MKS 627BX01MDC4B – High-Accuracy Absolute Pressure Transducer | 627B Capacitance Manometer Series
Engineering Background: The MKS 627B Series is a temperature-controlled capacitance manometer engineered for absolute pressure measurement in demanding semiconductor fabrication, thin-film deposition, and industrial vacuum processes. The 627BX01MDC4B variant is configured for a 1 Torr full-scale range, delivering the sub-0.1% accuracy and long-term stability required for critical process control loops.
Product Positioning: Designed as a primary process sensor in CVD, PVD, etch, and diffusion furnace systems, the 627BX01MDC4B integrates directly with MKS Type 247, 651, and 252 flow/pressure controllers. Its all-metal wetted surfaces and Inconel diaphragm make it the preferred choice for corrosive and reactive gas environments where polymer-based sensors fail.
Complete Technical Specifications
| Part Number / SKU | 627BX01MDC4B |
| Manufacturer | MKS Instruments |
| Series | 627B Capacitance Manometer |
| Measurement Type | Absolute Pressure |
| Full Scale Range | 1 Torr (1.333 mbar / 133.3 Pa) |
| Accuracy | ±0.25% of reading (±0.12% optional) |
| Repeatability | ±0.05% of full scale |
| Zero Stability | ±0.01% FS / °C |
| Sensor Type | Capacitance diaphragm (temperature-controlled) |
| Diaphragm Material | Inconel alloy |
| Wetted Materials | Inconel, 316L SS, Al₂O₃ |
| Operating Temperature | 45°C sensor head (controlled) |
| Output Signal | 0–10 VDC (linear) |
| Power Supply | ±15 VDC @ 200 mA |
| Process Connection | 1.33″ OD Conflat (CF) Flange |
| Electrical Connector | 15-pin D-sub (MDC4B configuration) |
| Minimum Detectable Pressure | 1 × 10⁻⁴ Torr |
| Overpressure Limit | 15 psig |
| Weight | ~2.13 kg |
| Certifications | CE, RoHS compliant |
Proven Application Environments
- Semiconductor Fab: CVD, LPCVD, PECVD, ALD chamber pressure control (1–1000 mTorr range)
- Etch Systems: RIE and ICP etch process pressure monitoring with corrosive halogen gases (Cl₂, HBr, NF₃)
- PVD / Sputtering: Argon backfill and process pressure stabilization
- Diffusion Furnaces: Atmospheric and sub-atmospheric oxidation/nitridation processes
- Flat Panel Display (FPD): Large-area deposition chamber pressure regulation
- Research Vacuum Systems: UHV-compatible absolute reference measurement
- Industrial Leak Testing: Precision differential and absolute leak-rate measurement
Engineering Advantages
- Temperature-Controlled Sensor Head: Eliminates zero drift caused by ambient temperature fluctuations — critical for 24/7 fab environments
- Inconel Diaphragm: Superior corrosion resistance vs. Hastelloy C-276 alternatives in halogen-rich processes
- Wide Dynamic Range: Measures from 1 × 10⁻⁴ Torr to 1 Torr with a single sensor — no range switching required
- Direct MKS Ecosystem Compatibility: Plug-and-play with MKS 651, 252, 248, and 247 controllers via standard 15-pin interface
- Long Calibration Interval: Stable zero and span over 12+ months under normal operating conditions
- Low Outgassing: All-metal construction minimizes contamination risk in clean process environments
System Architecture & Signal Flow
The 627BX01MDC4B operates as a two-terminal absolute pressure reference within a closed-loop pressure control architecture:
- Process Chamber → Gas inlet via CF flange connection to sensor
- Sensor Head (45°C controlled) → Capacitance bridge detects diaphragm deflection proportional to absolute pressure
- Internal Signal Conditioning → Converts capacitance delta to 0–10 VDC linear output
- Controller Input (MKS 651/252) → Compares setpoint vs. measured pressure, drives throttle valve or MFC
- Feedback Loop → Maintains process pressure within ±0.25% of setpoint
Compatible valve interfaces: MKS 253, 248A, VAT Series 64/65 throttle valves. Compatible MFC interfaces: MKS 1179, 2179, 1259 series.
Sourcing & Quality Verification
- Origin: Genuine MKS Instruments product, USA-manufactured
- Condition: Surplus / refurbished units available — each unit undergoes full functional test and calibration verification prior to shipment
- Traceability: Serial number and calibration date documented; NIST-traceable calibration certificate available upon request
- Packaging: ESD-safe anti-static bag, foam-lined export carton; suitable for international air freight
- Lead Time: In-stock units ship within 3–5 business days; contact us for volume availability
Procurement Process
- Confirm part number 627BX01MDC4B matches your system’s connector and range requirements
- Submit RFQ or place order directly via Konmask.com
- Receive order confirmation with serial number and calibration certificate within 24 hours
- Shipment via DHL / FedEx with full tracking; export documentation (CO, packing list, commercial invoice) included
- Post-delivery technical support available via email or WhatsApp
Technical FAQ
Q: What is the difference between 627BX01MDC4B and 627BX01MDC4A?
A: The suffix “B” vs. “A” denotes the connector revision. The MDC4B uses an updated 15-pin D-sub pinout compatible with MKS controllers manufactured after 2010. Verify your controller’s cable harness before ordering.
Q: Can this sensor measure gauge pressure?
A: No. The 627B series measures absolute pressure only (referenced to internal vacuum reference). For gauge pressure applications, consider the MKS 628B series.
Q: Is the 627BX01MDC4B compatible with corrosive gases?
A: Yes. The Inconel diaphragm and all-metal wetted path provide excellent resistance to Cl₂, HBr, NF₃, and other halogen-based process gases. Avoid exposure to HF vapor.
Q: What warm-up time is required?
A: Allow 30–60 minutes for the sensor head to reach thermal equilibrium at 45°C before taking critical measurements. Zero offset may drift ±0.05% FS during warm-up.
Q: Can I recalibrate this unit in the field?
A: Zero adjustment is accessible via the front panel potentiometer. Full span calibration requires a reference vacuum standard and is recommended to be performed by a qualified metrology lab or returned to MKS/Konmask for recalibration service.
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