MKS CDN500R-10 (0190-37771) Interlock Module | Replacement, Equivalent & Selection Guide
The MKS CDN500R-10 (OEM P/N: 0190-37771) is an industrial-grade Interlock Module manufactured by MKS Instruments, widely deployed in semiconductor process equipment, vacuum systems, and precision gas delivery platforms. This page provides full technical specifications, verified compatible replacements, system compatibility data, and a structured selection guide to help engineers and procurement teams source the right part with confidence.
Technical Specifications
| Parameter | Value |
|---|---|
| Manufacturer | MKS Instruments |
| Model Number | CDN500R-10 |
| OEM Part Number | 0190-37771 |
| Module Type | Interlock Module |
| Function | Safety interlock signal conditioning & relay control |
| Weight | 200 g |
| Condition Available | New OEM / Refurbished / Tested Used |
| Lead Time | In stock / 3–10 business days (subject to availability) |
Additional electrical parameters (voltage, current rating, I/O configuration) available upon request. Contact our technical team for full datasheet.
Compatible Replacement & Equivalent Models
When the original MKS CDN500R-10 is unavailable or cost-prohibitive, the following alternatives may be evaluated as functional equivalents. Always verify electrical and mechanical compatibility before installation.
- MKS CDN500R series variants – Same platform, verify suffix for relay configuration differences
- MKS 0190-xxxxx interlock family – Cross-reference OEM P/N for direct drop-in candidates
- Third-party interlock relay modules – Must match signal voltage, contact rating, and form factor; consult OEM documentation
- Refurbished MKS CDN500R-10 – Tested and certified units available through Konmask; functionally equivalent to new
Note: Konmask engineers can assist with cross-reference validation. Submit your system model and current P/N for a compatibility assessment.
Why Choose the Original Model
- OEM-certified performance – Designed and validated by MKS Instruments for precise interlock signal integrity
- Drop-in replacement – Identical mechanical footprint and connector pinout; no system modification required
- Proven reliability – Field-tested in high-uptime semiconductor fab environments
- Warranty & traceability – New OEM units include manufacturer warranty and full lot traceability
- Reduced qualification risk – Eliminates re-validation effort required for third-party substitutes in regulated processes
Typical Applications
- Semiconductor CVD, PVD, and etch process chambers
- Vacuum system safety interlock circuits
- Precision gas delivery and flow control panels
- MKS pressure and flow controller integration racks
- Industrial automation safety relay systems requiring certified interlock modules
System Compatibility
The MKS CDN500R-10 is commonly integrated with the following platforms. Confirm your system revision before ordering:
- MKS Type 247 / 248 Multi-Channel Power Supply Systems
- MKS PR4000 / PR4000B Flow Ratio Controllers
- Applied Materials (AMAT) process tool interlock racks – verify sub-fab wiring harness compatibility
- Lam Research chamber interlock assemblies – confirm connector variant (CDN500R-10 vs. CDN500R-10A)
- Custom OEM interlock panels – consult wiring diagram; standard DIN-rail or panel-mount configurations supported
Selection Guide
Use the following decision framework to select the correct interlock module for your application:
- Step 1 – Confirm OEM P/N: Locate the part number on the module label or system BOM. CDN500R-10 = P/N 0190-37771.
- Step 2 – Assess condition requirement: New OEM for critical process tools; certified refurbished for non-critical or backup inventory.
- Step 3 – Verify system revision: Some tool generations require suffix variants (e.g., -10A, -10B). Check your system’s service manual.
- Step 4 – Evaluate lead time vs. cost: In-stock units ship within 1–3 days; new OEM orders may require 3–10 business days.
- Step 5 – Request cross-reference if unsure: Submit your system model and current P/N to [email protected] for a free compatibility check.
Quality Assurance & Sourcing
- All units sourced through authorized distribution channels or directly from MKS Instruments
- Refurbished units undergo full functional test, cleaning, and inspection prior to shipment
- Serialized traceability records maintained for all inventory
- Packaging: ESD-safe anti-static bag + foam-lined carton; export-compliant labeling
- Export compliance: HS Code classification available upon request for customs documentation
How to Order
- Online: Add to cart directly on this page — select condition (New / Refurbished) if variants are available
- Email RFQ: Send P/N, quantity, required condition, and delivery timeline to [email protected]
- Phone / WhatsApp: +0086 19859288691 — available Mon–Fri, 09:00–18:00 CST
- Bulk / OEM orders: Volume pricing and blanket PO arrangements available; contact us for a formal quotation
- Lead time: In-stock units ship within 1–3 business days; standard lead time 3–10 business days
Replacement & Compatibility FAQ
Q: Is the MKS CDN500R-10 a direct replacement for 0190-37771?
A: Yes. CDN500R-10 is the model designation; 0190-37771 is the MKS OEM part number for the same unit.
Q: Can I use a refurbished CDN500R-10 in a production tool?
A: Refurbished units from Konmask are fully tested and functionally equivalent. Suitability for production depends on your facility’s qualification policy. Contact us for test reports.
Q: What is the difference between CDN500R-10 and CDN500R-10A?
A: Suffix variants may indicate relay contact configuration or firmware revision differences. Confirm with your system’s service manual or contact our technical team.
Q: Do you provide a warranty?
A: New OEM units carry the manufacturer’s warranty. Refurbished units include a 90-day Konmask functional warranty. Terms available upon request.
Q: Can you ship internationally?
A: Yes. We ship worldwide with DHL, FedEx, and UPS. Export documentation and HS code classification provided for customs clearance.
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Contact: [email protected] | +0086 19859288691
