MKS 626B02TDE Baratron Capacitance Manometer – High-Accuracy Vacuum Pressure Measurement
Imagine a critical CVD or etch process chamber where pressure deviations of even a few millitorr translate into yield loss, wafer scraps, and unplanned downtime worth tens of thousands of dollars per hour. Without a reliable, temperature-controlled capacitance manometer at the heart of your pressure control loop, your process recipe is flying blind. The MKS 626B02TDE Baratron Gauge eliminates that risk — delivering absolute, gas-independent pressure measurement with the repeatability and stability that semiconductor fabs, research institutions, and advanced industrial vacuum systems demand.
The MKS 626B02TDE occupies a well-defined position within MKS Instruments’ industry-leading Baratron® 626B series — a line engineered specifically for applications where measurement accuracy, chemical compatibility, and long-term zero stability are non-negotiable. With MKS Instruments holding decades of leadership in pressure measurement and flow control for the global semiconductor equipment market, the 626B series is the de facto standard referenced in OEM equipment specifications from AMAT, Lam Research, Tokyo Electron, and ASML. The “02T” designation indicates a 2 Torr full-scale range with an integrated temperature-controlled sensor head, while “DE” specifies the electrical connector configuration — making this a precisely defined, application-matched component rather than a generic transducer.
Technical Specifications
- Model / SKU: MKS 626B02TDE
- Series: Baratron® 626B
- Measurement Type: Absolute Capacitance Manometer (gas-independent)
- Full-Scale Range: 2 Torr (2,666 Pa)
- Sensor Temperature Control: Yes — integrated heated sensor head (T-type)
- Output Signal: Analog (0–10 VDC, linear)
- Accuracy: ±0.25% of reading (typical)
- Zero Stability: ≤0.02% FS/°C
- Wetted Materials: Inconel® diaphragm, 316L SS body
- Operating Temperature: 45°C sensor head (controlled)
- Weight: 2,660 g
- Manufacturer: MKS Instruments, Inc.
Note: All specifications are sourced from MKS Instruments official documentation. Konmask.com does not modify or fabricate technical parameters.
Key Features & Benefits
- Gas-Independent Measurement: Capacitance sensing technology measures true pressure regardless of gas species — critical for multi-gas process chambers.
- Temperature-Controlled Sensor Head: Eliminates thermal drift and condensation of process gases on the sensing diaphragm, ensuring long-term zero stability.
- 2 Torr Full-Scale Range: Optimized for low-pressure process steps including ALD, PECVD, and low-pressure etch where fine pressure resolution is essential.
- High Accuracy & Repeatability: ±0.25% of reading accuracy supports tight process windows and recipe reproducibility across tool fleets.
- Inconel® Diaphragm: Superior corrosion resistance against aggressive process chemistries including halogen-based etch gases (Cl₂, HBr, NF₃).
- Direct OEM Replacement: Designed as a drop-in replacement for existing 626B-series installations — minimizing retrofit engineering effort.
- Analog Output Compatibility: 0–10 VDC output integrates directly with standard MFC controllers, PLCs, and process control systems.
Industry & Equipment Applications
- Semiconductor Fabrication: CVD, PECVD, ALD, PVD, dry etch, and ion implant chambers requiring precise low-pressure control.
- Flat Panel Display (FPD) Manufacturing: Large-area deposition systems with stringent pressure uniformity requirements.
- Solar Cell Production: PECVD and sputtering tools for thin-film photovoltaic manufacturing.
- Research & Development: University and national laboratory vacuum systems, surface science instruments, and mass spectrometry.
- Industrial Vacuum Coating: Optical coating, hard coating, and decorative PVD systems.
- Pharmaceutical & Chemical Processing: Vacuum distillation and drying applications requiring accurate absolute pressure measurement.
System Integration & Compatible Parts
The MKS 626B02TDE is designed to integrate seamlessly within MKS Instruments’ broader pressure measurement and control ecosystem. Compatible and commonly paired components include:
- MKS 651C / 653B Pressure Controllers: Direct analog input compatibility for closed-loop pressure control.
- MKS 250E / 252E Exhaust Valve Controllers: Paired for downstream pressure regulation.
- MKS Type 1179 / 2179 Mass Flow Controllers: Integrated process gas flow and pressure management.
- MKS PR4000B Power Supply / Readout: Dedicated readout and power supply for Baratron transducers.
- Replacement Cables & Connectors: DE-series mating connectors and signal cables available — contact Konmask.com for part numbers.
Our Quality Assurance Process
- Source Verification: Units sourced exclusively from authorized distributors, certified refurbishers, or decommissioned OEM equipment with documented service history.
- Visual & Mechanical Inspection: Full inspection of connector integrity, process fitting condition, sensor head housing, and serial number verification.
- Functional Testing: Where applicable, units are powered and output signal verified against known reference pressure.
- Packaging: Anti-static packaging with desiccant, foam cushioning, and sealed process port protection for safe international transit.
- Documentation: Certificate of conformance and inspection report provided upon request.
How to Order
- Submit an inquiry via the Get a Quote button or email support@konmask.com.
- Provide your required quantity, delivery timeline, and destination country.
- Our technical team will confirm availability, lead time, and pricing within 24 business hours.
- Upon agreement, we issue a proforma invoice and arrange secure payment.
- Units are shipped with full tracking via DHL, FedEx, or UPS Express — with export documentation included.
Why Choose Konmask.com?
- Industrial Automation Specialists: We focus exclusively on industrial control and automation components.
- Global B2B Supply: Serving semiconductor equipment engineers, MRO procurement teams, and system integrators across North America, Europe, Southeast Asia, and the Middle East.
- Fast Response: Dedicated technical sales team responds to all inquiries within 24 hours.
- Competitive Pricing: Direct sourcing relationships enable competitive pricing on both single units and volume orders.
- Reliable Logistics: Experienced in export compliance, customs documentation, and international freight for industrial components.
- Long-Tail Inventory: We specialize in hard-to-find, obsolete, and end-of-life automation parts that OEM channels no longer stock.
Frequently Asked Questions
Q: What does “02T” mean in the MKS 626B02TDE part number?
A: “02” indicates a 2 Torr full-scale measurement range. “T” designates the integrated temperature-controlled (heated) sensor head option, which prevents process gas condensation and improves zero stability.
Q: What does the “DE” suffix specify?
A: “DE” refers to the electrical connector configuration. Please refer to the MKS Instruments 626B series datasheet or contact our team to confirm connector pinout compatibility with your existing installation.
Q: Is the MKS 626B02TDE an absolute or differential pressure gauge?
A: It is an absolute pressure transducer — it measures pressure relative to a sealed internal reference vacuum, not relative to atmospheric pressure. This makes it ideal for vacuum process applications.
Q: Can this gauge measure corrosive process gases?
A: Yes. The Inconel® sensing diaphragm and 316L stainless steel wetted surfaces provide excellent resistance to halogen-based etch chemistries including Cl₂, HBr, SF₆, and NF₃.
Q: What is the typical lead time?
A: In-stock units typically ship within 3–5 business days. For units requiring sourcing, lead time is 2–4 weeks. Contact us for real-time availability.
Q: Can Konmask.com supply other MKS Baratron models?
A: Yes — we supply a wide range of MKS Instruments Baratron gauges across the 626, 627, 628, 629, and 631 series. Contact us with your specific part number.
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