MKS 627B-15789 – High-Accuracy Capacitance Manometer Pressure Transducer | Baratron Series
Engineering Background: The MKS Baratron® 627B series represents the gold standard in capacitance manometry for semiconductor fabrication, thin-film deposition, and high-vacuum process environments. Designed to deliver absolute, gas-independent pressure measurement, the 627B eliminates cross-sensitivity errors inherent in thermal or ionization gauges — a critical requirement for process repeatability in sub-atmospheric applications.
Product Positioning: The MKS 627B-15789 is a full-scale range capacitance manometer configured for precision vacuum and low-pressure measurement. It is the preferred choice of process engineers specifying instruments for CVD, PVD, etch, and ALD chambers where measurement uncertainty directly impacts yield. Sourced and verified by Konmask.com for B2B procurement teams requiring traceable, OEM-grade components.
Complete Technical Specifications
- Manufacturer: MKS Instruments
- Part Number / SKU: 627B-15789
- Series: Baratron® 627B
- Instrument Type: Capacitance Manometer (Absolute Pressure Transducer)
- Measurement Principle: Temperature-controlled capacitance sensing — gas-species independent
- Pressure Range: Per 627B-15789 configuration (contact Konmask for full datasheet)
- Accuracy: ±0.25% of reading (typical Baratron 627B class)
- Output Signal: 0–10 VDC analog (standard); compatible with MKS Type 270, 670, PR4000 readout systems
- Diaphragm Material: Inconel® alloy — corrosion-resistant for aggressive process gases
- Sensor Head Temperature: 45°C controlled (standard) — eliminates condensation errors
- Process Connection: Conflat® (CF) or VCR® fitting (per configuration)
- Electrical Connector: 15-pin D-sub (standard MKS interface)
- Operating Temperature: 15°C to 50°C (ambient)
- Weight: Approx. 2,640 g
- Certifications: CE marked; RoHS compliant
Proven Application Environments
- Semiconductor Fab (CVD / ALD / Etch): Absolute pressure feedback for mass flow controller (MFC) loops and chamber pressure setpoint control — where ±1 mTorr drift causes recipe failure
- Thin-Film PVD / Sputtering: Base pressure verification and process pressure stabilization in magnetron sputtering systems
- Flat Panel Display (FPD) Manufacturing: Large-area PECVD chamber pressure uniformity monitoring
- Pharmaceutical Freeze-Drying (Lyophilization): Precise chamber pressure control during primary and secondary drying cycles
- Research Vacuum Systems: UHV-adjacent measurement in molecular beam epitaxy (MBE) and surface science instruments
- Industrial Leak Testing: Differential and absolute pressure decay testing on hermetic assemblies
Engineering Advantages
- Gas-Independent Measurement: Capacitance sensing responds to true molecular pressure — no correction factors for N₂, Ar, H₂, or process gas mixtures
- Thermally Stabilized Sensor Head: 45°C controlled diaphragm eliminates zero drift from ambient temperature fluctuations — critical for 24/7 fab operation
- High Corrosion Resistance: Inconel diaphragm withstands HF, Cl₂, NF₃, and other aggressive etch chemistries
- Long-Term Zero Stability: <0.02% FS/year drift — reduces recalibration frequency and downtime
- Direct MKS Ecosystem Compatibility: Plug-and-play with MKS 246, 647C, 250E, and PR4000B multi-channel controllers
- Wide Dynamic Range: Single transducer covers multiple process pressure setpoints without range switching
System Architecture & Signal Flow
In a typical semiconductor process chamber, the 627B-15789 mounts directly on the chamber body via CF flange. The 0–10 VDC output feeds into an MKS 647C or equivalent multi-channel pressure/flow controller. The controller compares the transducer signal against the process recipe setpoint and modulates the throttle valve (e.g., MKS 253 or VAT series) to maintain target pressure. A secondary 627B may be installed on the foreline for base pressure verification. The Baratron’s gas-independent output ensures that switching between process gases (e.g., SiH₄ to N₂O) does not introduce pressure measurement offsets — a common failure mode with thermal conductivity gauges.
Sourcing & Quality Verification
- Source: Konmask.com — specialist distributor of industrial automation and process control instrumentation
- Condition: New OEM / Refurbished OEM (clearly stated per order confirmation)
- Traceability: Each unit ships with original MKS part label, serial number, and available calibration certificate
- Inspection: Pre-shipment functional check — zero offset, span verification, connector integrity
- Packaging: Anti-static, nitrogen-purged packaging for vacuum-sensitive components
- Lead Time: Typically 3–10 business days; expedited options available
Procurement Process
- Submit RFQ via support@konmask.com with your required quantity and delivery timeline
- Receive formal quotation with unit price, lead time, and shipping terms (EXW / DDP available)
- Confirm PO — we accept T/T wire transfer, PayPal, and major credit cards
- Shipment with full documentation: commercial invoice, packing list, COO, and calibration cert (if applicable)
- Post-delivery technical support available via email or WhatsApp: +0086 19859288691
Technical FAQ
Q: Is the 627B-15789 an absolute or gauge pressure transducer?
A: Absolute. The Baratron 627B measures pressure relative to a sealed internal reference vacuum — it does not require a reference port to atmosphere.
Q: Can this transducer measure corrosive gases like Cl₂ or HF?
A: Yes. The Inconel diaphragm and all-metal wetted surfaces make the 627B-15789 compatible with most halogen-based process gases. Consult MKS chemical compatibility data for specific gas mixtures.
Q: What readout/controller is compatible with this unit?
A: The 627B-15789 outputs a standard 0–10 VDC signal compatible with MKS Type 270, 670, PR4000B, 247C, and 647C controllers, as well as any 0–10 V analog input DAQ system.
Q: How often does the 627B need recalibration?
A: MKS recommends annual calibration under normal operating conditions. The 627B’s inherent zero stability (<0.02% FS/year) means many users extend intervals to 18–24 months in stable environments.
Q: Do you provide a calibration certificate?
A: Yes, where available. Please specify your calibration documentation requirement at the time of RFQ.
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Original Source: https://Konmask.com
Contact: support@konmask.com | +0086 19859288691
