressure monitoring in AMAT, Lam Research, and TEL tools
- Flat Panel Display (FPD) Manufacturing — Vacuum pressure feedback in large-area deposition systems
- Solar Cell Production — PECVD and sputtering chamber pressure control
- Pharmaceutical Freeze-Drying (Lyophilization) — Sterile-environment vacuum monitoring
- R&D Vacuum Systems — Ultra-high vacuum research chambers requiring traceable pressure references
- Gas Delivery & Mass Flow Control Systems — Upstream/downstream pressure sensing paired with MKS MFCs
- Optical Coating Systems — Evaporation and sputtering chamber pressure regulation
Technical Specifications
| Parameter | Value |
|---|---|
| Manufacturer | MKS Instruments |
| Part Number | 727A31TGA2FB-EX125D-INGEN2PU0-RTNGEN2PU0 |
| Model Series | 727A Baratron® Capacitance Manometer |
| Measurement Type | Absolute / Differential Capacitance |
| Full Scale Range | 1000 Torr (model-code dependent) |
| Accuracy | ±0.5% of reading (typical) |
| Output Signal | Analog (0–10 VDC) |
| Process Connection | Per model suffix (EX125D flange) |
| Heated Version | Yes (45°C / 100°C options available) |
| Wetted Materials | Inconel® diaphragm, 316L SS body |
| Operating Temperature | 15–50°C ambient |
| Power Supply | ±15 VDC |
| Weight | ~2.6 kg |
| Certifications | CE, RoHS |
Why Engineers Specify This Model
- Gas-independent measurement — Capacitance manometer technology reads true pressure regardless of gas species, eliminating cross-sensitivity errors common in Pirani or thermocouple gauges
- Inconel diaphragm — Superior corrosion resistance to aggressive process gases (HF, Cl₂, NF₃, WF₆)
- Heated sensor option — Prevents condensation of reactive or high-boiling-point process gases on the sensing element
- Direct OEM drop-in — Suffix codes (EX125D, INGEN2PU0, RTNGEN2PU0) match OEM tool interface specifications exactly
- Long-term zero stability — Critical for closed-loop pressure control in ALD and CVD processes where drift causes yield loss
- Wide dynamic range — Single unit covers process pressures from rough vacuum to near-atmospheric
Complete System Bill of Materials
| Component | MKS Part / Equivalent | Function |
|---|---|---|
| Pressure Transducer | MKS 727A31TGA2FB (this unit) | Process chamber pressure sensing |
| Signal Conditioner / Display | MKS PDR2000 / PR4000B | Readout and analog output conditioning |
| Mass Flow Controller | MKS 1179 / 2179 Series | Process gas flow control |
| Throttle Valve Controller | MKS 253B / 248A | Chamber pressure regulation |
| Isolation Valve | MKS 99 Series | Sensor protection during vent/pump cycles |
| Vacuum Pump | Edwards / Pfeiffer (OEM matched) | Chamber evacuation |
| Fitting / Adapter | EX125D flange adapter | Process port interface |
Compliance & Industry Standards
- CE Marking — Compliant with EU EMC and Low Voltage Directives
- RoHS — Restriction of Hazardous Substances compliant
- SEMI S2 — Environmental, Health & Safety guidelines for semiconductor manufacturing equipment
- ISO 9001 — MKS Instruments manufacturing quality management system certified
- NIST Traceable Calibration — Factory calibration traceable to national standards
Quality Assurance & Sourcing
Konmask.com sources the MKS 727A31TGA2FB through verified industrial supply channels. Every unit undergoes incoming inspection including visual examination, connector integrity check, and documentation verification. We supply:
- New original units with full MKS factory documentation
- Tested surplus / refurbished units with inspection report (clearly labeled)
- Calibration certificates available upon request
- Traceability documentation for regulated industries
All orders are packed with ESD-safe and anti-static materials. Expedited shipping available for production-critical requirements.
How to Source This Part
- Add to Cart — Click the purchase button above for in-stock units
- Request a Quote — Contact [email protected] for volume pricing, lead time, or calibration requirements
- Provide Your Tool Config — Share your OEM tool model and chamber specs for compatibility confirmation
- Expedited Fulfillment — Call +0086 19859288691 for urgent production-down situations
Application-Specific FAQ
Q: Is the 727A31TGA2FB compatible with AMAT Centura and Producer platforms?
A: Yes. The EX125D flange and INGEN2PU0/RTNGEN2PU0 interface codes are commonly specified for AMAT process modules. Confirm your tool’s wiring harness pinout before installation.
Q: Can this transducer measure corrosive gases like HF or Cl₂?
A: Yes. The Inconel® sensing diaphragm and 316L SS wetted surfaces provide excellent resistance to halogen-based process chemistries.
Q: What is the difference between the heated and unheated 727A versions?
A: Heated versions (45°C or 100°C) prevent condensation of high-boiling-point gases (e.g., TEOS, HMDS, WF₆) on the diaphragm, preserving accuracy and extending sensor life.
Q: How often should the 727A be recalibrated?
A: MKS recommends annual recalibration under normal operating conditions. High-corrosion or high-cycle applications may require more frequent intervals. Konmask can arrange NIST-traceable recalibration service.
Q: Do you supply the mating cable harness for INGEN2PU0 / RTNGEN2PU0?
A: Yes, compatible cable assemblies are available. Contact us with your tool model for the correct harness part number.
Q: What is the lead time for new OEM units?
A: Tested surplus units typically ship within 1–3 business days. New OEM units are subject to MKS factory lead times (4–16 weeks). Contact us for current availability.
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Contact: [email protected] | +0086 19859288691
