MKS Type 626 Baratron Capacitance Manometer 626B13TBE – High-Accuracy Absolute Pressure Measurement | MKS Instruments Baratron Series
Engineering Background
The MKS Type 626 Baratron is a temperature-controlled capacitance manometer engineered for absolute pressure measurement in demanding vacuum and process environments. Built on MKS Instruments’ decades of precision sensor technology, the Type 626 platform is the industry benchmark for gas-independent, repeatable pressure measurement in semiconductor fabrication, thin-film deposition, and high-purity process control systems.
Product Positioning
The 626B13TBE variant is configured for a 133.32 kPa (1000 Torr) full-scale range with a 1/4″ VCR female process connection and a 15-pin D-sub electrical interface. Cross-reference part numbers 16383-01, 16384-01, and 0040-36913 confirm OEM compatibility across Applied Materials, Lam Research, and TEL process tool platforms. This unit is sourced, inspected, and verified by Konmask.com for procurement engineers requiring traceable, drop-in replacement components.
Complete Technical Specifications
| Manufacturer | MKS Instruments, Inc. |
| Series / Platform | Baratron® Type 626 |
| Model / Part Number | 626B13TBE |
| Cross-Reference P/N | 16383-01 / 16384-01 / 0040-36913 |
| Measurement Type | Absolute Pressure (gas-independent) |
| Full-Scale Range | 133.32 kPa (1000 Torr / 1 atm) |
| Sensing Technology | Capacitance diaphragm (Inconel® sensing element) |
| Accuracy | ±0.5% of reading (typical) |
| Temperature Control | 45 °C heated body (standard) |
| Process Connection | 1/4″ VCR® Female |
| Electrical Connector | 15-pin D-sub (DB-15) |
| Output Signal | 0–10 VDC linear analog |
| Supply Voltage | ±15 VDC (±5%) |
| Wetted Materials | Inconel®, 316L SS, Al₂O₃ ceramic |
| HS Code | 9026.20 (Instruments for measuring pressure) |
| Country of Origin | United States |
Proven Application Environments
- Semiconductor CVD / PVD / Etch — Absolute pressure control in process chambers (Applied Materials, Lam Research, TEL, AMAT)
- Thin-Film Deposition — Sputtering and ALD systems requiring gas-independent measurement
- Vacuum Furnaces & Heat Treatment — High-temperature process monitoring up to atmospheric range
- Pharmaceutical & Lyophilization — Sterile process pressure verification
- Research & Metrology Labs — Calibration reference and secondary standard applications
- Industrial Gas Distribution — Manifold pressure monitoring in high-purity gas panels
Engineering Advantages
- Gas-Independent Measurement — Capacitance sensing technology eliminates gas-type correction factors, ensuring accuracy regardless of process gas composition
- Heated Body Design — 45 °C temperature-controlled sensor body prevents condensation and ensures stable zero-point calibration in humid or reactive gas environments
- Wide Dynamic Range — 133.32 kPa full scale with sub-mTorr resolution at the low end, covering rough vacuum through atmospheric pressure in a single instrument
- OEM Drop-In Compatibility — Verified cross-reference to P/N 16383-01, 16384-01, 0040-36913 for direct replacement without process re-qualification
- Robust Wetted Materials — Inconel® diaphragm and 316L SS body resist corrosive process gases (HF, Cl₂, NF₃) and aggressive cleaning cycles
- Industry-Standard Interface — 0–10 VDC analog output and DB-15 connector integrate directly with MKS 247, 651, 252, and third-party MFC/pressure controllers
System Architecture & Signal Flow
The Type 626 operates as a standalone absolute pressure transducer within a closed-loop pressure control architecture:
- Process Chamber → 1/4″ VCR process connection → Type 626 sensing diaphragm
- Capacitance Bridge → Internal signal conditioning electronics → 0–10 VDC linear output
- DB-15 Cable → MKS 651/252 Pressure Controller or PLC analog input card
- Controller Output → Throttle valve or MFC → Closed-loop pressure regulation
The heated body circuit draws power from the ±15 VDC supply and maintains sensor temperature independently of ambient conditions, ensuring measurement stability during chamber bake-out and process transitions.
Sourcing & Quality Verification
- Source: Genuine MKS Instruments OEM component — not aftermarket or remanufactured
- Inspection: Each unit undergoes visual inspection, connector integrity check, and cross-reference P/N verification prior to shipment
- Traceability: Original MKS date codes and serial numbers preserved; no relabeling
- Packaging: ESD-safe anti-static bag, foam-lined carton, with desiccant for moisture-sensitive shipments
- Warranty: 90-day Konmask.com functional warranty; MKS factory warranty terms apply to new-in-box units
Procurement Process
- Confirm Compatibility — Verify your tool’s P/N against 626B13TBE, 16383-01, 16384-01, or 0040-36913
- Request Quote — Contact [email protected] with quantity, delivery timeline, and destination port
- Order Confirmation — Purchase order accepted via email; proforma invoice issued within 24 hours
- Shipment — DHL Express / FedEx International Priority; typical lead time 3–7 business days ex-stock
- Documentation — Commercial invoice, packing list, and HS 9026.20 export declaration provided
Technical FAQ
Q: Is the 626B13TBE a direct replacement for P/N 0040-36913 on Applied Materials tools?
A: Yes. The 0040-36913 is an AMAT-specific procurement number for the MKS 626B13TBE. Mechanical, electrical, and performance specifications are identical.
Q: What is the difference between 16383-01 and 16384-01?
A: These are sequential revision suffixes used by OEM tool builders for BOM tracking. Both reference the same 626B13TBE sensor with no functional difference.
Q: Can this manometer measure gauge pressure?
A: No. The Type 626 is an absolute pressure sensor referenced to internal vacuum. It cannot be configured for gauge measurement.
Q: What controller is compatible with the 0–10 VDC output?
A: The output is compatible with MKS 651C, 252E, 247D, and any PLC/DCS analog input card accepting 0–10 VDC signals with ≥10 kΩ input impedance.
Q: Is calibration certification available?
A: NIST-traceable calibration certificates can be arranged upon request for an additional fee. Please specify at time of order.
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