MKS 624A12TBC – Baratron® Capacitance Manometer | 100 Pa Full-Scale Pressure Transducer
Engineering Background
The MKS Baratron® 600 Series capacitance manometer is the global reference standard for absolute, gas-independent pressure measurement in semiconductor process chambers, thin-film deposition systems, and high-vacuum research environments. Developed by MKS Instruments — the originator of the capacitance manometer technology — the 600 Series has accumulated decades of field validation across CVD, PVD, etch, and ion implant platforms.
Product Positioning
The 624A12TBC (P/N KK5002C) is a 100 Pa (133.32 Torr) full-scale, temperature-controlled capacitance manometer designed for process-critical pressure monitoring where accuracy, repeatability, and gas-species independence are non-negotiable. Associated reference numbers: 1900K1-1018 / 92-005649-0X / CENTON CPCB-00401 / 20-005650-02.
Complete Technical Specifications
- Manufacturer: MKS Instruments, Inc.
- Model / SKU: 624A12TBC
- Series: Baratron® 600 Series
- Measurement Type: Absolute capacitance manometer
- Full-Scale Range: 100 Pa / 133.32 Torr
- Sensing Element: Inconel® tensioned diaphragm, capacitance bridge
- Gas Independence: Yes — reading is independent of gas species
- Accuracy: ±0.5% of reading (typical, per MKS 600 Series datasheet)
- Repeatability: ±0.1% of reading
- Temperature Control: Heated sensor head (45 °C standard)
- Output Signal: 0–10 VDC analog (linear)
- Power Supply: ±15 VDC (via MKS PDR-C or compatible controller)
- Process Connection: KF-16 (NW16) flange
- Wetted Materials: Inconel®, 316L SS, Al₂O₃ ceramic
- Compatible Controllers: MKS PDR-C-2C, 670 Signal Conditioner, 937A
- Associated P/Ns: KK5002C · 1900K1-1018 · 92-005649-0X · CENTON CPCB-00401 · 20-005650-02
- Weight: ~20 g (sensor head)
- RoHS Compliance: Verify with MKS certificate of conformance
Proven Application Environments
- PECVD / LPCVD / ALD thin-film deposition chambers
- Reactive ion etch (RIE) and deep silicon etch (DRIE) systems
- Ion implant beamline pressure control
- Sputtering and physical vapor deposition (PVD)
- Semiconductor fab process tool retrofits and spare-parts programs
- High-vacuum research and analytical instrumentation
- Flat-panel display (FPD) manufacturing equipment
Engineering Advantages
- Gas-species independent: No correction factor required for N₂, Ar, O₂, H₂, or process gases
- Heated sensor head: Eliminates condensation errors in reactive-gas environments
- High signal-to-noise ratio: Capacitance bridge design rejects EMI common in RF plasma chambers
- Drop-in replacement: KF-16 flange and 0–10 V output maintain backward compatibility with legacy tool wiring
- Long diaphragm life: Inconel® construction resists corrosive process chemistries (HF, Cl₂, NF₃)
- Traceable calibration: Factory-calibrated against NIST-traceable primary standards
System Architecture & Signal Flow
The 624A12TBC integrates into a standard MKS pressure-control loop as follows:
- Sensor → Controller: 0–10 VDC analog signal to MKS PDR-C or 670 conditioner
- Controller → Valve: 0–10 VDC or RS-232/485 setpoint to MKS 248/653 throttle valve
- Heater power: Supplied via dedicated heater pins on the 15-pin D-sub connector
- Ground reference: Chassis ground tied to process tool frame — verify isolation before installation
- Warm-up time: Allow ≥30 min after power-on before process-critical measurements
Sourcing & Quality Verification
- Units sourced from decommissioned semiconductor fab equipment or authorized surplus channels
- Each unit inspected for diaphragm integrity, connector condition, and heater continuity
- Functional test report available upon request
- Original MKS calibration certificate or third-party recalibration documentation provided where available
- Packaging: ESD-safe bag + foam-lined shipping box
Procurement Process
- Step 1: Confirm full-scale range (100 Pa) and connector type match your tool’s wiring harness
- Step 2: Submit PO or inquiry to [email protected] with your ship-to address and required lead time
- Step 3: Receive proforma invoice with unit price, shipping cost, and estimated delivery
- Step 4: Payment via T/T bank transfer or approved credit terms
- Step 5: Shipment with tracking number and packing list within 1–3 business days of payment confirmation
Technical FAQ
Q: Is the 624A12TBC interchangeable with the 627B or 628B series?
A: Mechanically yes (KF-16 flange), but the 624 series uses a different signal conditioner pinout. Verify controller compatibility before substitution.
Q: Can this unit be recalibrated?
A: Yes. MKS Instruments and several third-party metrology labs offer recalibration services traceable to NIST standards. Contact us for referrals.
Q: What is the minimum detectable pressure?
A: Typically 0.01% of full scale = 0.01 Pa for the 100 Pa range head.
Q: Does the heater need a separate power supply?
A: The heater is powered through the same D-sub connector as the signal. The MKS PDR-C controller supplies both signal power and heater power from a single cable.
Q: What is the lead time for this part?
A: In-stock units ship within 1–3 business days. Contact us to confirm current availability.
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