MKS 626A13TBE Baratron Capacitance Manometer – High-Accuracy Vacuum Pressure Measurement | MKS Instruments 626A Series
Engineering Background: The MKS Baratron® capacitance manometer is the global benchmark for absolute pressure measurement in vacuum and process environments. Developed by MKS Instruments — a pioneer in pressure measurement since 1961 — the 626A Series delivers temperature-compensated, gas-independent measurement that process engineers rely on for repeatable, contamination-free results in the most demanding semiconductor and industrial applications.
Product Positioning: The MKS 626A13TBE is a full-range capacitance manometer transducer engineered for integration into vacuum process chambers, gas delivery manifolds, and critical pressure-control loops. Its all-metal sensor construction and Inconel® diaphragm make it the preferred choice for corrosive-gas and high-purity process environments where polymer-based sensors are unsuitable.
Complete Technical Specifications
| Parameter | Specification |
|---|---|
| Model / SKU | 626A13TBE |
| Manufacturer | MKS Instruments, Inc. |
| Series | Baratron® 626A |
| Sensor Type | Capacitance Manometer (Absolute) |
| Full Scale Range | 1 Torr (model-dependent; verify datasheet for 626A13TBE) |
| Accuracy | ±0.5% of reading (typical) |
| Zero Stability | <0.02% FS / °C |
| Repeatability | ±0.1% of reading |
| Operating Temperature | 45°C (heated sensor head, standard) |
| Diaphragm Material | Inconel® alloy |
| Wetted Materials | Inconel®, 316L SS, Al₂O₃ ceramic |
| Process Connection | VCR® / ConFlat® (verify suffix) |
| Output Signal | 0–10 VDC (linear) |
| Power Supply | ±15 VDC (±5%) |
| Connector | 15-pin D-sub (standard MKS) |
| Weight | ~2.66 kg |
| Country of Origin | United States |
| Compliance | CE, RoHS |
Note: Always cross-reference the MKS 626A13TBE datasheet for the exact full-scale range and fitting configuration encoded in the part number suffix.
Proven Application Environments
- Semiconductor Fabrication: CVD, PVD, ALD, etch, and ion implant chambers requiring sub-Torr process pressure control
- Flat Panel Display (FPD) Manufacturing: Large-area deposition systems with stringent pressure uniformity requirements
- Solar Cell Production: PECVD and sputtering tools for thin-film photovoltaic processes
- Pharmaceutical & Biotech: Lyophilization (freeze-drying) chamber pressure monitoring
- Research & Metrology: Ultra-high vacuum (UHV) systems, mass spectrometry, and surface science instruments
- Industrial Process Control: Gas blending, leak detection, and vacuum furnace applications
Engineering Advantages
- Gas-Independent Measurement: Capacitance sensing is insensitive to gas composition — no correction factors required for mixed or exotic process gases
- Heated Sensor Head: Integrated heater maintains sensor at 45°C to prevent condensation of reactive or corrosive process gases
- High Corrosion Resistance: All-Inconel® diaphragm withstands aggressive chemistries including HF, Cl₂, NF₃, and HBr
- Long-Term Zero Stability: Thermally compensated design minimizes zero drift over extended operating periods
- Direct Drop-In Replacement: Compatible with standard MKS 626 Series mounting and wiring — no controller reconfiguration required
- Wide Dynamic Range: Accurate measurement from full scale down to 0.1% FS without range switching
System Architecture & Signal Flow
The 626A13TBE integrates directly into MKS-compatible pressure control loops:
- Sensor → Controller: 0–10 VDC analog output connects to MKS 600 Series, 651, or 252 flow/pressure controllers, or any 0–10 V analog input card
- Power: Requires ±15 VDC regulated supply; compatible with MKS PDR-C-1C power/display units
- Grounding: Single-point chassis ground via D-sub shell; shield drain to signal ground at controller end
- Thermal Stabilization: Allow 30–60 minutes warm-up after power-on for rated accuracy; heated models reach setpoint within 15 minutes
- Zero Procedure: Zero at base pressure (<10⁻⁴ Torr) using controller zero function before process start
Sourcing & Quality Verification
- All units sourced from verified MKS Instruments authorized channels or certified refurbishment partners
- Each unit undergoes incoming inspection: visual, connector integrity, and functional output verification
- Calibration certificates and original MKS documentation available upon request
- Serialized traceability — provide your serial number for full provenance history
- Units shipped with ESD-safe packaging and nitrogen purge where applicable
Procurement Process
- Confirm Part Number: Verify 626A13TBE matches your required full-scale range and fitting type from your existing BOM or MKS datasheet
- Request Quote: Contact [email protected] for volume pricing, lead time, and availability confirmation
- Place Order: Purchase directly via this listing or via PO — net terms available for qualified accounts
- Receive & Inspect: Inspect upon receipt; report any discrepancies within 48 hours
- Install & Commission: Follow MKS installation guide; contact our technical team for integration support
Technical FAQ
Q: Is the 626A13TBE compatible with my existing MKS 651 controller?
A: Yes. The 0–10 VDC output and ±15 VDC power requirement are fully compatible with the MKS 651 and most 600-series controllers.
Q: What is the full-scale pressure range of the 626A13TBE?
A: The suffix “1” in the MKS 626A part number typically denotes a 1 Torr full-scale range. Confirm against your MKS datasheet or contact us to verify.
Q: Can this transducer measure corrosive gases like Cl₂ or HF?
A: Yes. The Inconel® diaphragm and all-metal wetted path make the 626A13TBE suitable for most corrosive process gases used in semiconductor fabrication.
Q: Do you offer calibration services?
A: We can provide units with current calibration certificates. Third-party NIST-traceable calibration is available upon request.
Q: What is the lead time?
A: In-stock units ship within 1–3 business days. Contact us for current availability.
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